Jia-Ni Chu et al.Download PDFPatent Trials and Appeals BoardAug 31, 20212020005137 (P.T.A.B. Aug. 31, 2021) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 14/067,605 10/30/2013 Jia-Ni Chu W9643-04 5094 30633 7590 08/31/2021 W.R. GRACE & CO.-CONN. 7500 GRACE DRIVE COLUMBIA, MD 21044 EXAMINER DAHIMENE, MAHMOUD ART UNIT PAPER NUMBER 1713 MAIL DATE DELIVERY MODE 08/31/2021 PAPER Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte JIA-NI CHU and JAMES NEIL PRYOR Appeal 2020-005137 Application 14/067,605 Technology Center 1700 Before LINDA M. GAUDETTE, DEBRA L. DENNETT, and RACHEL H. TOWNSEND, Administrative Patent Judges. GAUDETTE, Administrative Patent Judge. DECISION ON APPEAL1 Pursuant to 35 U.S.C. § 134(a), the Appellant2 appeals from the Examiner’s decision rejecting claims 1–7, 11–14, 23, 24, 26, 27, 31, 32, 34, and 35. We have jurisdiction under 35 U.S.C. § 6(b). We AFFIRM. 1 The following documents are of record: Specification filed October 30, 2013 (“Spec.”); Final Rejection dated June 6, 2019; Appeal Brief filed March 3, 2020 (“Appeal Br.”); Examiner’s Answer dated April 30, 2020; Reply Brief filed June 29, 2020 (“Reply Br.”). 2 “Appellant” refers to “applicant” as defined in 37 C.F.R. § 1.42. The Appellant identifies the real party in interest as W. R. Grace & Co.-CONN. Appeal Br. 3. Appeal 2020-005137 Application 14/067,605 2 CLAIMED SUBJECT MATTER The “invention relates to abrasive particles and slurries containing the particles,” in particular for use in chemical mechanical planarization (CMP). Spec. ¶ 1. Claims 1 and 11, reproduced below, are illustrative of the claimed subject matter: 1. An abrasive composition for polishing substrates comprising: a plurality of colloidal silica abrasive particles having a polydisperse particle size distribution with a median particle size, by volume, being about 20 nanometers to about 100 nanometers, and a span value, by volume, being greater than or equal to about 15 nanometers, wherein a fraction of said colloidal silica abrasive particles having a particle size greater than about 100 nanometers is less than or equal to about 20% by volume of the colloidal silica abrasive particles; water; and ammonium hydroxide; with the proviso that said abrasive composition does not contain any fumed silica particles. Appeal Br. 34 (Claims App.). 11. An abrasive slurry composition for polishing substrates consisting essentially of: a plurality of colloidal silica abrasive particles having a polydisperse particle size distribution with a median particle size, by volume, being about 20 nanometers to about 100 nanometers, and a span value, by volume, being greater than or equal to 15 nanometers, wherein a fraction of said colloidal silica abrasive particles having a particle size greater than about 100 nanometers is less than or equal to about 20% by volume of the colloidal silica abrasive particles; a liquid carrier consisting essentially of water; and a particle stabilizer consisting essentially of an alkaline compound. Appeal 2020-005137 Application 14/067,605 3 Id. at 36. REFERENCES Name Reference Date Fournier US 6,200,899 B1 Mar. 12, 2001 Fang US 6,527,817 B1 Mar. 4, 2003 Fruge US 2003/0198759 A1 Oct. 23, 2003 Banerjee US 2006/0046490 A1 Mar. 2, 2006 REJECTIONS 1. Claims 1–7, 23, and 24 are rejected under 35 U.S.C. § 103 as unpatentable over Banerjee in view of Fruge. Final Act. 2–7. 2. Claims 26, 32, and 35 are rejected under 35 U.S.C. § 103 as unpatentable over Banerjee in view of Fruge and Fournier. Final Act. 10–12. 3. Claims 11–14 are rejected under 35 U.S.C. § 103 as unpatentable over Fang. Final Act. 7–10. 4. Claims 27, 31, 34, and 35 are rejected under 35 U.S.C. § 103 as unpatentable over Fang in view of Fournier. Final Act. 10–12. 5. Claims 1, 11, and 35 are rejected under 35 U.S.C. § 103 as unpatentable over Fournier in view of Fruge. 6. Claims 1, 11, and 35 are rejected under 35 U.S.C. § 103 as unpatentable over Fournier in view of Fang. OPINION Independent claims 1, 11, and 35 recite compositions “comprising” (claim 1), “consisting essentially of” (claim 11), and “consisting of” (claim 35) “a plurality of colloidal silica abrasive particles” having the following Appeal 2020-005137 Application 14/067,605 4 properties: (1) a polydisperse particle size distribution with a median particle size, by volume, of about 20 to about 100 nanometers; (2) a span value, by volume, greater than or equal to about 15 nanometers; and (3) 20% or less by volume with a particle size greater than about 100 nanometers. See Appeal Br. (Claims App.) 32, 36, 39.3 Claim 1 further includes a negative claim limitation: “said abrasive composition does not contain any fumed silica particles.” Id. at 32. In addition to “a plurality of colloidal silica abrasive particles,” independent claims 1 and 35 recite that the abrasive composition “compris[es]” (claim 1) and “consist[s] of” (claim 35) water and ammonium hydroxide, see Appeal Br. (Claims App.) 32, 39, and independent claim 11 recites that the abrasive slurry composition “consist[s] essentially of . . . a liquid carrier consisting essentially of water; and a particle stabilizer consisting essentially of an alkaline compound,” id. at 36. Rejections over Banerjee in view of Fruge The Examiner rejected claims 1–7, 23, and 24 as unpatentable over Banerjee in view of Fruge, and claims 26, 32, and 35 as unpatentable over 3 The Specification explicitly defines “‘[p]oly-dispersed’ . . . as meaning a dispersion of particles having a particle size distribution in which the median particle size is in the range of 15–100 nm and which has a relatively large distribution.” Spec. ¶ 26. The Specification explicitly defines “‘[s]pan’ . . . as meaning a measure of the breadth of particle size distribution.” Id. “The span (by volume) range is measured by subtracting the d10 particle size (i.e., the size below which are 10% by volume of the particles) from the d90 particle size (i.e., the size below which are 90% by volume of the particles) . . . .” Id. As to property (3), the Specification explains that “particles that are relatively large (e.g., above 100 nanometers) . . . contribute to scratching and the appearance of defects on the surface of the substrate subsequent to the CMP process.” Id. Appeal 2020-005137 Application 14/067,605 5 Banerjee in view of Fruge and Fournier. See above-listed grounds 1 and 2. The Appellant argues in support of patentability of claims 1, 26, 32, and 35. See generally Appeal Br. 10–16, 21–24, 26, 27. We address the arguments as to each of these claims below. 1. Claim 1 The Appellant argues that Banerjee, directed to specific chemical mechanical polishing (CMP) abrasive compositions, would not have “guide[d] one skilled in the art to seek out the teaching of Fruge directed to inkjet recording sheets. There simply is no connection between the non- analogous teachings of Banerjee and Fruge other than both references disclose the use of colloidal silica as a composition component.” Appeal Br. 12. The Appellant further argues that even if the ordinary artisan “would have somehow been guided to the teaching of Fruge,” id., they would have had neither a reason to modify nor a reasonable expectation of success in modifying Banerjee’s composition “to utilize a polydispersed colloidal silica, similar to Fruge’s polydispersed cationic colloidal silica,” id. at 13. The Appellant’s arguments are not persuasive because the Examiner did not rely on Fruge for a reason to modify Banerjee. See Final Act. 5.4 4 We additionally note that the Appellant misapprehends the law on analogous art. The question is not whether one prior art reference is analogous to another prior art reference; it is whether each prior art reference is within the realm of prior art that one of ordinary skill in the field of the inventor should be charged with knowing. See In re Klein, 647 F.3d 1343, 1348 (Fed. Cir. 2011) (“A reference qualifies as prior art for an obviousness determination under § 103 only when it is analogous to the claimed invention.” (citations omitted)). Further, analogous art is not limited to art from the inventor’s field of endeavor, but includes art that is outside the inventor’s field if “reasonably pertinent to the particular problem with which Appeal 2020-005137 Application 14/067,605 6 Rather, the Examiner relied on Fruge to establish that “colloidal silica[s] . . . having a particle size distribution in which the median particle size is in the range of 1–300 nanometers and . . . 80% of the particles span a size range of at least 30 nanometers and can span up to 70 nanometers [we]re conventional . . . at the time the [application] was filed.” Id.; see also Ans. 14 (“The reference of Fruge is only relied on to teach that the very definition of a polydisperse colloidal silica, at least partially, encompasses the median particle size and the span value claimed by the appellant. The polydisperse colloidal silica of Fruge appear[s] to be a composition readily available in the market.”). In other words, the Appellant has not identified error in the Examiner’s finding that the ordinary artisan would have used as the colloidal silica in Banerjee’s composition one of the conventionally known and readily available colloidal silicas having the claimed properties. See Final Act. 6; see generally Appeal Br. 10–16. The Appellant argues that “Fruge discloses ‘polydispersed’ cationic colloidal silicas having a particle size distribution based on particle size,” and, therefore, the Examiner failed to identify a teaching of a polydisperse particle size distribution having the claimed “median particle size . . . and . . . span value, by volume.” Appeal Br. 13. This argument is not persuasive for the reasons explained by the Examiner in the paragraph bridging pages 14–15 of the Answer. Because the Appellant has not convinced us of reversible error in the Examiner’s rejection of claim 1 as unpatentable over Banerjee in view of the inventor is involved.” Id. (quoting In re Bigio, 381 F.3d 1320, 1325 (Fed. Cir. 2004)). Appeal 2020-005137 Application 14/067,605 7 Fruge, we sustain the rejection as to claim 1, as well as claims 2–7, 23, and 24. 2. Claims 26, 32, and 35 Claim 26 depends from claim 1 and recites that the abrasive composition “consists essentially of” the plurality of colloidal silica abrasive particles, water, and ammonium hydroxide. Appeal Br. (Claims App.) 38. Claim 32 depends from claim 1 and recites that the abrasive composition “consists of” the plurality of colloidal silica abrasive particles, water, and ammonium hydroxide. Id. As indicated above, claim 35 is an independent claim that recites a composition “consisting of” the components explicitly recited in claim 1. See supra 3–4; see also Appeal Br. (Claims App.) 39. But, unlike claim 1, claim 35 does not include a negative limitation excluding the presence of fumed silica particles. See Appeal Br. (Claims App.) 39. The Examiner found that Fournier describes using ammonium hydroxide-stabilized alkaline colloidal silica slurries for polishing various insulator materials. Final Act. 11. The Examiner determined that the ordinary artisan would have stabilized the colloidal silica particles of the Banerjee-Fruge composition by preparing “a sub-composition consisting of the [colloidal silica] particles, water and ammonium hydroxide before adding the other ingredients because Fournier teaches it is conventional to do so.” Id. The Appellant argues that “[e]ven if one skilled in the art decided to incorporate ammonium hydroxide into the compositions of Banerjee or Fruge, the resulting compositions would still comprise (i) Banerjee’s Appeal 2020-005137 Application 14/067,605 8 benzenesulfonic acid and per-compound oxidizing agent or (ii) Fruge’s binder.” Appeal Br. 24; see id. at 26. The Appellant contends that the transition phrases “consists essentially of,” “consists of,” and “consisting of” in claims 26, 32, and 35, respectively, exclude these additional components from the claimed compositions. Id. at 24, 26–27; see AFG Indus., Inc. v. Cardinal IG Co., 239 F.3d 1239, 1245 (Fed. Cir. 2001) (“[T]ransition phrases such as ‘consisting of’ are understood to exclude any elements, steps, or ingredients not specified in the claim.”); PPG Indus., Inc. v. Guardian Indus. Corp., 156 F.3d 1351, 1354 (Fed. Cir. 1998) (The phrase “consisting essentially of” indicates that “the invention necessarily includes the listed ingredients and is open to unlisted ingredients that do not materially affect the basic and novel properties of the invention.”). The Appellant’s arguments are not persuasive because the Appellant misapprehends and, therefore, does not identify error in the Examiner’s fact finding and reasoning. Specifically, the Examiner’s rejection is based on a determination that the ordinary artisan would have formed an intermediate composition consisting of a plurality of colloidal silica abrasive particles having the properties recited in claims 1 and 35, see supra 3–4, water, and ammonium hydroxide, and then added other components to this intermediate composition to form Banerjee’s final, modified abrasive composition. Final Act. 11. In support of this determination, the Examiner relies on Fournier column 4, lines 55–66. Final Act. 11; see Fournier 4:61–66 (“[P]ure (not diluted) colloidal silica slurries stabilized by an alkaline are the preferred cleaning mixtures. Ammonium hydroxide-stabilized . . . colloidal silica slurries . . . are commercial products easily available on the shelf . . . .”). Appeal 2020-005137 Application 14/067,605 9 Fournier’s description of ammonium hydroxide-stabilized colloidal silica slurries as “commercial products . . . available on the shelf,” Fournier 4:65– 66, supports the Examiner’s obviousness conclusion. See In re Mullin, 481 F.2d 1333, 1335–36 (CCPA 1973). The Appellant does not explain why the Examiner’s determination that claims 26, 32, and 35 read on the intermediate product resulting from the Banerjee-Fruge-Fournier combination was erroneous or unreasonable. See generally Appeal Br. 21– 27; Reply Br. 6–7. We add that, even if the Appellant were correct in asserting that the Examiner’s combination of Banerjee, Fruge, and Fournier would have resulted in a composition that included Banerjee’s benzenesulfonic acid and per-compound oxidizing agent, or Fruge’s binder, the Appellant’s arguments would not be persuasive of reversible error in the Examiner’s rejection of claim 26. In assessing the broadest reasonable interpretation of a claim that includes a “consisting essentially of” transition phrase, the Appellant bears the burden of: (1) showing the basic and novel characteristics of the claimed invention, and (2) establishing how those characteristics would be materially changed by any allegedly excluded component of an applied reference. See In re DeLajarte, 337 F.2d 870, 873–74 (CCPA 1964). The Appellant has not met this burden, nor do we find any indication in the Specification that Banerjee’s benzenesulfonic acid or per-compound oxidizing agent would materially change the basic and novel characteristics of the claimed abrasive composition, see, e.g., Spec. ¶ 30 (“Any suitable oxidizing agent can be used in conjunction with the present invention.”). See In re Herz, 537 F.2d 549, 551 (CCPA 1976) (“[I]n construing the phrase ‘consisting essentially of’ in Appeal 2020-005137 Application 14/067,605 10 appellants’ claims, it is necessary and proper to determine whether their specification reasonably supports a construction that would include additives” found in the prior art composition.). Regarding Fruge’s binder, as discussed above, the Examiner relied on Fruge solely to establish that colloidal silica abrasive particles having the claimed properties were conventional at the time the present application was filed. See Final Act. 5; Ans. 14. The Appellant acknowledges that such binders “are typically used to prepare ink jet recording sheets.” Appeal Br. 24. The Appellant has not explained why the ordinary artisan would have included a binder in Banerjee’s abrasive composition, nor has the Appellant shown that a binder would materially change the basic and novel characteristics of the claimed abrasive composition. For the above reasons, we sustain the rejection of claims 26, 32, and 35 as unpatentable over Banerjee in view of Fruge and Fournier. Rejections over Fang The Examiner rejected claims 11–14 as unpatentable over Fang, and claims 27, 31, 34, and 35 as unpatentable over Fang in view of Fournier. See above-listed grounds 3 and 4. The Appellant argues in support of patentability of claims 11, 27, 31, and 35. See generally Appeal Br. 16–27. We address the arguments as to each of these claims below. 1. Claim 11 The Appellant acknowledges that Fang discloses an abrasive composition comprising colloidal silica particles, see Appeal Br. 17, Fang 3:5–9, but argues that Fang requires the presence of fumed silica particles “which have been specifically excluded from” the Appellant’s claim 11 Appeal 2020-005137 Application 14/067,605 11 composition by the transition phrase “consisting essentially of,” id. at 19. The Appellant’s argument is not persuasive because the Appellant has not shown, nor does the Specification indicate, that fumed silica particles would materially change the claim 11 abrasive slurry composition’s basic and novel characteristics. See DeLajarte, 337 F.2d at 873–74. The Specification discloses that “[i]n an embodiment of the present invention colloidal silica is utilized as an abrasive” Spec. ¶ 19, and identifies poly-dispersed colloidal silica as particularly suitable, id. ¶ 26. The Specification further discloses that an “embodiment of the present invention also relates to an abrasive slurry composition for polishing substrates including a plurality of abrasive particles having a poly-dispersed particle size distribution as described,” id. ¶ 28, that “can be used in conjunction with any suitable component (or ingredient) known in the art, for example, additional abrasives,” id. ¶ 29. The Specification explicitly defines “abrasive” as “any synthetic and/or natural inorganic and organic material, which [is] relatively inert when utilized in CMP slurries, such as, for example, fumed . . . silica.” Id. ¶ 19. Based on these descriptions, we determine that the Specification supports construing “consisting essentially of” in claim 11 as including fumed silica. See Herz, 537 F.2d at 551. The Appellant also argues that Fang requires the presence of a chemical accelerator “which ha[s] been specifically excluded from” the Appellant’s claim 11 composition by the transitional phrase “consisting essentially of.” Appeal Br. 19. This argument is not persuasive because the Appellant has not explained why it was erroneous or unreasonable for the Examiner to have found that the claim 11 “particle stabilizer consisting Appeal 2020-005137 Application 14/067,605 12 essentially of an alkaline compound” reads on the nitrogen-containing compound in Fang’s composition. See Final Act. 10. As indicated by the Examiner, Final Act. 10, the Appellant’s characterization of the composition’s alkaline compounds as particle stabilizers does not patentably distinguish over Fang’s composition containing the very same alkaline compounds, but characterized as chemical accelerators. Compare Spec. ¶ 24, with Fang 5:3–5. “From the standpoint of patent law, a compound and all of its properties are inseparable; they are one and the same thing.” In re Papesch, 315 F.2d 381, 391 (CCPA 1963)). Further, like Fang, the Appellant acknowledges that “certain compounds may perform more than one function.” Spec. ¶ 36; Fang 5:55–56. This argument is also unpersuasive for the reasons discussed above, that is, the Appellant has not met its burden of showing that the basic and novel characteristics of its claimed invention would be materially changed by the presence of components other than those that claim 11 explicitly recites. See DeLajarte, 337 F.2d at 873–74; Spec. ¶ 29 (“The present CMP slurry can be used in conjunction with any suitable component (or ingredient) known in the art.”). The Appellant argues that Fang teaches away from the Appellant’s compositions and that removal of fumed silica particles would change Fang’s composition’s principle of operation. See Appeal Br. 19–20. Because these arguments are based on the Appellant’s overly narrow interpretation of claim 11, discussed above, and the Examiner did not rely on a finding that the ordinary artisan would have removed Fang’s fumed silica particles, we are not persuaded of reversible error. We sustain the rejection of claims 11–14 as unpatentable over Fang. Appeal 2020-005137 Application 14/067,605 13 2. Claims 27, 31, and 35 Claim 27 depends from claim 11 and recites that the abrasive slurry composition “consists of” the plurality of colloidal silica abrasive particles, water, and ammonium hydroxide. Appeal Br. (Claims App.) 38. Claim 31 depends from claim 11 and recites “wherein said alkaline compound consists of ammonium hydroxide.” Id. Claim 35 is an independent claim that recites a composition “consisting of” the components explicitly recited in claim 1. See supra 7. Similar to the rejection of claims 26, 32, and 35 over Banerjee, Fruge, and Fournier, the Examiner determined that the ordinary artisan would have stabilized the colloidal silica particles of Fang’s composition by preparing “a sub-composition consisting of the [colloidal silica] particles, water and ammonium hydroxide before adding the other ingredients because Fournier teaches it is conventional to do so.” Final Act. 11; see supra 7. The Appellant argues that the resultant composition would contain one or more components explicitly excluded from the claims by the transition phrases “consists essentially of” (claim 11), “consists of,” (claims 27, 31) and “consisting of” (claim 35). See Appeal Br. 24–27. As discussed above regarding the rejection of claims 26, 32, and 35, these arguments are unpersuasive because the Appellant does not explain why the Examiner’s determination that claims 27, 31, and 35 read on the intermediate product resulting from the Fang-Fournier combination was erroneous or unreasonable. See generally Appeal Br. 21–27; Reply Br. 6–7. For the above reasons, we sustain the rejection of claims 27, 31, 34, and 35 as unpatentable over Banerjee in view of Fruge and Fournier. Appeal 2020-005137 Application 14/067,605 14 Rejections over Fournier The Examiner rejected claims 1, 11, and 35 as unpatentable over (1) Fournier in view of Fang and (2) Fournier in view of Fruge. The Examiner found that Fournier teaches ammonium hydroxide-stabilized alkaline colloidal silica slurries for polishing various insulator materials, that such slurries are readily available as on the shelf, commercial products, and “[w]ater is conventionally used as a carrier to facilitate transport.” Final Act. 12; see Fournier 4:55–66. The Examiner determined that the ordinary artisan would have modified Fournier’s sub-composition consisting of silica particles, water, and ammonium hydroxide by using any colloidal silica particle distribution and content, including that of Fruge or Fang, both of which describe particles having the properties recited in claims 1, 11, and 35. Final Act. 12. The Appellant’s arguments are limited to those made in traversing the rejections over (1) Banerjee in view of Fruge and (2) Fang. See generally, Appeal Br. 27–32. These arguments are unpersuasive for the reasons discussed above. Therefore, we sustain the rejections of claims 1, 11, and 35 as unpatentable over Fournier in view of Fang and Fournier in view of Fruge. Appeal 2020-005137 Application 14/067,605 15 DECISION SUMMARY Claims Rejected 35 U.S.C. § Reference(s)/Basis Affirmed Reversed 1–7, 23, 24 103 Banerjee, Fruge 1–7, 23, 24 26, 32, 35 103 Banerjee, Fruge, Fournier 26, 32, 35 11–14 103 Fang 11–14 27, 31, 34, 35 103 Fang, Fournier 27, 31, 34, 35 1, 11, 35 103 Fournier, Fang 1, 11, 35 1, 11, 35 103 Fournier, Fruge 1, 11, 35 Overall Outcome 1–7, 11–14, 23, 24, 26, 27, 31, 32, 34, 35 TIME PERIOD FOR RESPONSE No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). AFFIRMED Copy with citationCopy as parenthetical citation