SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCDownload PDFPatent Trials and Appeals BoardApr 27, 202015410288 - (D) (P.T.A.B. Apr. 27, 2020) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 15/410,288 01/19/2017 Michael J. SEDDON ONS01769D01US 6024 132194 7590 04/27/2020 SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC (AS) 5005 E. McDowell Road Maildrop A700 Phoenix, AZ 85008 EXAMINER JUNG, MICHAEL ART UNIT PAPER NUMBER 2895 NOTIFICATION DATE DELIVERY MODE 04/27/2020 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): ipdocket@iptech.law patents@onsemi.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ____________ Ex parte MICHAEL J. SEDDON and FRANCIS J. CARNEY Appeal 2019-003363 Application 15/410,288 Technology Center 2800 ____________ Before ROMULO H. DELMENDO, ELIZABETH M. ROESEL, and MERRELL C. CASHION, JR., Administrative Patent Judges. DELMENDO, Administrative Patent Judge. DECISION ON APPEAL The Appellant1 appeals under 35 U.S.C. § 134(a) from the Primary Examiner’s final decision to reject claims 1–12 and 17–21.2 We have jurisdiction under 35 U.S.C. § 6(b). We affirm. 1 We use the word “Appellant” to refer to “applicant” as defined in 37 C.F.R. § 1.42—namely, Semiconductor Components Industries, LLC (Application Data Sheet filed January 19, 2017 at 5), which is also identified as the real party in interest (Appeal Brief filed October 3, 2018 (“Appeal Br.”) at 3). 2 See Appeal Br. 11–37; Reply Brief filed March 22, 2019 (“Reply Br.”) at 2–13; Final Office Action entered June 13, 2018 (“Final Act.”) at 2–20; Examiner’s Answer entered January 30, 2019 (“Ans.”) at 3–37. Appeal 2019-003363 Application 15/410,288 2 I. BACKGROUND The subject matter on appeal relates to a semiconductor package formed by mounting a semiconductor device onto a substrate by reflowing metals (Specification filed January 19, 2017 (“Spec.”) ¶ 2; Abstract). Figures 1 and 2 (annotated), which illustrate an embodiment of the claimed subject matter, are reproduced from the Drawings filed January 19, 2017, as follows: Figures 1 and 2 above depicts mounting a die 14 provided with multiple metallic layers onto a substrate 50 that includes a silver layer 52 and copper layer 54 to produce a semiconductor device package 2 in which an intermetallic layer 56 has been formed by interaction of a tin layer 48, the substrate 50’s silver layer 52, a silver sublayer 44, and a copper sublayer 46, wherein adhesion between the die 14 and substrate 50 is effected without a solder paste or preforms (Spec. ¶¶ 29–30, 64). Representative claim 1 is reproduced from the Claims Appendix to the Appeal Brief, as follows: Appeal 2019-003363 Application 15/410,288 3 1. A semiconductor package, comprising: a die comprising a plurality of layers arranged in the following order: a layer comprising titanium coupled to the die; and an intermetallic layer comprising one of an intermetallic consisting of silver and tin and an intermetallic consisting of copper and tin, the one of silver and tin and copper and tin derived from one of the die only and the die and the substrate only; and a substrate comprising a copper layer directly coupled to the intermetallic layer; wherein the intermetallic layer has a melting temperature greater than 260 degrees Celsius; wherein the intermetallic layer does not comprise a solder; and wherein the intermetallic layer does not comprise a bonding material. (Appeal Br. 38 (emphases added)). II. REJECTIONS ON APPEAL On appeal, the Examiner maintains several rejections, as follows: A. Claims 1–12 and 18–21 under 35 U.S.C. § 112(a), as failing to comply with the written description requirement; B. Claims 1–12 and 18–21 under 35 U.S.C. § 112(b) as being indefinite;3 C. Claims 1–5 and 18–21 under 35 U.S.C. § 103 as being unpatentable over Lin et al.4 (“Lin”); and D. Claim 17 under 35 U.S.C. § 102(a)(2) as being anticipated by 3 On appeal, the rejection under 35 U.S.C. § 112(b) of claim 17 has been withdrawn (Ans. 19). 4 US 8,803,337 B1, issued August 12, 2014. Appeal 2019-003363 Application 15/410,288 4 or, in the alternative, as obvious over Hisazato et al.5 (“Hisazato”). (Ans. 3–37; Final Act. 2–20). III. DISCUSSION Rejection A (Written Description). The Examiner finds that “claim 1 fails to comply with the written description requirement, because the last two wherein clauses of claim 1 appear[] to overly constrain the metes and bounds of claim 1 by introducing overly restrictive caveats” (Ans. 3).6 With respect to the first “wherein” clause (“wherein the intermetallic layer does not comprise a solder”), the Examiner points to (1) a description in the Specification stating that “there may be some pure tin, some pure copper, some pure silver, some pure nickel, and so forth, in solution, with some intermetallics interspersed throughout” (Spec. ¶ 60) and (2) several prior art documents (Williams, US 2013/0043595 A1, published Feb 21, 2013; Syllaios et al. (“Syllaios”), US 2006/0128136 A1, published June 15, 2006; and Choe et al. (“Choe”), US 2007/0152016 A1, published July 5, 2007) disclosing soft metals such as pure tin (Sn) or pure silver (Ag) as suitable solder materials (Ans. 3–4). Based on these findings, the Examiner states that “a caveat that the intermetallic layer does not comprise a solder in the first amended feature is not supported by the original disclosure” (Ans. 3–5). 5 US 2015/0076516 A1, published March 19, 2015. 6 The last two “wherein” clauses (i.e., “wherein the intermetallic layer does not comprise a solder” and “wherein the intermetallic layer does not comprise a bonding material”), which we refer to as the “first” and “second” wherein clauses, respectively, were introduced into claim 1 during examination via Amendments filed December 6, 2017 and September 6, 2017, respectively. Appeal 2019-003363 Application 15/410,288 5 With respect to the second “wherein” clause (“wherein the intermetallic layer does not comprise a bonding material”), the Examiner finds that Hisazato describes intermetallic compounds such as SnCu and Ag3Sn, which appear to be included within the scope of the Appellant’s “intermetallic” materials, as bonding materials (id. at 5). The Examiner then concludes that “the caveat of the intermetallic layer not comprising a bonding material is not supported by the original disclosure” (id.). The Appellant contends that the Examiner’s rejection fails to satisfy the initial burden of presenting evidence or reasons why a person having ordinary skill in the art would not have recognized in the original disclosure a description of the invention defined by the claims (Appeal Br. 11 (citing In re Wertheim, 541 F.2d 257, 263 (CCPA 1976)). Regarding the first “wherein” clause, the Appellant emphasizes that the broadest reasonable interpretation standard does not include giving claims a legally incorrect interpretation and faults the Examiner’s reliance on several prior art documents showing that Sn, Ag, and Cu—in certain situations—can be considered as solder materials (Appeal Br. 12–13). In support, the Appellant points to examples in which copper, for example, is not being used as solder (id. at 14). Regarding the second “wherein” clause, the Appellant faults the Examiner’s reliance on Hisazato’s teaching that SnCu and Ag3Sn intermetallics are solders or bonding materials and then “mak[ing] the jump from Hisaz[a]to disclosing intermetallics which are bonding materials to the conclusion that all intermetallics are therefore bonding materials” (id. at 14). The Appellant argues that “though the substrate and the die are reflowed together [in the current invention], there is no indication that the tin-copper intermetallic or the silver-tin intermetallic ever reach the equilibrium Appeal 2019-003363 Application 15/410,288 6 necessary in the process . . . to actually form a SnCu or Ag3Sn phase” (id. at 15). According to the Appellant, the term “bonding material” is a term of art in the semiconductor packaging industry that has “a scope more limited than just any material that bonds” (id.). We agree with the Appellant as to the first “wherein” clause (“wherein the intermetallic layer does not comprise a solder”) but not the second (“wherein the intermetallic layer does not comprise a bonding material”). With respect to the first “wherein” clause, the Examiner relies on paragraph 60 of the Specification (Ans. 3–4). That description, however, discloses using silver, tin, and/or copper to form an intermetallic layer—not solder per se. Indeed, paragraph 64 of the Specification provides explicit support for the concept that the die may be adhered to the substrate without the use of solder paste in addition to, e.g., the intermetallic layer. Therefore, the Examiner’s rejection based on a lack of adequate written description for the first “wherein” clause is not well-founded. The Examiner’s rejection based on a lack of adequate written description for the second “wherein” clause is another matter. Although Hisazato states that “[s]older including tin (Sn) is used as [a] bonding material” and that, alternatively, a “bonding material . . . may be an intermetallic compound including silver (Ag) nanoparticles, a silver (Ag) sintered material, tin copper (SnCu), silver tin (Ag3Sn), or the like” (Hisazato ¶ 34), it is far from clear that “bonding material” is coextensive in scope and meaning with “solder.” But regardless of what “bonding material” would mean to one skilled in the relevant art, the Appellant fails to direct us to any disclosure in the application, as originally filed, that mentions or even hints at a semiconductor package that may be made Appeal 2019-003363 Application 15/410,288 7 without using a “bonding material.” The Appellant’s argument that, in the claimed invention, “all of the materials used to form the intermetallic are present as part of the die itself or the substrate” (Appeal Br. 16) is misplaced. A disclosure in the originally-filed application showing the use of only certain materials may provide support for a claim directed to a semiconductor package that consists of the specifically-disclosed materials, but not a semiconductor package that can include the specifically-disclosed materials plus any unrecited material except for a “bonding material.” No such concept is described in the application, as originally filed. Ex parte Grasselli, 1983 WL 51855 *2 (Bd. App. 1983) (“Despite appellants’ arguments to the contrary, we agree with the examiner’s position of record that the negative limitations recited in the present claims, which did not appear in the specification as filed, introduce new concepts and violate the description requirement of the first paragraph of 35 U.S.C. 112.”), aff’d sub nom In re Graselli, 738 F.2d 453 (Fed. Cir. 1984). Because we concur with the Examiner’s finding that the second “wherein” clause in claim 1 lacks sufficient written description in the application, as originally filed, we uphold Rejection A as to claim 1. Independent claim 6 recites a similar wherein clause (“wherein the intermetallic layer is not a bonding material”) and lacks sufficient written description in the application, as originally filed, for the same reasons as discussed above for independent claim 1. See Ans. 6. The Appellant does not challenge the Examiner’s rejection of dependent claims 2–5, 7–12, and 18–21. The Examiner’s rejection is correct because each of these claims depends from either rejected independent claim 1 or rejected independent claim 6. Id. Appeal 2019-003363 Application 15/410,288 8 Rejection B (Indefiniteness). The Examiner states that claim 1 is indefinite for two reasons (Ans. 7). First, regarding the first “wherein” clause, the Examiner acknowledges that “there is nothing inherently ambiguous or uncertain about a negative limitation” but states that in “looking at the Appellant’s description of what is actually contained in the intermetallic layer (para [0060]) and what is considered to be solder in the semiconductor packaging art, it appears that the intermetallic layer of the present application actually contains solder” (id. at 7–8). Second, regarding the second “wherein” clause, the Examiner states that “it is unclear what is actually being encompassed by an intermetallic layer with the second negative limitation of the intermetallic layer not comprising a bonding material” and that this ambiguity is even more pronounced given the Appellant’s comments regarding Hisazato’s Ag3Sn and SnCu bonding materials as being excluded from claim 1’s scope when they are necessarily present (id. at 8). Regarding the first “wherein” clause, the Appellant argues that “the Examiner is making an unreasonably broad interpretation of ‘solder[]’” because it is erroneously based on the notion that all uses of silver, tin, and copper are as solder materials (Appeal Br. 20–21). Regarding the second “wherein” clause, the Appellant contends that “[t]he Examiner is again making [an] unreasonably broad interpretation that any intermetallic layer is a bonding material as the intermetallic solders of Hisaz[a]to a[re] used as physically separate bonding materials added to the system of the die and the substrate” (id. at 22). We agree with the Appellant as to the first “wherein” clause but not the second “wherein” clause. As the Appellant points out, not every use of Appeal 2019-003363 Application 15/410,288 9 silver, tin, or copper is for solder. In the current Specification, these elements are being used to form the intermetallic layer, which is described as distinct from additional solder paste (Spec. ¶¶ 60, 64). Therefore, we discern no basis to conclude that the negative limitations recited in the first “wherein” clause would create any ambiguity in terms of claim scope. As for the second “wherein” clause, we agree with the Examiner that the negative limitations concerning the absence of a “bonding material” renders claim 1 indefinite. The term “bonding material” does not even appear in the Specification and, therefore, the Specification fails to circumscribe with reasonable precision and clarity as to what the Inventors mean by an “intermetallic layer does not comprise a bonding material.” This ambiguity is even more pronounced given the Appellant’s unsubstantiated argument that not “any material that bonds something is a bonding material” but that, instead, “bonding material” has some unspecified art-recognized meaning (Appeal Br. 22). For these reasons, we sustain Rejection B as to claim 1. A similar “wherein” clause in independent claim 6 makes that claim indefinite for the same reasons. See Ans. 9. The Examiner does not err in rejecting claims 2– 5, 7–12, and 18–21 as depending from a claim that is indefinite. Id. Rejection C (Obviousness in View of Lin). For the sake of completeness and to avoid a piece meal appeal, we also address the prior art rejections, which do not require us to rely on the scope of the second “wherein” clause. Ex parte Tanksley, 26 USPQ2d 1384, 1387 (BPAI 1991) (exercising discretion to reach art rejections despite indefiniteness where nature of case permitted). Appeal 2019-003363 Application 15/410,288 10 The Appellant relies on the same arguments for all claims subject to this rejection (Appeal Br. 25–31). Therefore, the rejected claims stand or fall with claim 1, which we select as representative pursuant to 37 C.F.R. § 41.37(c)(1)(iv). The Examiner finds that Lin describes a semiconductor package having all the limitations recited in claim 1 except that it does not specify that the second metal insertion layer 46, which may be considered as part of a substrate and is directly coupled to an intermetallic layer 52B, is a copper layer as required by claim 1 (i.e., “a substrate comprising a copper layer directly coupled to the intermetallic layer”) (Ans. 10–11). The Examiner finds, however, that Lin would have suggested making the second metal insertion layer 46 of the same material as the first metal insertion layer 26, which is disclosed as a copper layer (id. at 11). The Examiner concludes that it would have been obvious to one of ordinary skill in the art . . . to have chosen the same material (copper) for the second metal insertion layer as the first metal insertion layer as Lin named the second metal insertion layer 46 as a metal insertion layer and represented it in the drawings with the same geometry as the first metal insertion layer 26 (id. at 11–12 (bolding added)). The Appellant argues that the Examiner’s rejection does not identify any rationale between the factual findings and the legal conclusion of obviousness but acknowledges that “[i]t appears that the Examiner is using [a] rational[e]” based on “[s]imple substitution of one known element for another to obtain predictable results” (Appeal Br. 27). However, the Appellant argues that Lin does not describe “a substrate comprising a copper layer directly coupled to the intermetallic layer,” as recited in claim 1, Appeal 2019-003363 Application 15/410,288 11 because Lin’s substrate 30 does not include second metal insertion layer 46 (id. at 29). Furthermore, the Appellant argues that the Examiner incorrectly treats the limitation “the one of silver and tin and copper and tin derived from one of the die only and the die and the substrate only” as a product-by- process limitation (id. at 29–31). According to the Appellant, “the [claimed] semiconductor package has an intermetallic layer with a structure that reflows a second time only at a temperature greater than the temperature applied when the intermetallic layer was first reflowed” (id. at 30–31). The Appellant’s arguments fail to identify reversible error in the Examiner’s rejection. In re Jung, 637 F.3d 1356, 1365 (Fed. Cir. 2011). The Examiner’s rejection includes an explicitly articulated reasoning for making Lin’s second metal insertion layer 46 in the second die 120 to be made of the same material as the first metal insertion layer 26 in the first die 110—namely, copper (Ans. 11–12). Indeed, consistent with the Examiner’s position, Lin explicitly teaches that the “components on the second die 120 can be formed [of] the same or similarly as discussed with regard to corresponding components on the first die 110” (Lin col. 5, ll. 1–5; Fig. 2). KSR Int’l Co. v. Teleflex Inc., 550 U.S. 398, 416 (2007) (“[W]hen a patent claims a structure already known in the prior art that is altered by the mere substitution of one element for another known in the field, the combination must do more than yield a predictable result.”). See also In re Fracalossi, 681 F.2d 792, 794 (CCPA 1982) (“[E]vidence establishing lack of all novelty in the claimed invention necessarily evidences obviousness.”). We also find no persuasive merit in the Appellant’s argument based on the notion that Lin’s substrate 30 does not include the second metal insertion layer 46 (Appeal Br. 29). The question whether Lin describes Appeal 2019-003363 Application 15/410,288 12 claim 1’s limitation “a substrate comprising a copper layer directly coupled to the intermetallic layer” does not turn on how Lin defines “substrate 30” but, rather, what the Inventors mean when they use the term “substrate” in the context of the current Specification. Here, Lin uses the term “substrate” to refer to a semiconductor substrate such as bulk silicon, a semiconductor wafer, a silicon-on-insulator (SOI) substrate, or a silicon germanium substrate (Lin col. 2, ll. 55–64). By contrast, the Appellant does not limit the scope of what is meant by “substrate” other than to state that it is “a portion of a ceramic board” and that it may be a multi-layer structure “including a silver layer 52 atop a copper layer 54” (bolding added) that is to be adhered by reflow to a die (Spec. ¶ 57; Figs. 1–2). Under these circumstances, we find the Examiner’s proffered claim construction of the term “substrate” in claim 1 to read on Lin’s multilayer structure inclusive of second substrate 30 and second metal insertion layer 46 to be adhered to first die 110 by reflow to be reasonable (Lin Fig. 2). In re ICON Health & Fitness, Inc., 496 F.3d 1374, 1379 (Fed. Cir. 2007) (“[W]e look to the specification to see if it provides a definition for claim terms, but otherwise apply a broad interpretation. As this court has discussed, this methodology produces claims with only justifiable breadth.”). The Appellant’s argument (Appeal Br. 29–31) based on the limitation “the one of silver and tin and copper and tin derived from one of the die only and the die and the substrate only” is not persuasive because it appears to be based on an argued feature (“the [claimed] semiconductor package has an intermetallic layer with a structure that reflows a second time only at a temperature greater than the temperature applied when the intermetallic layer was first reflowed”) that is not recited in claim 1. See In re Hiniker Appeal 2019-003363 Application 15/410,288 13 Co., 150 F.3d 1362, 1369 (Fed. Cir. 1998) (The “name of the game is the claim” and unclaimed features cannot impart patentability to claims). See also In re Self, 671 F.2d 1344, 1348 (CCPA 1982) (“[A]ppellant’s arguments fail from the outset because . . . they are not based on limitations appearing in the claims.”). Here, the Appellant does not direct us to evidence that distinguishes Lin’s product from the claimed product based on features recited in the claim. For these reasons, we uphold Rejection C. Rejection D (Anticipation over Hisazato). Claim 17 recites: 17. A semiconductor package, comprising: a die comprising a plurality of layers arranged in the following order: a layer comprising titanium coupled to the die; and an intermetallic layer comprising one of an intermetallic consisting of silver and tin and an intermetallic consisting of copper and tin; and a substrate comprising a copper layer directly coupled to the intermetallic layer; wherein the intermetallic layer has a melting temperature greater than 260 degrees Celsius; and one of: the intermetallic consisting of silver and tin is derived from one of the die only and the die and the substrate only; and the intermetallic consisting of copper and tin is derived from one of the die only and the die and the substrate only. (Appeal Br. 42 (emphasis added)). Appeal 2019-003363 Application 15/410,288 14 The Examiner finds that Hisazato describes every limitation recited in claim 177 (Ans. 15–18). Regarding the limitations highlighted above in reproduced claim 17, the Examiner explains that these are product-by- process limitations that have not been shown to structurally distinguish the claimed product over the prior art product (id. at 16–18). The Appellant argues that the claim does not recite a process at all but a specific semiconductor package that “has an intermetallic layer with a structure that reflows a second time only at a temperature greater than the temperature applied when the intermetallic layer was first reflowed” (Appeal Br. 34). According to the Appellant, “[u]nlike the intermetallic in Appellant’s disclosure, the solder of Hisaz[a]to has the same reflow temperature every time it is reflowed” (id.). The Appellant’s argument fails because it is based on limitations that do not appear in claim 17. See Hiniker, 150 F.3d at 1369; Self, 671 F.2d at 1348. Even if the highlighted claim recitations are not product-by-process limitations as argued by the Appellant (Appeal Br. 34), the Appellant does not direct us to evidence that distinguishes the structure recited in the claim from the structure of Lin’s product. Therefore, we also sustain Rejection D. IV. CONCLUSION In summary: 7 The Examiner’s reference to claim 1 (Ans. 16) appears to contain a typographical error (id. at 34–36). Appeal 2019-003363 Application 15/410,288 15 Claims Rejected 35 U.S.C. § Reference(s)/Basis Affirmed Reversed 1–12, 18–21 112(a) Lack of Written Description 1–12, 18–21 1–12, 18–21 112(b) Indefiniteness 1–12, 18–21 1–5, 18–21 103 Lin 1–5, 18–21 17 102(a)(2) Hisazato 17 Overall Outcome 1–12, 17–21 No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). AFFIRMED Copy with citationCopy as parenthetical citation