Ex Parte YamazakiDownload PDFPatent Trial and Appeal BoardJul 27, 201812913464 (P.T.A.B. Jul. 27, 2018) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE 12/913,464 10/27/2010 26171 7590 07/31/2018 FISH & RICHARDSON P.C. (DC) P.O. BOX 1022 MINNEAPOLIS, MN 55440-1022 UNITED ST A TES OF AMERICA FIRST NAMED INVENTOR Shunpei Yamazaki UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. 12732-0725001 3934 EXAMINER BELL, LAUREN R ART UNIT PAPER NUMBER 2816 NOTIFICATION DATE DELIVERY MODE 07/31/2018 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): P ATDOCTC@fr.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte SHUNPEI YAMAZAKI Appeal2016-008587 1 Application 12/913,4642 Technology Center 2800 Before JUSTIN BUSCH, JOHN D. HAMANN, and JOYCE CRAIG, Administrative Patent Judges. HAMANN, Administrative Patent Judge. DECISION ON APPEAL Appellant files this appeal under 35 U.S.C. § 134(a) from the Examiner's Final Rejection of claims 1-28, 32, and 36-38. We have jurisdiction under 35 U.S.C. § 6(b). We heard oral arguments on April 17, 2018. A transcript of the hearing was added to the record. We reverse. 1 Our decision relies upon Appellant's Appeal Brief ("App. Br.," filed Dec. 28, 2015), ReplyBrief("ReplyBr.," filed August 29, 2016), and Specification ("Spec.," filed October 27, 2010), as well as the Examiner's Answer ("Ans.," mailed June 29, 2016) and the Final Office Action ("Final Act.," mailed April 9, 2015). 2 Appellant identified the real party in interest as Semiconductor Energy Laboratory Co., Ltd. App. Br. 1. Appeal2016-008587 Application 12/913,464 THE CLAIMED INVENTION Appellant's claimed invention relates to a first transistor and a second transistor, where the second transistor has an oxide semiconductor layer and an extremely low off current. Abstract. The gate of the first transistor and either the source or drain of the second transistor are electrically connected to each other. Id. Claim 1 is illustrative of subject matter on appeal and is reproduced below. 1. A semiconductor device comprising: a first transistor comprising a first gate electrode, the first gate electrode being formed over a substrate; and a second transistor over the substrate, the second transistor comprising a second source electrode and a second drain electrode, wherein a channel formation region of the first transistor comprises crystalline silicon; wherein the second transistor includes an oxide semiconductor layer, the oxide semiconductor layer including a channel formation region, the channel formation region of the second transistor being intrinsic or substantially intrinsic, wherein the first gate electrode and one of the second source electrode and the second drain electrode are electrically connected to each other, and wherein an off current of the second transistor is 1 x 10-20 A or less. REJECTIONS 3 ON APPEAL (1) The Examiner rejected claims 1, 2, 4--11, 13-20, 22, 23, 25-28, 32, and 36--38 under 35 U.S.C. § I03(a) as being unpatentable over the combination of Kondou et al. (US 4,902,637; issued Feb. 20, 1990) (hereinafter "Kondou"), Wang et al. (US 2009/0114918 Al; published May 3 The Examiner withdrew the 35 U.S.C. § 112, fourth paragraph, rejection of claim 27. Ans. 2. 2 Appeal2016-008587 Application 12/913,464 7, 2009) (hereinafter "Wang"), Kochi et al. (US 5,812,231; issued Sept. 22, 1998) (hereinafter "Kochi"), and Yano4 et al. (US 2010/0295042 Al; published Nov. 25, 2010) (hereinafter "Yano"). (2) The Examiner rejected claims 3, 12, and 24 under 35 U.S.C. § I03(a) over Kondou, Wang, Kochi, Yano, and Hiramoto et al. (US 6,989,569 Bl; issued Jan. 24, 2006) (hereinafter "Hiramoto"). (3) The Examiner rejected claim 21 under 35 U.S.C. § I03(a) over Kondou, Wang, Kochi, Yano, and Irving et al. (US 2008/0296567 Al; published Dec. 4, 2008) (hereinafter "Irving"). (4) The Examiner rejected claims 1-9, 22-28, 30, and 32 for non- statutory double patenting over claims 1, 5, and 6 of U.S. Patent No. 8,389,417 in view ofKondou, Kochi, and Yano. (5) The Examiner provisionally rejected claims 1-6, 10-15, and 22-27 for non-statutory double patenting over claims 1, 5, and 10 of co- pending U.S. Application No. 12/906,565 in view ofKochi and Yano. (6) The Examiner provisionally rejected claims 7-9, 16-18, 20, 28, 30, and 32 for non-statutory double patenting over claims 1 and 5 of co- pending U.S. Application No. 12/906,565 in view ofKondou, Kochi, and Yano. (7) The Examiner provisionally rejected claims 1, 2, 5, 7, 9, 22, 23, and 26-32 for non-statutory double patenting over claims 4, 10, and 13 of co-pending U.S. Application No. 13/336,549 in view of Kochi and Yano. 4 We rely on the English language equivalent of WO 2009/093625, as the Examiner did. Final Act. 3. 3 Appeal2016-008587 Application 12/913,464 (8) The Examiner provisionally rejected claims 8, 28, and 30 for non-statutory double patenting over claims 4, 10, and 13 of co-pending U.S. Application No. 13/336,549 in view ofKondou, Kochi, and Yano. (9) The Examiner provisionally rejected claims 10 and 14--20 for non-statutory double patenting over claims 4, 10, and 13 of co-pending U.S. Application No. 13/336,549 in view of Wang, Kochi, and Yano. ISSUE The dispositive issue for this appeal is whether Y ano teaches or suggests a semiconductor layer that includes a channel formation region that is "intrinsic or substantially intrinsic." ANALYSIS We find Appellant's arguments discussed herein persuasive. (1) § 103 reiections Appellant argues that Y ano does not teach or suggest a semiconductor layer that includes a channel formation region that is "intrinsic or substantially intrinsic," in accordance with independent claims 1, 10, and 22. App. Br. 3-5. More specifically, Appellant argues that the portions ofYano that the Examiner cites do not teach or suggest that the channel formation region "is intrinsic or substantially intrinsic." Id. at 5 ( citing Y ano ,r,r 44, 99-100, 156). The Examiner finds that Y ano teaches or suggests the disputed limitation. See Ans. 7-8. The Examiner finds that the broadest reasonable interpretation of "intrinsic" is a semiconductor that "is not doped with impurities." Id. at 7 (citing COLLINS ENGLISH DICTIONARY-COMPLETE AND 4 Appeal2016-008587 Application 12/913,464 UNABRIDGED (12th ed. 2014) (defining an intrinsic semiconductor as "an almost pure semiconductor to which no impurities have been added and in which the electron and hole densities are equal at thermal equilibrium")). Using this interpretation, the Examiner finds that Y ano teaches a semiconductor's channel formation region is "intrinsic or substantially intrinsic" because Yano teaches not doping the channel formation region. Id. (Yano ,r,r 101-103). The Examiner also finds that Yano teaches purifying the channel formation region by removing elements, such as hydrogen, which degrade the channel's characteristics, consistent with the Specification's teachings. Id. at 7-8 (citing Yano ,r,r 100-103; Spec. ,r,r 59, 149). We agree with Appellant that Y ano fails to teach or suggest the disputed limitation. We find that the Examiner errs as to the broadest reasonable interpretation of "intrinsic." As the Specification makes clear, an oxide semiconductor is made to be "intrinsic or substantially intrinsic," in the context of the present invention, by the "elimination of impurities such as hydrogen and water and oxygen vacancy as much as possible." See Spec. ,r 149; see also Helmsderfer v. Bobrick Washroom Equip., Inc., 527 F .3d 1379, 1381 (Fed. Cir. 2008) ("A patentee may act as its own lexicographer and assign to a term a unique definition that is different from its ordinary and customary meaning; however, a patentee must clearly express that intent in the written description."). Accordingly, the Examiner's interpretation is unreasonably broad in light of the Specification. See In re Suitco Surface, Inc., 603 F.3d 1255, 1259---60 (Fed. Cir. 2010) (finding that although "the PTO must give claims their broadest reasonable construction consistent with 5 Appeal2016-008587 Application 12/913,464 the specification[,] ... claims should always be read in light of the specification and teachings in the underlying patent") ( citation omitted). As to Y ano 's teachings, we disagree with the Examiner that Y ano teaches or suggests removing hydrogen in accordance with the present invention. Rather than removing as many impurities ( e.g., hydrogen) as possible, Yano teaches obtaining a uniform concentration of hydrogen to alleviate problems that occur when an oxide film differs in composition from part to part. See Y ano ,r,r 100-103. Further, Y ano makes no mention of addressing oxygen vacancies. Id. Accordingly, we find that the cited portions of Y ano fail to teach or suggest the disputed limitation. Accordingly, we do not sustain the Examiner's§ 103 rejection of independent claims 1, 10, and 22, as well as claims 2, 4--9, 11, 13-20, 23, 25-28, 32, and 36-38, as they depend from one of these independent claims. We also do not sustain the Examiner's§ 103 rejections of (i) claims 3, 12, and 24; and (ii) claim 21, as they depend from one of independent claims 1, 10, and 22. (2) Non-statutory obviousness double patenting reiections The Examiner rejects claims 1-20 and 22-32 for non-statutory double patenting across various grounds of rejection. See supra Rejections (4}-(9). For each of these double patenting rejections, the Examiner relies on Yano for teaching or suggesting a semiconductor layer that includes a channel formation region that is "intrinsic or substantially intrinsic," with respect to the independent claims. Final Act. 23--48. Appellant argues that the Examiner errs with respect to the double patenting rejections because Yano does not disclose the features of the independent claims. App. Br. 8. As we find above, we agree with Appellant 6 Appeal2016-008587 Application 12/913,464 that Y ano fails to teach or suggest a semiconductor layer that includes a channel formation region that is "intrinsic or substantially intrinsic," which is recited in each of the independent claims. See supra § 1. Accordingly, we do not sustain any of the Examiner's non-statutory double patenting rejections. DECISION We reverse the Examiner's decision rejecting claims 1-28, 32, and 36-38 under§ 103. We reverse the Examiner's decision rejecting claims 1-20 and 22-32 for non-statutory double patenting. REVERSED 7 Copy with citationCopy as parenthetical citation