Ex Parte Pendse et alDownload PDFPatent Trial and Appeal BoardDec 19, 201410960893 (P.T.A.B. Dec. 19, 2014) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ____________ Ex parte RAJENDRA PENDSE and SAMUEL TAM ____________ Appeal 2012-012616 Application 10/960,8931 Technology Center 2800 ____________ Before JEFFREY T. SMITH, N. WHITNEY WILSON, and KIMBERLY J. McGRAW, Administrative Patent Judges McGRAW, Administrative Patent Judge. DECISION ON APPEAL Appellants appeal under 35 U.S.C. § 134(a) from the rejection of: 1. Claims 18, 19, 21, 38, and 40 under 35 U.S.C. § 103(a) as being unpatentable over Takeshita et al. (6,376,917 B1, Apr. 23, 2002) (“Takeshita”) in view of Lebby et al. (5,818,404, Oct. 6, 1998) (“Lebby”), and further in view of Miller et al. (5,426,405, June 20, 1995) (“Miller”). Ans. 5. 2. Claims 43–53 under 35 U.S.C. § 103(a) as being unpatentable over Takeshita in view of Lebby. Ans. 11. 1 According to Appellants, the real party in interest is Stats ChipPAC, LTD., of Singapore. App. Br 1. Appeal 2012-012616 Application 10/960,893 2 3. Claim 23 under 35 U.S.C. § 103(a) as being unpatentable over Takeshita in view of Lebby, and further in view of Miller and Inaba et al. (6,166,443, Dec. 26, 2000) (“Inaba”). Ans. 19. We have jurisdiction under 35 U.S.C. § 6(b). We AFFIRM. BACKGROUND Appellants’ invention is directed to chip scale semiconductor device packaging and methods of making such packaging. Spec. ¶ 2; App. Br 14– 18 (Claim App’x). Claims 18, 38, 43, 49 are independent. Product-by-process claims 18 and method claim 43 are representative and are reproduced below: 18. A semiconductor package, comprising: a substrate having conductive traces on first and second surfaces, the conductive traces being constructed as coplanar waveguides; a first semiconductor die mounted on a central region of the first surface of the substrate and electrically connected to the conductive traces on the first surface of the substrate with a plurality of first bumps, the first bumps being mechanically and electrically connected to the conductive traces on the first surface of the substrate using a solid state interconnect in which the first bumps have been deformed against pads on the conductive traces without melting either mating surface, the first semiconductor die having a height above the first surface of the substrate; a plurality of second bumps formed on the first surface of the substrate around a periphery of the first semiconductor die, the second bumps being electrically connected to the first semiconductor die through the conductive traces on the first surface of the substrate, the second bumps having a height greater than the height of the first semiconductor die; Appeal 2012-012616 Application 10/960,893 3 and a second semiconductor die mounted on a central region of the second surface of the substrate and electrically connected to the conductive traces on the second surface of the substrate with a plurality of third bumps, the third bumps being mechanically and electrically connected to the conductive traces on the second surface of the substrate using a solid state interconnect in which the third bumps have been deformed against pads on the conductive traces without melting either mating surface, the solid state interconnect achieving about 0.1 mm pitch between the first and third bumps. 43. A method of making a semiconductor package, comprising: providing a substrate having conductive traces on first and second surfaces; mounting a first semiconductor die on a central region of the first surface of the substrate and electrically connected to the conductive traces on the first surface of the substrate with a plurality of first bumps, the first bumps being mechanically and electrically connected to the conductive traces on the first surface of the substrate using a solid state interconnect made by application of heat and mechanical force to deform the first bumps against pads on the conductive traces without melting either mating surface, the first semiconductor die having a height above the first surface of the substrate; forming a plurality of second bumps on the first surface of the substrate around a periphery of the first semiconductor die, the second bumps being electrically connected to the first semiconductor die through the conductive traces on the first surface of the substrate, the second bumps having a height greater than the height of the first semiconductor die; and mounting a second semiconductor die on a central region of the second surface of the substrate and electrically connected to the conductive traces on the second surface of the substrate with a plurality of third bumps. App. Br 51–52, 54–55 (Claim App’x) (limitations at issue italicized). Appeal 2012-012616 Application 10/960,893 4 ANALYSIS We have reviewed the Examiner’s rejections in light of Appellants’ arguments the Examiner erred. App. Br. 10–50. We are unpersuaded by Appellants’ contentions. The Examiner found Takeshita describes a method of making a semiconductor package that is the different from the claimed invention because Takeshita fails to show that the bumps were mechanically and electrically connected to the conductive traces on the first surface of the substrate using a solid state interconnect made by application of heat and mechanical force to deform the first bumps against pads on the conductive traces without melting either mating surface. See e.g., Ans. 5–6, 8–9, 11–13. The Examiner found Lebby describes an integrated electro-optical package wherein solder balls were subject to a thermo-compression bonded process to mechanically and electrically connect conductive traces. See e.g., Ans. 6, 9, 12, 13; Lebby col. 9, ll.1-21. The Examiner found the thermo- compression bonding process comprises deforming the solder balls against the pads when the conductive traces without melting either mating surface. See e.g., id. The Examiner found that the thermo-compression bonding process inherently comprises mechanically and electrically connecting bumps to the conductive traces on the first surface of the substrate wherein the bumps have been deformed against pads on the conductive traces without melting either mating surface. See e.g., id. The Examiner also found that one of ordinary skill in the art would understand that a thermo-compression bonding process involving gold bumps on a chip or substrate would utilize a bonding temperature of 300ºC for gold bonding that would soften (i.e., not melt) the gold material and Appeal 2012-012616 Application 10/960,893 5 increase the diffusion bonding process. Ans. 23; see also Ans. 23–24 (stating that it is well known in the art that a thermo-compression bonding process involves a temperature of 300ºC and pressure of up to 1N for an 80 μm diameter bump). The Examiner concluded it would have been obvious to one of ordinary skill in the art to perform Takeshita’s method of making a semiconductor package utilizing a thermo-compression bonded process such as described by Lebby. See e.g., Ans. 6, 9, 12. Appellants’ primary argument is that the Examiner erred in concluding independent claims 18, 38, 43, and 49 would have been obvious over the cited art because the art does not teach “first bumps being mechanically and electrically connected to the conductive traces on the first surface of the substrate using a solid state interconnect in which the first bumps have been deformed against pad on the conductive traces without melting either mating surface” as recited in independent claim 18 and similarly recited in independent claims 38, 43, and 49.2 See e.g., App. Br. 39. Appellants argue that Lebby does not explicitly show that the bumps are mounted to pads without melting. Appellants further argue that the Examiner’s reasoning that the limitation is inherent is in error because “the Lebby reference explicitly describes the thermo-compression bonding 2 Appellants make similar arguments regarding limitations found in independent claims 18 and 38 directed to third bumps being mechanically and electrically connected to the conductive traces on the second surface of the substrate using a solid state interconnect in which the third bumps have been deformed against pads on the conductive traces without melting either mating surface. The reasoning applied to the limitations involving the first bumps also applies to the limitations involving the third bumps. Appeal 2012-012616 Application 10/960,893 6 process by explaining that the bump material is melted to form the mechanical connection.” See e.g., App. Br. 16, citing Lebby col. 8:52-56. Appellants have not directed us to evidence that establishes thermo- compression bonding process of Lebby occurs under conditions that necessarily cause melting of the mating surfaces. Lebby does not describe such a thermo-compression bonding processes in the portion of the reference cited by Appellants. The description appearing in column 8 describes the types of materials and their characteristics that are suitable for use as bumps. Appellants have not directed us to evidence that distinguished the materials and process conditions utilized in the cited prior art processes from the materials and conditions required by the claimed invention. Appellants have not directed us to evidence that establishes a person of ordinary skill in the art would have understood that thermo-compression bonding process could occur under conditions that necessarily cause melting of the mating surfaces and Lebby describes these conditions. Moreover, the Appellants fail to address the Examiner’s findings that one of ordinary skill in the art would understand that a thermo-compression bonding process involving gold bumps on a chip or substrate would soften (i.e., not melt) the gold material and increase the diffusion bonding process. Ans. 23. As such, Appellants’ arguments fail to persuasively rebut the Examiner’s finding that one of skill in the art would understand that Lebby teaches using a thermo-compression bonding process and that it was well known to one of skill in the art that in a thermo-compression bonding process results in a solid state interconnect through softening (i.e., not melting). Ans. 23–24. Appeal 2012-012616 Application 10/960,893 7 Accordingly, we are not persuaded the Examiner reversibly erred in concluding that independent claims 18, 38, 43, and 49 would have been obvious over the cited art. Appellants next argue that the Examiner erred in concluding that one of skill in the art would have found it obvious to modify solid state interconnects of Takeshita to provide the particular solid state interconnects as taught by Lebby “for the purposes of transferring heat energy from a semiconductor device.” See e.g., App. Br. 19. Appellants contend that this rationale is insufficient as transferring heat energy is not discussed or supported by either the Takeshita or Lebby references. Id. This argument is not persuasive. The Supreme Court has held that in analyzing the obviousness of combining elements, a court need not find specific teachings, but rather may consider “the background knowledge possessed by a person having ordinary skill in the art” and “the inferences and creative steps that a person of ordinary skill in the art would employ.” See KSR Int'l Co. v. Teleflex Inc., 550 U.S. 398, 418 (2007). Here, the Examiner found, and we agree, that one of ordinary skill in the art would understand that the solid state interconnects of Lebby would transfer heat energy from a semiconductor device. Appellants have not provided sufficient argument or evidence to rebut the Examiner’s finding. Indeed, Appellants appear to concede that Lebby’s solid state interconnects are effective at transferring heat as Appellants also argue that the Examiner has not provided evidence that Lebby’s interconnects are more effective at transferring heat than the reflowed solder balls of the Takeshita reference. App. Br. 19 (emphasis added). However, superior results are not required. It is sufficient that the Examiner found that Appeal 2012-012616 Application 10/960,893 8 it was well known that solder joining and thermo-compression bonding are interchangeable methods to form a solid state interconnect. See e.g., Ans. 22. As such, Appellants’ argument is not persuasive of Examiner error. Appellants argue that the Examiner has not provided an adequate rationale for modifying Takeshita to include coplanar waveguides as taught by Miller and recited in independent claims 18 and 38. App. Br 20. We disagree. The Examiner found that Miller teaches conductive traces connected as coplanar waveguides connected to a micro-strip transmission line “for the purposes of transmitting a signal along a conductive path on the substrate.” Office Act. 11–12. The Examiner further found that it is “well known in the art that conductive traces can be constructed as coplanar waveguides” and that “coplanar waveguides and/or microstrip lines are interchangeable.” Office Act. 14. Appellants have provided no persuasive argument that the Examiner’s findings are in error. As such, we find that the use of coplanar waveguides for the purpose of transmitting a signal along a conductive path on a substrate is an objective and reasonable rationale reason to modify Takeshita. Appellants also make a “teaching away” argument, asserting that because Lebby teaches bumps that can be partially melted, Lebby teaches away from forming a connection without melting either mating surface. See e.g., App. Br 18. Similarly, Appellants argue that because Miller teaches a clamping structure that has advantages over a solder connection, that Miller also teaches away from using a solid state interconnect in which the first bumps have been deformed against pads on the conductive traces without Appeal 2012-012616 Application 10/960,893 9 melting either mating surface in favor of a clamping structure. See e.g., App. Br 22–24. These arguments are not persuasive. A prior art’s mere disclosure of more than one alternative does not constitute a teaching away from any of these alternatives “because such disclosure does not criticize, discredit, or otherwise discourage the solution claimed….” In re Fulton, 391 F.3d 1195, 1201 (Fed. Cir. 2004). Appellants have not pointed to any teaching in Lebby or Miller that criticizes, discredits, or otherwise discourages the solution claimed. Appellants argue that the Examiner erred in rejecting claim 18 because the cited art does not teach or suggest a “solid state interconnect achieving about 0.1 mm pitch between the first and third bumps” as recited in the claim. App. Br 24. Appellants assert that Takeshita teaches a structure with a larger 0.3 mm pitch and that Lebby and Miller do not cure this deficiency. Id. This argument is not persuasive as Appellants fail to address the Examiner’s finding that Lebby teaches a solid state interconnect achieving about 0.1 mm pitch between the first and third bump. Ans. 6, citing Lebby 8:22–67 (teaching an interconnect of 0.08mm). The Examiner found that the “solid state interconnect achieving about 0.1 [mm] pitch between the first and third bump” would have been obvious since the final structure is the same. Ans. 6. The Examiner further noted that Appellants have not asserted that the recited dimensions are critical or that claimed dimension provides any unexpected results. Id. Appellants have provided no persuasive argument as to why the Examiner’s findings or reasoning are in error. Appeal 2012-012616 Application 10/960,893 10 Appellants’ remaining arguments have been fully considered but are not deemed persuasive. For the above reasons, Examiner’s decision rejecting independent claims 18, 38, 43, and 49, and dependent claims 19, 21, 23, 40, and 44–48, 50–53, which have not been argued separately, is sustained. DECISION The Examiner’s decision rejecting claims 18, 19, 21, 23, 38, 40, and 43–53 as unpatentable under 35 U.S.C. § 103(a) is affirmed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1)(iv). AFFIRMED msc Copy with citationCopy as parenthetical citation