SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCDownload PDFPatent Trials and Appeals BoardMay 10, 20212020003421 (P.T.A.B. May. 10, 2021) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 15/871,586 01/15/2018 Michael J. SEDDON ONS02289C01US 2740 132194 7590 05/10/2021 SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC (AS) 5005 E. McDowell Road Maildrop A700 Phoenix, AZ 85008 EXAMINER JOY, JEREMY J ART UNIT PAPER NUMBER 2816 NOTIFICATION DATE DELIVERY MODE 05/10/2021 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): ipdocket@iptech.law patents@onsemi.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte MICHAEL J. SEDDON, TAKASHI NOMA, and KAZUHIRO SAITO Appeal 2020-003421 Application 15/871,586 Technology Center 2800 Before CATHERINE Q. TIMM, BRIAN D. RANGE, and MERRELL C. CASHION, JR., Administrative Patent Judges. RANGE, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE Pursuant to 35 U.S.C. § 134(a), Appellant1 appeals from the Examiner’s decision to reject claims 1–5, 7–11, and 14–18. We have jurisdiction under 35 U.S.C. § 6(b). We REVERSE. 1 “Appellant” refers to “applicant” as defined in 37 C.F.R. § 1.42. Appellant identifies the real party in interest as SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC. Appeal Br. 3. Appeal 2020-003421 Application 15/871,586 2 CLAIMED SUBJECT MATTER2 Appellant describes the invention as relating to “a semiconductor wafer and method of ball drop on a thin wafer with an edge support ring.” Spec. ¶ 2. In particular, the Specification refers to Figure 1c to explain that, as part of a prior art technique, conductive balls or bumps 34 need to be formed on a conductive layer 30 for electrical interconnect. Spec. ¶¶ 3–7. The Specification explains that if a stencil is disposed over an edge support ring with a gap between the stencil and the conductive layer as Figure 1c illustrates, bumps will be randomly dispersed over surface 32 in an ineffective manner. Id. ¶ 6. Similarly, the Specification explains that if the semiconductor is warped, as Figure 1d illustrates, a stencil having a gap between it and the conductive layer will not effectively form bumps. Id. ¶ 7. The Specification addresses this problem with a stencil that “comes in contact with or is immediately adjacent to conductive layer 160” as Figure 4b illustrates. Id. at 23. Claims 1, 7, and 14 are independent. Claim 1 is illustrative, and we reproduce it below while adding emphasis to key recitations: 1. A method of making a semiconductor device, comprising: providing a semiconductor wafer including an edge support ring around a perimeter of the semiconductor wafer; forming a conductive layer over a surface of the semiconductor wafer; 2 In this Decision, we refer to the Final Office Action dated June 17, 2019 (“Final Act.”), the Appeal Brief filed October 15, 2019 (“Appeal Br.”), the Examiner’s Answer dated February 3, 2020 (“Ans.”), and the Reply Brief filed March 31, 2020 (“Reply Br.”). Appeal 2020-003421 Application 15/871,586 3 providing a first stencil including a plurality of first openings; and disposing the first stencil over the edge support ring with the first openings extending below a top surface of the edge support ring to contact the conductive layer; wherein the first stencil is unitary. Appeal Br. 23 (Claim App. (emphasis added)). Claims 7 and 14 similarly recite that the stencil extends “to the conductive layer.” Id. at 25, 27. REFERENCES The Examiner relies upon the prior art below in rejecting the claims on appeal: Name Reference Date Applicant’s Admitted Prior Art (AAPA) Application Figures 1a– 1d and associated disclosure N/A Gruber et al. (“Gruber”) US 8,523, 046 B1 Sept. 3, 2013 Ishikawa et al. (“Ishikawa”) US 2010/0127049 A1 May 27, 2010 Lee et al. (“Lee”) US 2015/001278 A1 Jan. 1, 2015 REJECTIONS The Examiner maintains (Ans. 3) the following rejections on appeal: A. Claims 1–5, 7–11, and 14–17 under 35 U.S.C. § 103 as obvious over Applicant’s Admitted Prior Art (“AAPA”) in view of Lee and Gruber. Final Act. 6. Appeal 2020-003421 Application 15/871,586 4 B. Claim 18 under 35 U.S.C. § 103 as obvious over Applicant’s Admitted Prior Art (“AAPA”) in view of Lee, Gruber, and Ishikawa. Id. at 20.3 OPINION The Examiner has the initial burden of establishing a prima facie case of obviousness under 35 U.S.C. § 103. In re Oetiker, 977 F.2d 1443, 1445 (Fed. Cir. 1992) (“[T]he examiner bears the initial burden, on review of the prior art or on any other ground, of presenting a prima facie case of unpatentability.”). To establish a prima facie case of obviousness, the Examiner must show that each and every limitation of the claim is described or suggested by the prior art or would have been obvious based on the knowledge of those of ordinary skill in the art or the inferences and creative steps a person of ordinary skill in the art would have employed. KSR Int’l Co. v. Teleflex Inc., 550 U.S. 398, 417 (2007); In re Fine, 837 F.2d 1071, 1074 (Fed. Cir. 1988). To resolve the issues before us on appeal, we focus on the Examiner’s findings and determinations that relate to the error Appellant identifies. We direct attention to the Examiner’s Final Office Action for a complete statement of the rejection of claim 1. Final Act. 6–8. We focus our attention on the reference to Lee, which the Examiner relies upon to address the above highlighted claim 1 limitation and the similar recitations of claims 7 and 14. 3 The Examiner does not explicitly reference Gruber when rejecting claim 18, but we understand that the Examiner still relies upon Gruber for recitations appearing in claim 1 because the claim 18 rejection is based upon the AAPA as modified above in further view of Ishikawa. Final Act. 20. Appeal 2020-003421 Application 15/871,586 5 The Examiner finds that stencil (50) of Lee does not extend to or contact the conductive layer and that the stencil support structure (14/54) between the openings (56) do not extend to the semiconductor wafer. Ans. 4–5; see also Lee Fig. 1 (illustrating a gap between mask 50 and the semiconductor wafer). The Examiner nonetheless finds that Lee teaches “openings” as recited by claim 1 that extend to the conductive layer as claimed. Ans. 5. The Examiner explains that “while the stencil may not contact the conductive layers the openings do in fact contact the conductive layers and therefore satisfy the claim limitation as currently written.” Id. The Examiner reaches this determination by construing an “opening” as “an empty space or void formed between the stencil boundaries (14/54), contacting the conductive layer.” Id. Appellant argues that the Examiner errs by construing the claims too broadly. Reply Br. 4–5. We agree. Claims must be construed in view of the context provided by the Specification. See, e.g., In re Morris, 127 F.3d 1048, 1054 (Fed. Cir. 1997) (holding that ignoring the specification in claim construction is unreasonable). Here, the Specification explains, for example, that narrow portion 180 of openings 176 “comes in contact with or is immediately adjacent to conductive layer 160.” Spec. ¶ 23; see also, e.g., Fig. 4b (illustrating stencil physically contacting conductive layer). The Specification, therefore, distinguishes a scenario where openings physically contact the conductive layer from a scenario where openings are merely near the conductive layer. Under the Examiner’s broad interpretation of the claims, however, this distinction would vanish. The language of the claims themselves also indicates that the stencil must physically contact the conductive layer. Claim 1 requires “contact,” and we agree with Appellant that an empty space or void cannot reasonably Appeal 2020-003421 Application 15/871,586 6 cause contact in the context of claim 1. Reply Br. 4. Claims 7 and 14 require stencil openings extending to the conductive layer. Construing the opening as a void would, in essence, negate these recitations because any void would extend everywhere including to the conductive layer. Cf. Application of Miller, 441 F.2d 689, 694 (C.C.P.A. 1971) (“All words in a claim must be considered in judging the patentability of that claim against the prior art.”) (internal quotes and citation omitted). Thus, in view of the claims’ language and the Specification, the broadest reasonable interpretation of claims 1, 7, and 14 requires, among other things, that the stencil physically contact the conductive layer. The Examiner finds that Lee does not teach or suggest a stencil physically contacting the conductive layer, and the Examiner does not find that the other cited references teach such contact. We, thus, do not sustain the Examiner’s rejections. DECISION SUMMARY In summary: Claims Rejected 35 U.S.C. § Reference(s)/Basis Affirmed Reversed 1–5, 7–11, 14–17 103 AAPA, Lee, Gruber 1–5, 7–11, 14–17 18 103 AAPA, Lee, Gruber, Ishikawa 18 Overall Outcome 1–5, 7–11, 14–18 REVERSED Copy with citationCopy as parenthetical citation