Ex Parte Ohtani et alDownload PDFBoard of Patent Appeals and InterferencesApr 26, 201010946072 (B.P.A.I. Apr. 26, 2010) Copy Citation UNITED STATES PATENT AND TRADEMARK OFFICE ____________________ BEFORE THE BOARD OF PATENT APPEALS AND INTERFERENCES ____________________ Ex parte HISASHI OHTANI, AKIHARU MIYANAGA, SATOSHI TERAMOTO, and SHUNPEI YAMAZAKI ____________________ Appeal 2009-011672 Application 10/946,072 Technology Center 1700 ____________________ Decided: April 26, 2010 ____________________ Before MICHAEL P. COLAIANNI, CATHERINE Q. TIMM, and JEFFREY T. SMITH, Administrative Patent Judges. COLAIANNI, Administrative Patent Judge. DECISION ON APPEAL This is a decision on an appeal under 35 U.S.C. § 134 from the Examiner's final rejection of claims 1 and 27 through 51, which are all of the claims pending in the above-identified application. We have jurisdiction pursuant to 35 U.S.C. § 6. We REVERSE. Appeal 2009-011672 Application 10/946,072 2 STATEMENT OF THE CASE The subject matter on appeal is directed to, inter alia, method of manufacturing a semiconductor device. The Examiner maintains the rejection of claims 1 and 27-51 under nonstatutory obviousness-type double patenting as unpatentable over claims 1-27 of Zhang (US 5,403,772, issued Apr. 4, 1995). ISSUE Did the Examiner reversibly err in determining that a method for manufacturing a semiconductor device having two etching steps as required by Appellants’ claims 1, 31, 37, and 46 defines merely an obvious variation of the method of claims 1-27 of Zhang? We decide this issue in the affirmative. PRINCIPLES OF LAW The key question in any obviousness double patenting analysis is: “Does any claim in the application define merely an obvious variation of an invention claimed in the patent asserted as supporting double patenting?” General Foods v. Studiengesellschaft Kohle mbH, 972 F.2d 1272, 1278 (Fed. Cir. 1992) (discussing In re Vogel, 422 F.2d 438 (CCPA 1970)). Answering this question requires that the decisionmaker first construe the claims in the patent and the claims under review and determine the differences between them. Eli Lilly v. Barr Labs., 251 F.3d 955, 970 (Fed.Cir.2001). After determining the differences, the decisionmaker must determine whether the differences in subject matter render the claims patentably distinct. Id. Appeal 2009-011672 Application 10/946,072 3 FINDINGS, ANALYSIS AND CONCLUSION The Examiner states that "[t]he patent claims [1-27] do in fact render the instant claims obvious to one of ordinary skill in the art. The instant claims do teach etching to pattern the silicon and a separate etching step to remove the metal." (Ans. 4). We disagree. As Appellants correctly state, the Examiner provides conclusory statements with no reference to any specific claims or claim language . . . nothing in the claims [of Zhang] describes or suggests two distinct etching steps of the same semiconductor film, much less an etching step before crystallization of the semiconductor film and a separate etching step after crystallization to remove an 'edge portion' of the semiconductor film. (Reply Br. 3) (emphasis added). In this regard, for example, while each of Zhang's claims 5, 9, and 18 teaches a single step of patterning or etching a silicon film, the Examiner does not direct us to any specific claim language setting forth two etching steps either expressly or inherently or provide any credible reason to support the determination that a second etching step as required by Appellants' claims 1, 31, 37, and 46 would have been an obvious variation of the method of Zhang's claims 1-27. Thus, it follows that the Examiner reversibly erred. ORDER In summary, the rejection made by the Examiner is reversed. REVERSED cam Appeal 2009-011672 Application 10/946,072 4 FISH & RICHARDSON P.C. P.O. BOX 1022 MINNEAPOLIS MN 55440-1022 Copy with citationCopy as parenthetical citation