Ex Parte Pruneri et alDownload PDFPatent Trial and Appeal BoardOct 3, 201813578902 (P.T.A.B. Oct. 3, 2018) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE FIRST NAMED INVENTOR 13/578,902 10/18/2012 Valerio Pruneri 2352 7590 10/05/2018 OSTROLENK FABER LLP 845 THIRD A VENUE NEW YORK, NY 10022 UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. P/4043-842 (V 24118) 2632 EXAMINER GONZALEZ RAMOS, MA YLA ART UNIT PAPER NUMBER 1721 NOTIFICATION DATE DELIVERY MODE 10/05/2018 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): pat@ostrolenk.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte VALERIO PRUNER!, DHRITI SUNDAR GHOSH, and TONG LAI CHEN Appeal 2017-011277 Application 13/578,902 1 Technology Center 1700 Before ADRIENE LEPIANE HANLON, BRIAND. RANGE, and JENNIFER R. GUPTA, Administrative Patent Judges. RANGE, Administrative Patent Judge. DECISION ON APPEAL SUMMARY Appellants appeal under 35 U.S.C. § 134(a) from the Examiner's decision rejecting claims 1-5 and 8-17. We have jurisdiction. 35 U.S.C. § 6(b ). We AFFIRM. 1 According to Appellants, the real parties in interest are (1) Fundaci6 Institut De Ciencies Fotoniques and (2) Instituci6 Catalana De Recerca Estudis Avarn;ats. Appeal Br. 1. Appeal 2017-011277 Application 13/578,902 STATEMENT OF THE CASE2 Appellants describe the invention as relating to optically transparent and electrically conductive electrodes for, for example, optoelectronic applications. Spec. 1: 6-7. Claim 1, reproduced below with emphasis added to certain key recitations, is illustrative of the claimed subject matter: 1. A transparent electrode, in particular for optoelectronic applications, comprising a substrate; a transparent conductive oxide serving as a conductive body; and an ultra thin metal layer on the transparent conductive oxide, wherein the electrode further comprises an oxide layer on the ultra thin metal layer, and wherein the oxide layer is an oxide of the ultra thin metal layer, wherein a combined thickness of the ultra thin metal layer and the oxide layer is 5 nm or less, and wherein the ultra thin metal layer is not oxidized through its entire thickness. Appeal Br. 11 (Claims App.). REFERENCES The Examiner relies upon the prior art below in rejecting the claims on appeal: Okada et al. ("Okada") Nakamura et al. ("Nakamura") US 2005/0034755 Al US 2007/0029554 Al Feb. 17,2005 Feb. 8,2007 2 In this Decision, we refer to the Final Office Action dated May 5, 2016 ("Final Act."), the Appeal Brief filed January 3, 2017 ("Appeal Br."), and the Examiner's Answer dated May 4, 2017 ("Ans."). 2 Appeal 2017-011277 Application 13/578,902 Noda JP2000351170 (A) Dec. 19, 2000 Bemede WO 2009/016092 A2 February 5, 2009 Ghosh et al., Widely Transparent Electrodes Based on Ultrathin Metals, 34 OPTICS LETTERS 325-327 (Feb. 1, 2009) ("Ghosh"). REJECTIONS The Examiner maintains the following rejections on appeal: Rejection 1. Claims 1-5, 10, 11, 13, and 14 under 35 U.S.C. § 103(a) as unpatentable over Noda in view of Ghosh. Ans. 3. Rejection 2. Claims 8, 9, and 15 under 35 U.S.C. § 103(a) as unpatentable over Noda in view of Ghosh and further in view of Okada. Id. at 10. Rejection 3. Claim 12 under 35 U.S.C. § 103(a) as unpatentable over Noda in view of Ghosh and further in view of Nakamura. Id. at 12. Rejection 4. Claims 16 and 17 under 35 U.S.C. § 103(a) as unpatentable over Noda in view of Ghosh and further in view of Bemede. Id. at 13-14. The Appeal Brief also addresses a double patenting rejection. Appeal Br. 9. The Examiner has now withdrawn this rejection (Ans. 15), and we, therefore, do not further address that rejection. ANALYSIS We review the appealed rejections for error based upon the issues identified by Appellants and in light of the arguments and evidence produced thereon. Ex parte Frye, 94 USPQ2d 1072, 1075 (BPAI 2010) (precedential), cited with approval in In re Jung, 637 F.3d 1356, 1365 (Fed. Cir. 2011) ("[I]t has long been the Board's practice to require an applicant to identify the alleged error in the examiner's rejections."). After considering the evidence 3 Appeal 2017-011277 Application 13/578,902 presented in this Appeal and each of Appellants' arguments, we are not persuaded that Appellants identify reversible error. Thus, we affirm the Examiner's rejections for the reasons expressed in the Final Office Action and the Answer. We add the following primarily for emphasis. Appellants argue claims 1 and 10 together, and Appellants do not separately argue any individual claim or rejection. Appeal Br. 3-9. We therefore limit our discussion to claim 1. All other claims on appeal stand or fall with claim 1. 37 C.F.R. § 4I.37(c)(l)(iv) (2013). The Examiner finds that Noda teaches the most of the layers recited by claim 1. Ans. 3--4 ( citing Noda). The Examiner finds that Noda lacks an oxide of the ultra thin metal layer and states: Noda teaches that the oxide layer is a silicon oxide layer (5) instead of said oxide layer being an oxide of the ultra thin metal layer, wherein a combined thickness of the ultra thin metal layer and the oxide layer is 5nm or less, and wherein the ultra thin [metal] layer is not oxidized through its entire thickness. Ans. 4. The Examiner finds that Ghosh is similar to Noda and teaches that its ultra thin metal film is partially oxidized in order to form a top oxide layer that prevents further oxidation and results in a passivated ultra thin metal film. Id. The Examiner determines that it would have been obvious to substitute the oxide layer of Noda for a thermally grown oxide layer as taught by Ghosh because both are taught by the prior art to be used for the same purpose i.e., preventing further oxidation of a [sic] ultra thin metal film, and because said thermally grown oxide provides the additional advantage of a passivated ultra thin metal film having a larger electrical resistivity and optical transmittance (see Ghosh et al., Pages 326-327). 4 Appeal 2017-011277 Application 13/578,902 Id. at 5. Appellants argue that Noda includes a silicon oxide layer "to improve conductivity, environmental resistance, and the antireflection effect." Appeal Br. 4. Appellants argue that Ghosh partially oxides its ultra thin metal film to prevent further oxidation, "thereby passivating the UTMF to obtain a larger electrical resistivity and optical transmittance." Id. Appellants argue that Noda and Ghosh have different objectives that are not interchangeable and that a person of skill would therefore not conclude that the grown oxide of Ghosh would perform the same desirable function as the silicon layer in Noda. Id. Appellants also argue that there would not be "a proper expectation of a successful outcome" ifNoda's 30 nm diffusion barrier were replaced with grown oxide thinner than 5 nm. Id. at 8. The Examiner, however, finds that both Noda and Ghosh recognize disadvantages of oxidation of an ultra thin metal film. Ans. 18. The Examiner's finding is supported by a preponderance of the evidence. For example, Noda states "metal oxidizes easily, and it is easy to cause migration . . . . And if metal oxidizes, conductivity will be deteriorated, and if migration arises, ... electrical resistance increases notably." Noda ,r 15. Similarly, Ghosh indicates that partial oxidation of the ultra thin metal film "forms a top oxide layer that prevents further oxidation" and also indicates that the resulting UTMF is "passivated" so that it has "larger electrical resistivity and optical transmittance." Ghosh 327. This evidence supports the Examiner's determination that, for example, "one of ordinary skill in the art would have found it obvious to take advantage of the oxidation process of these metals (i.e. Ni) as taught in Ghosh in order to provide a top oxide that prevents further oxidation of the layer." Ans. 19. We agree with the 5 Appeal 2017-011277 Application 13/578,902 Examiner that Ghosh's teaching of a successful and stable transparent electrode suggests that a person of ordinary skill in the art would have had a reasonable expectation of success in combining Ghosh's teachings with Noda. Ans. 21. Appellants further argue that Exhibit 1 and Exhibit 2 demonstrate that not every oxide layer would provide the same barrier function as a 30 nm silicon oxide layer (as in Noda). Appeal Br. 6. Exhibit 1 is Williams et al., Low Temperature Diffusion of Alkali Earth Cations in Thin, Vitreous Si02 Films, 142 J. Electrochem. Soc. 303-311 (1995) ("Williams"). Table 1 of Williams identifies two wafers with silica film thickness between 94 nm and 110 nm. Appellants have not explained, however, how Exhibit 1 indicates that the oxide layer taught by Ghosh would not work in combination with the teachings of Noda, and we do not discern such a teaching in Williams. Appellants also argue that "Exhibit 1 indicates that an informed skill person [sic] would conclude that thickness of the migration barrier depends on the migrating metal, and thus it would not be scientifically reasonable to assume that all oxide barrier layers will offer the same performance." Appeal Br. 6. The Examiner, however, finds that both Ghosh and Noda teach that the migrating metal may be nickel. Ans. 21-22 ( citing Ghosh and Noda). Thus, Appellants' argument does not identify error in the Examiner's determination that Ghosh's teachings regarding passivation with regard to nickel would also apply to Noda's nickel embodiment. Exhibit 2 is Nicolet, Diffusion Barriers in Thin Films, 52 Thin Solid Films 415--443 (1978) ("Nicolet"). Appellants argue that Nicolet indicates that determination of whether an ultra thin oxide functions properly requires experimentation and also argue that silicon dioxide must be at least 20 nm 6 Appeal 2017-011277 Application 13/578,902 thick to prevent migration of gold. Appeal Br. 6. Appellants do not persuasively explain, however, how Nicolet undermines Ghosh's teaching that partial oxidation of the thin metal film usefully prevents further oxidation and provides passivation. Ans. 22-23. Nicolet's teachings regarding migration of gold through silicon dioxide are not particularly germane to the rejection because the applied prior art combination involves nickel and partially oxidized thin metal film. We also note that Nicolet was published in 1978 whereas Ghosh was published in 2009. As such, Ghosh is a better indicator of what a person of ordinary skill in the art at the time of the invention would have understood as being the state of the art. Appellants also argue that Ghosh does not teach a metal/oxide layer combination that is less than 5 nm thick would work as a passivation layer and that Noda requires a 30 nm thick silicon oxide layer. Appeal Br. 8. Appellants argue that there is therefore "no suggestion or motivation to substitute for the 30 nm silicon oxide layer 5 in Noda with a less than 5 nm grown oxide layer." Id. This argument is unpersuasive because, as explained above, Ghosh teaches that oxidation of the metal layer can, like the silicon oxide layer of Noda, serve to prevent further oxidation and thereby passivate the layer. See also, e.g., Ans. 25-26. The Examiner finds that the ultra thin metal film of Noda is 2 to 7 nm thick. Id. at 26 (citing Noda ,r,r 34--37). The Examiner finds that the oxidized layer will likewise be 2 to 7 nm thick. Id. As the Examiner notes (id.), this finding is consistent with the Appellants' explanation as to why the thickness of 5 nm or less recitation of claim 1 has written description support. Appellants stated: Claim 1 is amended to recite that the oxide layer is less than 5nm thick. . . . Support for the amendments can be found in the specification, page 4, lines 27-28 and page 8, line 4, which 7 Appeal 2017-011277 Application 13/578,902 disclose UTMF of 2mn and 5nm, respectively. Since the oxide is formed by oxidizing the UTMF, and the maximum UTMF thickness that is disclosed is 5nm, the specification inherently discloses an oxide layer that is less than 5nm thick. July 8, 2015 Applicants' Remarks at 6 (emphasis added). Appellants therefore do not identify error in the Examiner's determination that substitution of Ghosh's oxidation process into Noda would necessarily result in a "combined thickness of the ultra thin metal layer and the oxide layer" that is 2 to 7 nm thick ( overlapping claim 1 's less than 5 nm or less thickness recitation). The Examiner also finds that the thickness of oxide layers is a result effective variable. Ans. 23. The Examiner finds that the prior art establishes "[t]he layer must be thin enough to ensure electrical conduction and also have a thickness that prevents the migration of metals." Id. Appellants do not dispute these findings. Based on these findings, claim 1 's recitation of "thickness of the ultra thin metal layer and the oxide layer is 5 nm or less" does not patentably distinguish the combined teachings of Noda and Ghosh. See In re Aller, 220 F.2d 454,456 (CCPA 1955) ("[W]here the general conditions of a claim are disclosed in the prior art, it is not inventive to discover the optimum or workable ranges by routine experimentation."). Because Appellants' arguments do not identify reversible error, we sustain the Examiner's rejections. DECISION For the above reasons, we affirm the Examiner's rejections of claims 1-5 and 8-1 7. 8 Appeal 2017-011277 Application 13/578,902 No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). AFFIRMED 9 Copy with citationCopy as parenthetical citation