Ex Parte Yu et alDownload PDFPatent Trial and Appeal BoardDec 12, 201814037185 (P.T.A.B. Dec. 12, 2018) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE 14/037,185 09/25/2013 43859 7590 12/14/2018 SLATER MATSIL, LLP/TSMC 17950 PRESTON ROAD, SUITE 1000 DALLAS, TX 75252 FIRST NAMED INVENTOR Chen-Hua Yu UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. TSM12-1310 8224 EXAMINER ZARNEKE, DAVID A ART UNIT PAPER NUMBER 2891 NOTIFICATION DATE DELIVERY MODE 12/14/2018 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): docketing@slatermatsil.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte CHEN-HUA YU and DER-CHY ANG YEH Appeal2018-001501 Application 14/037,185 Technology Center 2800 Before JAMES C. HOUSEL, GEORGE C. BEST, and DEBRA L. DENNETT, Administrative Patent Judges. DENNETT, Administrative Patent Judge. DECISION ON APPEAL 1 STATEMENT OF THE CASE Appellant2 appeals under 35 U.S.C. § 134(a) from a rejection of claims 1-13 and 21-30. We have jurisdiction under 35 U.S.C. § 6(b). We AFFIRM-IN-PART. 1 In our Decision, we refer to the Specification filed September 25, 2013 ("Spec."); the Final Office Action dated September 23, 2016 Final Act."); the Advisory Action dated December 21, 2016 ("Adv. Act."); the Appeal Brief filed June 8, 2017 ("Br."); and the Examiner's Answer dated September 22, 2017 ("Ans."). Appellant did not file a Reply Brief. 2 Appellant is the Applicant, Taiwan Semiconductor Manufacturing Company, Ltd., identified as the real party in interest. Br. 2. Appeal2018-001501 Application 14/037,185 The invention relates to wafer-level chip-scale packaging intermediate structures, apparatuses, and methods. Claim 1, reproduced below from the Claims Appendix of the Appeal Brief, illustrates the claimed subject matter: 1. A method of forming a device, comprising: forming a first redistribution layer (RDL) on a carrier wafer, the first RDL having one or more mounting pads disposed on a first side of the first RDL; mounting one or more interposer dies on a second side of the first RDL, a first side of the one or more interposer dies adjacent to the first RDL; forming a second RDL over a second side of the one or more interposer dies, the second RDL having a first side adjacent to the interposer dies and a second side opposite the first side, one or more lands disposed on the second side of the second RDL, at least one of the one or more lands in electrical contact with at least one of the one or more interposer dies or at least one of the one or more mounting pads; mounting a secondary component on the lands disposed on the second side of the second RDL; and removing the first RDL, the one or more interposer dies, the second RDL and the secondary component from the carrier wafer. REFERENCES The Examiner relies on the following prior art in rejecting the claims on appeal: Heo Choi et al. ("Choi") Do et al. ("Do") US 6,555,917 Bl US 7,923,304 B2 US 2012/0061855 Al 2 Apr. 29, 2003 Apr. 12, 2011 Mar. 15, 2012 Appeal2018-001501 Application 14/037,185 REJECTIONS The Examiner maintains and Appellant seeks review of the following rejections under 35 U.S.C. § 103(a): (1) claims 1-13 and 21-27 over Do in view of Heo; and (2) claims 28-30 over Do in view of Heo, and further in view of Choi. Final Act. 3-9; Br. 7-20. OPINION Rejection of claims 1-13 and 21-27 as obvious over Do in view of Heo The Examiner finds that Do teaches the elements of independent claims 1, 7, and 21 except for removing the carrier wafer. Final Act. 3-6. The Examiner finds that Do discloses use of a temporary carrier without specifically stating that it is not removed until the entire package is formed on it. Id. at 6. The Examiner finds that Heo teaches use of a temporary tape that is not removed until the package is completely formed. Id. Appellant argues that the rejection should be reversed because the Examiner erred by finding that Do describes or suggests forming a second RDL [having] one or more lands disposed on the second side of the second RDL, at least one of the one or more lands in electrical contact with at least one of the one or more interposer dies or at least one of the one or more mounting pads, as recited in independent claim 1. Br. 7-8 ( emphasis omitted). Independent claims 7 and 21 have the same or analogous language. See id. at 8, 21-23 (Claims App.). 3 Appeal2018-001501 Application 14/037,185 The Examiner finds that Do discloses the limitation in question. Final Act. 4; Ans. 2. The Examiner relies on Figure 14 of Do, reproduced below: ' 1410 1418 1432 I 1414 1440 FIG.14 Do' s Figure 14 is a cross-sectional view of an integrated circuit packaging system in a device attaching phase. Do ,r,r 12-14, 24. Redistribution layer 14383 (RDL) can be formed directly on the adhesive film layer 1434. Id. ,r 129. RDL 1438 can electrically connect the exposed portion 1436 of stack connectors 1432 to a semiconductor component (not shown in Fig. 14) that is mounted over the integrated circuit packaging system. Id. In reference to Figure 14, the Examiner finds that Do discloses a second RDL (RDL 1438) is electrically connected to solder balls (connectors 1432), which are electrically connected to internal wiring in substrate 1402, the top of substrate 1402 is electrically connected to the bottom of substrate 1402, and substrate 1402 is electrically connected to one to one more mounting pads. Ans. 2 (citing Do ,r,r 39, 43, 129). The Examiner finds that (interposer) die 1410 is electrically connected to substrate 1402. Id. (citing Do ,r,r 40, 41). 3 Throughout this Decision, for clarity, labels to elements are presented in bold font, regardless of their presentation in the original document. 4 Appeal2018-001501 Application 14/037,185 Appellant contends that Figure 14 does not illustrate one or more landing pads in electrical contact with either the asserted (unlabeled) mounting pads or the asserted interposer die 1410, through connectors 1432 or otherwise. Br. 10. Appellant argues that Do neither teaches nor suggests that asserted second RDL 1438 could be in electrical contact with asserted interposer 1410 or asserted unlabeled mounting pads. Id. at 11. Appellant argues that Do discloses a different purpose for lands on asserted second RDL, i.e., electrically connecting the exposed portions 1436 of the stack connectors 1432 to a semiconductor component that is mounted over the integrated circuit packaging system. Id. (citing Do ,r,r 129-130). We are not persuaded that the Examiner reversibly errs in this rejection. In response to Appellant's arguments, the Examiner draws attention to paragraph 39 of Do, which states "[t]he package substrate 102 can be electrically connected between the substrate bottom side 104 and the substrate top side 106." See Ans. 2. Package substrate 102 in Do, Figures 1 and 3, is analogous to package substrate 1402 in Do, Figure 14. Compare Do Figs. 1, 3, 14. Thus, the Examiner effectively lays a trail of electrical connection from lands of the second RDL to at least one or more mounting pads, as required by claim 1. In addition, Do' s claim 6 provides that the active side of an integrated circuit (interposer die) is electrically connected by device connectors to a substrate top side, which is electrically connected to stack connectors. Do claim 6. Do describes stack connectors 1432 as being electrically connected to redistribution layer 1438. Id. ,r 129. Thus, the second RDL is electrically connected to at least one interposer die, in accordance with claim 1. 5 Appeal2018-001501 Application 14/037,185 With respect to secondary reference Heo, Appellant merely argues that Heo fails to teach the above-discussed claim elements that are assertedly lacking in Do. Br. 14. We, therefore, sustain the rejection of claim 1 over Do in view of Heo. Because Appellant argues claims 2-13 and 21-27 (including independent claims 7 and 21) are patentable for the same reasons as provided for claim 1 we, likewise, sustain the rejection of claims 2-13 and 21-27. Rejection of claims 28-30 as obvious over Do, in view of Heo, and further in view of Choi Claims 28-30 depend from either claims 1, 7, or 21, and each has similar recitations, viz.: forming a molding compound around the one or more interposer dies and over a portion of the first RDL prior to the forming the second RDL; forming an opening in the molding compound after forming the molding compound around the one or more interposer dies, the opening exposing a conductive element in the first RDL; and filling the opening with a conductor to form a conductive via. Br. 24--25 (Claims App'x). The Examiner finds that Do fails to teach the above limitations, but that they are disclosed by Choi. Final Act. 9 ( citing Choi, Figs. 3-5). The Examiner determines that it would have been obvious to one of ordinary skill in the art at the time of the invention to substitute Choi' s process in Do' s invention because Choi teaches the equivalence of its method ( as 6 Appeal2018-001501 Application 14/037,185 disclosed in Choi, Figs. 3-5) with Do' s method ( as disclosed in Choi, Figs. 11, 12). Id. We do not sustain the rejection. Do teaches laminating a substrate with a multi-layer film wherein stack connectors penetrate the film. Do ,r,r 59, 60, 66, 68, 73. Choi teaches at least two methods, neither of which involve lamination. See Choi, Figs. 3-7, 10-12. Neither the Final Office Action nor Answer indicate how far the skilled artisan would follow Do' s path before switching to Choi' s, or when to switch back to Do's. See generally Final Act. and Ans. Only impermissible hindsight serves as a guide. See In re Kahn, 441 F.3d 977, 988 (Fed. Cir. 2006) (requiring "some articulated reasoning with some rational underpinning to support the legal conclusion of obviousness."); In re Rouffet, 149 F.3d 1350, 1358 (Fed. Cir. 1998) ("hindsight" is inferred when the specific understanding or principal within the knowledge of one of ordinary skill in the art leading to the modification of the prior art in order to arrive at Appellant's claimed invention has not been explained). "[W]e cannot allow hindsight bias to be the thread that stitches together prior art patches into something that is the claimed invention." Metalcraft of Mayville, Inc. v. The Toro Co., 848 F.3d 1358, 1367 (Fed. Cir. 2017). The rejection of claims 28-30 is not sustained. DECISION The rejection of claims 1-13 and 21-27 is affirmed. The rejection of claims 28-30 is reversed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(l)(iv). 7 Appeal2018-001501 Application 14/037,185 AFFIRMED-IN-PART 8 Copy with citationCopy as parenthetical citation