SHIN-ETSU CHEMICAL CO., LTD. et al.Download PDFPatent Trials and Appeals BoardMay 25, 20212020006520 (P.T.A.B. May. 25, 2021) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 15/887,207 02/02/2018 Hitoshi NOGUCHI 180039 2257 25944 7590 05/25/2021 OLIFF PLC P.O. BOX 320850 ALEXANDRIA, VA 22320-4850 EXAMINER SONG, MATTHEW J ART UNIT PAPER NUMBER 1714 NOTIFICATION DATE DELIVERY MODE 05/25/2021 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): OfficeAction25944@oliff.com jarmstrong@oliff.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte HITOSHI NOGUCHI, TOSHIHARU MAKINO, MASAHIKO OGURA, HIROMITSU KATO, HIROYUKI KAWASHIMA, SATOSHI YAMASAKI, and NORIO TOKUDA Appeal 2020-006520 Application 15/887,207 Technology Center 1700 Before DONNA M. PRAISS, N. WHITNEY WILSON, and MONTÉ T. SQUIRE, Administrative Patent Judges. WILSON, Administrative Patent Judge. DECISION ON APPEAL Pursuant to 35 U.S.C. § 134(a), Appellant1 appeals from the Examiner’s October 21, 2019 decision to finally reject claims 1, 7, 10, 13, 16, 19, and 20 (“Final Act.”). A telephonic hearing was held on May 17, 2021, a transcript of which will be made part of the record. We have jurisdiction under 35 U.S.C. § 6(b). We reverse. 1 We use the word Appellant to refer to “applicant” as defined in 37 C.F.R. § 1.42. Appellant identifies the real parties in interest as Shin-etsu Chemical Co., Ltd., the National Institute of Advanced Industrial Science And Technology, and the National University Corporation Kanazawa University (Appeal Br. 1). Appeal 2020-006520 Application 15/887,207 2 CLAIMED SUBJECT MATTER Appellant’s disclosure is directed to a method for producing a diamond film using chemical vapor deposition and a foundation substrate for use in the method (Abstract, Appeal Br. 3). An off angle is provided to a surface of the foundation substrate toward a crystal axis of [-1 -1 2] direction or its three-fold symmetric direction with respect to a crystal plane orientation of (111) (Appeal Br. 3). The off angle is in a range of 2 to 15° (id.). The claimed foundation substrate is said to allow production of diamond film with fewer defects than prior art foundations (Spec. ¶ 6). Claim 1, reproduced below from the Claims Appendix, is illustrative of the claimed subject matter: 1. A foundation substrate for forming a diamond film by a chemical vapor deposition method, wherein an off angle is provided to a surface of the foundation substrate toward a crystal axis of [-1-1 2] direction or its three-fold symmetric direction with respect to a crystal plane orientation of (111); wherein the off angle is in the range of 2 to 15°; and wherein a deviation of the direction of the off angle is within ±15°. REFERENCES The prior art relied upon by the Examiner is: Name Reference Date Keller et al. US 8,193,020 B2 June 5, 2012 Schreck et al. US 2013/0143022 A1 June 6, 2013 REJECTION Claims 1, 7, 10, 13, 16, 19, and 20 are rejected under 35 U.S.C. § 103 as unpatentable over Schreck in view of Keller. Final Act. 3. Appeal 2020-006520 Application 15/887,207 3 OPINION The Examiner finds that Schreck discloses each of the elements of the claimed invention, except that Schreck does not disclose the off angle is provided towards a [-1 -1 2] direction or its three-fold symmetric direction with respect to a crystal plane orientation with respect to (111): Schreck et al[.] teaches a substrate for forming diamond thereon comprising an off axis Ir/buffer/Si substrate, where in the angle of the off axis is greater than 2° from the (001) or (111) surface . . . . Schreck et al[.] also teaches the off axis direction was [110] for the (001) plane . . . . Schreck et al[.] teaches greater than 2° which explicit example of 4°. (Final Act. 3–4, internal citations omitted). The Examiner finds that in a method of heteroepitaxial growth, Keller teaches a silicon substrate with a misorientation angle of 0.5 to 10° and a misorientation in the direction of [-1 -1 2] (Final Act. 4). The Examiner determines that it would have been obvious to modify Schreck’s substrate to have the off-angle in the [-1 -1 2] direction “to produce a substrate having a desired off angle and direction suitable for device manufacturing and step flow growth” (id.). The Examiner also finds that the off-angle and the off-angle direction are result effective variables and that optimization of such variables would have been obvious (id.). Appellant makes a number of arguments seeking reversal of the rejection. We focus on the argument that it would not have been obvious to modify Schreck to select the [-1 -1 2] direction recited in the claims and, therefore, that the rejection is based on impermissible hindsight reconstruction (Appeal Br. 12–13). Appeal 2020-006520 Application 15/887,207 4 As noted by Appellant, when describing its process, Keller is explicit that the direction of its off-angle is immaterial: A method for growing an N-face group III nitride film in accordance with the present invention comprises providing a substrate having a growth surface with a misorientation angle between 0.5 and 10 degrees in any direction relative to a miller indexed crystallographic plane [h, i, k, l] of the substrate, where h, i, k, l are miller indices. (Keller 2:25–30, emphasis added). Keller further states: “Again, the misorientation can be in any direction” (Keller 13:50). Thus, while some examples in Keller do use the claimed direction, the preponderance of the evidence of record does not support the Examiner’s determination that it would have been obvious to select that direction to incorporate into Schreck’s substrate. With respect to the Examiner’s argument that the direction of the off angle is a result effective variable, we agree with Appellant that the Examiner has not adequately established that the direction of the off angle is a result effective variable. The Examiner points to Paragraphs 30 and 31 to as evidence that the direction of the off-angle is a result effective variable (Ans. 9). However, for the reasons outlined at pages 12–13 of the Reply Brief, Schreck’s paragraphs 30 and 31 do not teach that the off angle direction produces any recognizable result. Accordingly, the off angle direction cannot be said to be a result effective variable. See In re Antonie, 559 F.2d 618, 621 (CCPA 1977) (An exception to the general rule that optimization of a value is an obvious modification is where the parameter optimized was not recognized to be a result effective variable). Appeal 2020-006520 Application 15/887,207 5 Finally, because Schreck is directed towards the production of diamond films, while Keller is directed to the production of Group III nitride films, we agree with Appellant that a person of skill in the art would not have had reason to believe that features in Keller providing good results for production of Group III nitride films would translate to good results in producing the diamond films of Schreck. Accordingly, we reverse the rejection. DECISION SUMMARY In summary: Claim(s) Rejected 35 U.S.C. § Reference(s)/Basis Affirmed Reversed 1, 7, 10, 13, 16, 19, 20 103 Schreck, Keller 1, 7, 10, 13, 16, 19, 20 REVERSED Copy with citationCopy as parenthetical citation