Ex Parte Pavan et alDownload PDFPatent Trial and Appeal BoardDec 17, 201210749130 (P.T.A.B. Dec. 17, 2012) Copy Citation UNITED STATES PATENT AND TRADEMARKOFFICE UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 10/749,130 12/30/2003 Alessia Pavan NUM.0104US 3296 76446 7590 12/18/2012 Trop, Pruner & Hu, P.C. 1616 S. Voss Road, Suite 750 Houston, TX 77057-2631 EXAMINER MOVVA, AMAR ART UNIT PAPER NUMBER 2898 MAIL DATE DELIVERY MODE 12/18/2012 PAPER Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE PATENT TRIAL AND APPEAL BOARD ____________ Ex parte ALESSIA PAVAN, CESARE CLEMENTI, and LIVIO BALDI ____________ Appeal 2010-007605 Application 10/749,130 Technology Center 2800 ____________ Before MARC S. HOFF, CARLA M. KRIVAK, and ELENI MANTIS MERCADER , Administrative Patent Judges. MANTIS MERCADER, Administrative Patent Judge. DECISION ON APPEAL Appeal 2010-007605 Application 10/749,130 2 STATEMENT OF THE CASE Appellants appeal under 35 U.S.C. § 134(a) from a final rejection of claims 39-46. We have jurisdiction under 35 U.S.C. § 6(b). We Affirm. THE INVENTION Appellants’ claimed invention is directed to a dielectric layer 9 having a low dielectric constant formed between floating gate regions FG belonging to the same memory cell matrix row in order to reduce coupling between adjacent cells 1. (See Spec. ¶ [37] and Fig. 9). Independent claim 39, reproduced below, is representative of the subject matter on appeal. 39. A memory comprising: a pair of adjacent cells having separate floating gates; a field oxide between said cells; a first dielectric covering said floating gates and said field oxide; a second dielectric over said first dielectric between said floating gates, said second dielectric having a lower dielectric constant than said first dielectric; and a control gate over said first and second dielectrics. REFERENCES and REJECTIONS 1. The Examiner rejected claims 39 and 41-43 under 35 U.S.C. §102(b) as being anticipated by Arai (US Patent 6,329,688 B1). 2. The Examiner rejected claims 39, 41, and 46 under 35 U.S.C. §102(b) as being anticipated by Tanimoto (US Patent Application 2002/0025630). Appeal 2010-007605 Application 10/749,130 3 3. The Examiner rejected claims 40 and 44 under 35 U.S.C. § 103(a) as unpatentable over Arai in view of Liu (US Patent 5,923,063). 4. The Examiner rejected claims 40 and 44 under 35 U.S.C. § 103(a) as unpatentable over Arai in view of Ahn (US Patent Application 2001/0038132). ISSUE The issue is whether the Examiner erred in finding that Arai teaches the limitation of: “a second dielectric over said first dielectric between said floating gates” as recited in claim 39. PRINCIPLES OF LAW “[O]ne cannot show non-obviousness by attacking references individually where . . . the rejections are based on combinations of references.” In re Keller, 642 F.2d 413, 426 (CCPA 1981). ANALYSIS Claims 39 and 41-43 Appellants argue that claim 39 requires the second dielectric be over the first dielectric between the floating gates (Br. 10). Appellants specifically argue that because Arai’s layer 5c stops exactly at the edge of the floating gate 4 (see Arai’s Fig. 2) then the Examiner’s interpretation of “a first dielectric layer” as required by claim 39 fails (Br. 10). Appellants also allege that the Examiner’s interpretation of “first dielectric layer” as recited in claim 39 does not satisfy claim 42, which requires that the first dielectric layer include oxide/nitride/oxide because only layers 5a (i.e., oxide) and 5b (i.e., nitride) are between the floating gates 4 (see Br. 10). Appeal 2010-007605 Application 10/749,130 4 We do not agree with Appellants’ argument. Appellants’ argument is not commensurate in scope with claim 39. Claim 39 requires that the second dielectric layer be over the first dielectric layer and between the floating gates (see claim 39). Thus, we agree with the Examiner that the disputed limitation of claim 39 is met by the second dielectric layer 10 being over the first dielectric layer 5 (i.e., including layers 5a, 5b, and 5c) and between the floating gates 4 (see Fig. 2 and Ans. 3). Nothing in the claim language requires layer 5 (5a, 5b, and 5c) be between the floating gates. Claim 42 is met by Arai’s teaching that layer 5 (i.e., first dielectric layer) includes ONO (i.e., silicon oxide film 5a, silicon nitride film 5b, and silicon oxide film 5c) (col. 8, ll. 59-63). Accordingly, we affirm the Examiner’s rejection of claims 39 and 42. For the same reasons we also affirm the Examiner’s rejection of claims 41 and 43 which were not separately argued (Br. 10). Claims 40 and 44-46 Appellants do not make any additional arguments of patentability with respect to claims 40 and 44-46. Accordingly, we pro forma affirm the Examiner’s rejections of these claims. CONCLUSION The Examiner did not err in finding that Arai teaches the limitation of “a second dielectric over said first dielectric between said floating gates” as recited in claim 39. DECISION The Examiner’s decision rejecting claims 39-46 is affirmed. Appeal 2010-007605 Application 10/749,130 5 No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1)(iv)(2010). AFFIRMED rwk Copy with citationCopy as parenthetical citation