Section 95324 - Reporting Requirements(a) Initial emissions reporting requirement The owner or operator of a semiconductor operation must submit an initial emissions report pursuant to the requirements in section 95324(b) to the permitting agency no later than March 1, 2011. This report must quantify the monthly and annual emissions from semiconductor operations conducted during the 2010 calendar year.
(b) Annual emissions reporting requirements The owner or operator of a semiconductor operation must submit an annual report to the permitting agency by March 1st of each calendar year that quantifies CO2e emissions occurring in the previous calendar year.
The annual report must include, but may not be limited to, all of the following in subsections (b)(1) through (b)(11).
(1) the company name, address, telephone number, designated contact person and e-mail address for the contact person;(2) the monthly and annual amounts, in kilograms, of each of the following fluorinated gases used for CVD chamber cleaning and etching:(A) hexafluoroethane (C2F6),(B) octafluoropropane (C3F8),(C) octafluorocyclopentene (C5F8),(D) tetrafluoromethane (CF4),(E) trifluoromethane (CHF3),(F) difluoromethane (CH2F2),(G) octafluorocyclobutane (c-C4F8),(H) octafluorotetrahydrofuran (C4F8O),(I) hexafluoro-1,3-butadiene (C4F6),(J) carbon fluoride oxide (COF2),(K) nitrogen trifluoride (NF3), and(L) sulfur hexafluoride (SF6).(3) the monthly and annual square centimeters of wafers processed;(4) the use of process optimization, alternative chemistries, or equipment to reduce fluorinated gas emissions and estimated emissions reductions in CO2e per square centimeter of wafer processed;(5) monthly and annual CO2e emissions determined in accordance with section 95323(a)(1);(6) the volume of fluorinated heat transfer fluids used in the processing of semiconductors;(7) the volume of fluorinated heat transfer fluids purchased;(8) whether the heat transfer fluid was added to an existing cooling system, used to fill a new system, or both;(9) the volume of heat transfer fluid added to an existing cooling system or used to fill a new system;(10) the specific brand name of the heat transfer fluid used; and(11) a certification statement from the owner or operator that the information provided is true, accurate and complete.(c) The owner or operator of a semiconductor operation shall report emission control equipment breakdowns, malfunctions, and failures in accordance with the permitting agency's requirements.(d) The owner or operator of a semiconductor operation that emits 0.0008 MMT or less of CO2e per calendar year is not subject to the reporting requirements in section 95324(b)(3) and (b)(4) and may provide annual data in lieu of monthly data in the emission reports.Cal. Code Regs. Tit. 17, § 95324
1. New section filed 12-14-2009; operative 1-1-2010 pursuant to Government Code section 11343.4 (Register 2009, No. 51). Note: Authority cited: Sections 38501, 38510, 38560, 38560.5, 38580, 39600 and 39601, Health and Safety Code. Reference: Sections 38501, 38505, 38510, 38550, 38551, 38560, 38560.5, 39600 and 39601, Health and Safety Code.
1. New section filed 12-14-2009; operative 1-1-2010 pursuant to Government Code section 11343.4 (Register 2009, No. 51).