Ex Parte Plankensteiner et alDownload PDFPatent Trial and Appeal BoardJun 5, 201813568928 (P.T.A.B. Jun. 5, 2018) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE 13/568,928 08/07/2012 24131 7590 06/07/2018 LERNER GREENBERG STEMER LLP PO BOX 2480 HOLLYWOOD, FL 33022-2480 FIRST NAMED INVENTOR ARNO PLANKENSTEINER UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. SB-697 2153 EXAMINER CHOU, JIMMY ART UNIT PAPER NUMBER 3742 NOTIFICATION DATE DELIVERY MODE 06/07/2018 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address( es): boxoa@patentusa.com docket@patentusa.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte ARNO PLANKENSTEINER, CHRISTIAN FEIST, VADIM BOGUSLA VSKIY, ALEXANDER I. GURARY, and CHENGHUNGPAULCHANG Appeal2017-006796 Application 13/568,928 Technology Center 3700 Before STEFAN STAICOVICI, LEE L. STEPINA, and ARTHUR M. PESLAK, Administrative Patent Judges. STAICOVICI, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE Amo Plankensteiner et al. ("Appellants") 1 appeal under 35 U.S.C. § 134(a) from the Examiner's decision in the Final Action (dated Aug. 30, 2016, hereinafter "Final Act.") rejecting claims 1, 8-11, 18-21, and 23. 2 We have jurisdiction under 35 U.S.C. § 6(b ). 1 According to Appellants' Appeal Brief (hereinafter "Br."), filed Nov. 22, 2016, the real parties in interest are Plansee SE and Veeco Instruments Inc. Br. 1. 2 Claims 2-7, 12-17, and 22 are canceled. Appellants' Amendment 2--4 (filed Aug. 16, 2016). Appeal2017-006796 Application 13/568,928 We REVERSE. SUMMARY OF DECISION INVENTION Appellants' invention relates "to a terminal for a mechanical support of a heating element" for a metal organic vapor deposition (MOCVD) heater. Spec. paras. 1, 2. Claims 1, 11, 21, and 23 are independent. Claim 1, reproduced below, is illustrative of the claimed subject matter: 1. A terminal for mechanical support of a heating element in a MOCVD reactor, comprising a base device, a mounting device, the mounting device being configured to mechanically support the heating element in the MOCVD reactor, and a support device connecting the base device to the mounting device, said support device being a leaf spring having two or more leaves disposed at a spacing distance from one another and arranged in a substantially parallel orientation, said support device allowing displacement of the heating element about a single main elastic direction being oriented substantially along a radial direction defined by a planar extension of the heating element when mounted at the mounting device, and wherein a material of the terminal comprises at least 90% by weight of a refractory metal selected from the group consisting of tungsten, an alloy of tungsten, molybdenum, and an alloy of molybdenum. REJECTIONS I. Claims 1, 8-11, and 18-20 are rejected under 35 U.S.C. § 103(a) as unpatentable over Uchiyama et al. (US 2002/0158060 Al, pub. Oct. 31, 2002, hereinafter"Uchiyama"), Watson (US 1,759,722, iss. May 20, 1930), and Mitoff et al. (US 4,833,039, iss. May 23, 1989, hereinafter "Mitoff'). 2 Appeal2017-006796 Application 13/568,928 II. Claims 21 and 23 are rejected under 35 U.S.C. § 103(a) as unpatentable over Uchiyama and Watson. ANALYSIS Rejection I Each of independent claims 1 and 11 requires, inter alia, "a material of the terminal compris[ing] at least 90% by weight of a refractory metal selected from the group consisting of tungsten, an alloy of tungsten, molybdenum, and an alloy of molybdenum." Br. 13-14 (Claims App.). The Examiner finds that Uchiyama and Watson disclose many of the limitations of independent claims 1 and 11 (see Final Act. 2-3), but relies on Mitoff for the above noted limitation and concludes that it would have been obvious to a person of ordinary skill in the art to make Uchiyama's terminal, as modified by Watson, from Mi to ff' s "refractory metal in order to provide heat-resistan[ce] and wear[] during [the] heating process." Id. at 4 (citing Mitoff, col. 4, 11. 44--52). We agree with Appellants that "the teachings of the secondary reference Mitoff do not properly modify the primary teachings of Uchiyama," because the Examiner has not established adequately that Mitoff teaches that "a material of the terminal comprises at least 90% by weight of a refractory metal," as called for by each of independent claims 1 and 11. Br. 11. Although we appreciate that the portion of Mitoff relied on by the Examiner discloses refractory metals, namely, tungsten and molybdenum, the Examiner does not point to any portion of Mitoff that discloses at least 90% by weight of a refractory metal. Rather, Mitoff discloses that a metallization for filling a feedthrough hole includes a "refractory metal 3 Appeal2017-006796 Application 13/568,928 ranging from about 25% by volume to about 75% by volume of said metallization." Mitoff, col. 2, 11. 1-13. In conclusion, we find that the Examiner's legal conclusion of obviousness is not supported by sufficient factual evidence, and thus, cannot stand. See In re Warner, 379 F.2d 1011, 1017 (CCPA 1967). Accordingly, for the foregoing reasons, we do not sustain the rejection under 35 U.S.C. § 103(a) of claims 1, 8-11, and 18-20 as unpatentable over Uchiyama, Watson, and Mitoff. Rejection II Claim 21 Independent claim 21 recites, in relevant part, "said base device, said support device and said mounting device forming an assembly configured to withstand prevailing operating temperatures in the MOCVD reactor." Br. 15 (Claims App.). The Examiner considers that the above limitation is an "intended use" limitation that depends on the operating temperature of the device. Final Act. 7. According to the Examiner, the "MOCVD reactor does not limit the structure of the claimed invention (i.e., the terminal)," because the "MOCVD reactor is not part of the terminal." Examiner's Answer 13 (dated Dec. 23, 2016, hereinafter "Ans."). Appellants argue that claim 21 does not recite an MOCVD reactor only in the preamble, but also in the body of the claim, and requires that "the elements of the claimed device must necessarily be able to withstand the extremely harsh environment in the MOCVD reactor." Br. 6. 4 Appeal2017-006796 Application 13/568,928 The phrase "configured to" is used to mean "'made to,' 'designed to."' In re Giannelli, 739 F.3d 1375, 1379 (Fed. Cir. 2014) (citingAspex Eyewear, Inc. v. Marchan Eyewear, Inc., 672 F.3d 1335, 1349 (Fed. Cir. 2012)). In this case, the Examiner does not explain adequately how Uchiyama's device is "made to," "designed to," or "configured to" withstand prevailing operating temperatures in the MOCVD reactor. Appellants' Specification states that a problem with known terminals is thermally induced deformation resulting from "the MOCVD process inside of the reactor, [wherein] the heater is heated up to 1000 to 2200° C." Spec. para. 3. In comparison, Uchiyama is directed to a wafer heating apparatus and discloses a known heating apparatus that heats "at a high temperature (500° C, or higher)." Uchiyama, para. 14. As such, it is not clear from the Examiner's position why Uchiyama's device is "made to," "designed to," or "configured to" withstand the 1000° to 2200° C temperatures in a MOCVD reactor. Accordingly, we agree with Appellants that the "device [of Uchiyama] must necessarily be formed (i.e., shape, material, structural characteristics)" to be able to withstand the operating temperatures in a MOCVD reactor. Br. 7. As the Examiner has not made sufficient findings that Uchiyama is so configured, and the use of Watson's disclosure does not remedy the deficiency of Uchiyama, we do not sustain the rejection of independent claim 21 over the combined teachings of Uchiyama and Watson. 5 Appeal2017-006796 Application 13/568,928 Claim 23 Claim 23 recites, in relevant part, "said leaf spring being configured to allow a displacement of said mounting device . . . about a radial axis of the heating element and less than about 10% displacement of the mounting device about a tangential direction or parallel to an axis of the round heating element." Br. 16 (Claims App.). The Examiner considers the above limitation an "intended use" limitation, and, thus, states that Uchiyama's "leaf spring is capable of allowing a displacement of the mounting device." Final Act. 9 (emphasis omitted). According to the Examiner, "it is inherent that the leaf spring is [a] resilient or elastic structure [such] that at least a portion of [the] leaf spring can be moved in directions (i.e., up, down, left and right, radial) that is solely based on the object(s) acting upon the leaf spring." Ans. 14. Although we appreciate the Examiner's position in the Final Action that Uchiyama is "capable of' allowing displacement, and in the Answer that a leaf spring is inherently resilient and can be moved in any direction, nonetheless, the Examiner has not explained adequately how Uchiyama's device is "configured to" allow displacement in the claimed directions and also, within the claimed values. More specifically, Uchiyama discloses that spring 8 applies a "pushing force" to force power supply terminal 7 against pad electrode 6. Uchiyama, paras. 118-121. Hence, in the first instance, we agree with Appellants that the force in Uchiyama is in the vertical direction (axial direction, see Spec. Fig. 5), as viewed with respect to Figure 1 of Uchiyama. See Br. 8. Likewise, the leaf spring in Watson is a conventional leaf spring for absorbing vertical forces in a motor vehicle. See Watson, col. 1, 11. 1-5. Given that the springs of both Uchiyama and Watson are designed 6 Appeal2017-006796 Application 13/568,928 for displacement in the vertical direction, the Examiner does not adequately explain what further modification to Uchiyama's leaf spring would make it capable of displacement about a radial axis and, moreover, displacement of less than about 10% about a tangential direction or parallel to an axis, as called for by independent claim 23. As such, the Examiner has not adequately established that Uchiyama's leaf spring is configured to, or is capable of allowing the claimed displacement of the mounting device. The Examiner's use of the Watson disclosure does not remedy the deficiency of Uchiyama. In conclusion, for the foregoing reasons, we do not sustain the rejection of claim 23 under 35 U.S.C. § 103(a) as unpatentable over Uchiyama and Watson. DECISION The Examiner's decision to reject claims 1, 8-11, 18-21, and 23 is reversed. REVERSED 7 Copy with citationCopy as parenthetical citation