Ex Parte OHMI et alDownload PDFPatent Trial and Appeal BoardNov 2, 201712950798 (P.T.A.B. Nov. 2, 2017) Copy Citation United States Patent and Trademark Office UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O.Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 12/950,798 11/19/2010 Tadahiro OHMI SUGI0208 8470 24203 7590 11/06/2017 GRIFFIN & SZIPL, PC SUITE 112 2300 NINTH STREET, SOUTH ARLINGTON, VA 22204 EXAMINER MCCALISTER, WILLIAM M ART UNIT PAPER NUMBER 3753 NOTIFICATION DATE DELIVERY MODE 11/06/2017 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): GandS @ szipl.com burke @ szipl. com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte TADAHIRO OHMI, KOUJINISHINO, RYOUSUKE DOHI, MASAAKINAGASE, KATSUYUKI SUGITA, KAORU HIRATA, TAKASHIHIROSE, TSUTOMU SHINOHARA, NOBUKAZUIKEDA, TOSHIHIDE YOSHIDA, and HISASHI TANAKA Appeal 2016-000076 Application 12/950,798 Technology Center 3700 Before LINDA E. HORNER, ANNETTE R. REIMERS, and ERIC C. JESCHKE, Administrative Patent Judges. JESCHKE, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE Tadahiro Ohmi et al. (“Appellants”)1 seek review under 35 U.S.C. § 134(a) of the Examiner’s decision, as set forth in the Final Office Action dated October 15, 2014 (“Final Act.”), rejecting claims 1 and 3-11 under 35 U.S.C. § 103(a) as unpatentable over Applicants’ Admitted Prior Art (“AAPA”) and Ohmi (US 2006/0236781 Al, published Oct. 26, 2006). The 1 Appellants identify (1) Fujikin Incorporated, (2) National University Corporation Tohoku University, and (3) Tokyo Electron Limited as the real parties in interest. Appeal Br. 3. Appeal 2016-000076 Application 12/950,798 record includes a transcript of the oral hearing held on October 19, 2017. We have jurisdiction under 35 U.S.C. § 6(b). We affirm. BACKGROUND The disclosed subject matter “relates to improvements in a fluid supply method used for semiconductor manufacturing facilities, chemical industrial facilities, medical industrial facilities, and the like.” Spec. ^ l.2 Claims 1 and 6 are independent. Claim 1 is reproduced below, with emphasis added: 1. A discontinuous switching fluid flow rate control method comprising the steps of: (a) providing a pressure type flow rate control device that comprises i. a control valve; ii. at least two or more parallel fluid passages connected as fluid passages between a downstream side of the control valve and a fluid supply pipe passage; and iii. a plurality of orifices, wherein each orifice has a different fluid flow rate characteristic from each other orifice of the plurality of orifices, wherein the plurality of orifices are interposed in respective parallel fluid passages so as to pass fluid flowing in a first flow rate region though a first orifice disposed to provide flow rate control of fluid flowing in the first flow rate region and so 2 Citations to the Specification refer to the 26-page version filed on November 19, 2010. 2 Appeal 2016-000076 Application 12/950,798 as to pass fluid flowing in a second flow rate region through at least a second orifice disposed to provide flow rate control of fluid flowing in the second flow rate region; and (b) during flow of fluid between the downstream side of the control valve and the fluid supply pipe passage, operating the pressure type flow rate control device to provide flow rate control of the fluid, wherein a minimum flow rate in the second flow rate region is higher than a maximum flow rate in the first flow rate region, and a discontinuity in flow rate and flow rate control separates the maximum flow rate in the first flow rate region and the minimum flow rate in the second flow rate region, and wherein i. the pressure type flow rate control device computes a flow rate of fluid passed through the first orifice, or the second orifice, or the first orifice and the second orifice, as Qc = KPi, where K is a proportional constant, from an upstream side pressure Pi; or ii. the pressure type flow rate control device computes the flow rate of fluid passed through the first orifice, or the second orifice, or the first orifice and the second orifice, as Qc = KP2m(Pi-P2)n, where K is a proportional constant, and m and n are constants, from the orifice upstream side pressure Pi and an orifice downstream side pressure P2. 3 Appeal 2016-000076 Application 12/950,798 DISCUSSION Appellants assert the patentability of the two independent claims— claims 1 and 6—based on the same arguments and do not provide separate arguments for any dependent claims. Appeal Br. 7-15. We select independent claim 1 as representative, with the remaining claims standing or falling with claim 1. See 37 C.F.R. § 41.37(c)(l)(iv) (2014). For claim 1, the Examiner relied on Figures 6 and 8(A) as well as paragraphs 6 and 15 through 18 of the Specification3 as AAPA, and stated: The only differences between the invention and the [AAPA] are that (1) the invention uses a lower flow rate orifice at orifice location 8a, which has a flow rating up to 100 seem, whereas the [AAPA] uses a low flow rate orifice 8a[,] which has a flow rating up to 200 seem (see paragraphs [15 to 18 of the Specification,] describing FIGS 6 and 8A), and (2) the claims recite the inherent result of using said lower flow rate orifice - i.e., the creation of a “discontinuity in flow rate and flow rate control” between the first and second flow rate regions. Final Act. 3 (underlining as emphasis omitted).4 The Examiner found, however, that “Ohmi teaches that low flow rate orifices with flow ratings up to 100 seem were known in the art at the time of invention (see Ohmi, paragraph [0141], describing the ‘No. 1’ orifice).” Id. According to the 3 In the Office Action and Answer, the Examiner refers to the paragraph numbering of the Pre-grant Publication for this Application. Because the paragraph numbering of the Pre-grant Publication and the Specification differ, to avoid confusion, we will revise any statements that refer to the Pre-grant Publication to instead refer to the Specification. 4 The term “seem” stands for standard cubic centimeters per minute. Spec. ^ 2. 4 Appeal 2016-000076 Application 12/950,798 Examiner, it would have been obvious for one of ordinary skill in the art at the time of the invention to use a low flow rate orifice which has a flow rating up to 100 seem (at AAPA’s orifice location 8a), instead of an orifice with a flow rating up to 200 seem, in [the AAPA] device, for example should a user decide that higher flow rate accuracy up to 100 seem (rather than up to 200 seem) is needed for a particular application. Further, as a result of this obvious substitution, a discontinuity in flow rate and flow rate control, between the first and second flow rate regions (i.e., from 100 seem (the max flow rate of obvious orifice 8a) to 200 scc[]m (the minimum flow rate of orifice 8c)) would necessarily be created during the provision and operation of the resultant system, just as in [Appellants’] invention. Id. at 3-4. First, Appellants “dispute[] the Examiner’s contention that with regard to claims 1 and 6, ‘Applicant clearly admits as prior art steps (a) and (b), by operation and provision of AAPA.’” Appeal Br. 7 (quoting Final Act. 3)). Appellants argue that “there is no disclosure or suggestion in the alleged AAPA of the claim limitations: ... ‘a discontinuity in flow rate and flow rate control separates the maximum flow rate in the first flow rate region and the minimum flow rate in the second flow rate region’ as recited in section (b) of claim 1” (as shown with emphasis above). Id. at 8.5 According to Appellants, Figures 6 and 8 A of the Specification do not disclose the discontinuity limitation. See id. at 9-10. We are not apprised of error based on this argument. As an initial matter, we note that, if read in isolation, the first sentence on page 3 of the Final Office Action could be interpreted as indicating that the Examiner 5 We will refer to this claim language as the “discontinuity limitation.” 5 Appeal 2016-000076 Application 12/950,798 relied on AAPA for the entirety of sections (a) and (b) in claim 1. The rest of the Rejection makes clear, however, that the Examiner does not rely on AAPA alone to address claim 1, or the discontinuity limitation recited in section (b) of claim 1. See Final Act. 3—4; see also Ans. 6 (“The [Ejxaminer does not contend that the [AAPA] alone discloses a discontinuity as claimed.”). Instead, the Examiner takes the position that the recited “discontinuity” would be an inherent characteristic of the modified process—i.e., after substituting in the 100-sccm orifice of Ohmi for low flow rate orifice 8a in Figure 6 of the Specification. See Ans. 6 (stating that “the ‘discontinuity’ as claimed (and not disclosed by the [AAPA] alone) would inherently occur as a result of the obvious device (which uses a lower flow- rate orifice at location 8a), since the obvious device would be incapable of accurately controlling flow rates between 100 and 200 seem”); Final Act. 3- 4 (stating that the recited “discontinuity” “would necessarily be created during the provision and operation of the resultant system, just as in [Appellants’] invention”); see also In re Merck & Co., 800 F.2d 1091, 1097 (Fed. Cir. 1986) (“Non-obviousness cannot be established by attacking references individually where the rejection is based upon the teachings of a combination of references.”). In the Reply Brief, Appellants state that “[n] either the alleged A[A]PA nor Ohmi, alone or in combination disclose or suggest” the discontinuity limitation. Reply Br. 5 (emphasis added). This argument does not apprise us of error because Appellants contend that the combined prior art does not satisfy the limitation at issue but do not explain why. See 37 C.F.R. § 41.37(c)(l)(iv) (“The arguments shall explain why the examiner erred as to each ground of rejection contested by appellant.”). 6 Appeal 2016-000076 Application 12/950,798 Second, Appellants argue that “the Examiner is incorrect in his assertion” that paragraphs 15 through 18 of the Specification “teach any such thing.” Appeal Br. 11 (discussing Final Act. 3). According to Appellants, “these paragraphs teach that FIGS. 6 and 8A differ from the . . . invention as recited in independent claim[] 1.” Id. Highlighting certain disclosures in paragraphs 17 and 18 of the Specification, Appellants argue that the Specification “clearly discusses the differences and disadvantages of prior art FIG. 8.” Id. We are not apprised of error based on this argument. Regardless of whether Appellants use the phrase “any such thing” to refer to the discontinuity limitation or the entirety of claim 1, as discussed above, the Examiner does not rely on AAPA alone to address claim 1, or the discontinuity limitation recited in claim 1. Moreover, as noted by the Examiner, the discussion of certain drawbacks of the AAPA does not undermine the use of those disclosures as prior art. See Ans. 7 (stating that Appellants’ “discussion of the drawbacks of AAPA is not understood to negate [Appellants’] admission that it constitutes prior art”). Third, as to the findings regarding Ohmi, Appellants “do[] not dispute that orifices up to 100 seem were known,” but rather Appellants question[] . . . the relevance of this teaching given that: (1) the alleged AAPA has no foundation; and (2) the first named co inventor of [Ohmi] explicitly stated in a Rule 132 Declaration previously filed on July 18, 2013 that Ohmi discloses a “differential pressure type flowmeter and differential pressure type flow meter controller[”] that is “completely silent regarding any kind of discontinuous switching of fluid flow rate control.” Appeal Br. 11-12 (citing Declaration Under 37 C.F.R. § 1.132 (of Kouji Nishino) (dated July 18, 2013) ^ 19). 7 Appeal 2016-000076 Application 12/950,798 We are not apprised of error based on this argument. As to point 1 raised by Appellants, for the reasons discussed above regarding the second argument, the discussion of certain drawbacks of the AAPA does not undermine the use of those disclosures as prior art. As to point 2, the Examiner does not rely on Ohmi alone to address the discontinuity limitation, but rather, as discussed above, the Examiner takes the position that the recited “discontinuity” would be an inherent characteristic of the modified process. See Ans. 7 (addressing this argument by stating, “It is the combination of the [AAPA] and the orifice of up to 100 seem [of Ohmi] which renders the ‘discontinuity’ obvious.”); Merck, 800 F.2d at 1097. Fourth, Appellants contend that “the Examiner has ignored, for example, FIG. 2, as originally filed.” Appeal Br. 12 (emphasis omitted). Appellants state, “[w]ith flow rate control using solely the first flow rate region orifice 8a', the flow rate control is performed more accurately at low flow rates in a first flow rate region and also with respect to a second higher flow rate region.” Id. (citing Spec. 39, 40) (emphasis omitted). According to Appellants, this is “[a]n advantage not taught in the prior art and is strong evidence of non-obviousness.” Id. The Examiner states to have “not ignored FIG[.] 2” and states that “Figure 2 is understood to illustrate [Appellants’] two flow rate regions with a discontinuity therebetween.” Ans. 7. According to the Examiner, “[t]he same features would be shown in [AAPA] FIG 8A, if box ‘F200’ were shifted to the left (for example by changing the [AAPA] orifice 8a from <200 seem to <100 seem).” Id. In reply, Appellants quote the preceding statement by the Examiner, highlighting the word “if.” Reply Br. 6. According to Appellants, this 8 Appeal 2016-000076 Application 12/950,798 statement shows that “[t]he Examiner is actually inserting his own hindsight reconstruction to find obviousness where none such exists.” Id. We understand the Examiner’s response here as again taking the position that the recited “discontinuity” would be an inherent characteristic of the modified process. See Ans. 6. When an examiner shows a sound basis for finding that the claimed structure6 and prior art structure are identical or substantially identical, the burden shifts to an appellant to show that the “prior art products do not necessarily or inherently possess the characteristics of [the] claimed product.” In re Best, 562 F.2d 1252, 1255 (CCPA 1977). Here, we determine that the Examiner’s explanation supports a prima facie case that the recited “discontinuity” would be an inherent characteristic of the modified process. Appellants have not shown that the modified process would not provide the recited “discontinuity.” We turn now to the use of the word “if’ in the phrase “if box ‘F200’ were shifted to the left (for example by changing the [AAPA] orifice 8a from <200 seem to <100 seem).” Ans. 7 (emphasis added). In Figure 8(A), box F200 represents a low flow rate region of 20 seem to 200 seem. See, e.g., Spec, m 21, 16, 15. The Examiner states that, as a result of the proposed modification—i.e., after substituting the 100-sccm orifice of Ohmi for low flow rate orifice 8a in Figure 6 of the Specification—the modified orifice would have a maximum flow rating of 100 seem rather than 200 seem. Final Act. 3. Thus, we view the statement at issue from page 7 of the Answer as indicating a result of the proposed modification of AAPA with Ohmi, rather than as indicating the use of hindsight reconstruction. 6 For claim 1, the claimed structure is that recited in section (a). 9 Appeal 2016-000076 Application 12/950,798 Here, Appellants do not address the reasoning provided by the Examiner to modify AAPA with Ohmi (Final Act. 3). We determine that the Examiner’s reasoning supports a prima facie case of obviousness of claim 1. See In re Oetiker, 977 F.2d 1443, 1445 (Fed. Cir. 1992) see also In re Cree, Inc., 818 F.3d 694, 702 n.3 (Fed. Cir. 2016) (viewing an “impermissible hindsight” argument as “essentially a repackaging of the argument that there was insufficient evidence of a motivation to combine the references”). By not addressing the reasoning provided, Appellants have not shown error in the relevant findings or the conclusion as to obviousness. Fifth, Appellants highlight a statement in Appellants’ own summary of an interview with the Examiner, which states, “[t]he Examiner agreed that the prior art is silent regarding any kind of discontinuous switching of fluid flow rate control but the Examiner responded that he believed such a method is inherently obvious.” Telephone Interview Summary (dated Aug. 29, 2014), at 2, quoted at Appeal Br. 10. Appellants argue that “[ijnherency is not sufficient to show obviousness.” Appeal Br. 10. Appellants also state that the Examiner (1) “is carrying out an impermissible hindsight reconstruction” and (2) “simply cannot find any prior art that teaches” the discontinuity limitation. Id. In response, the Examiner states “the Examiner does not understand what is meant by the proffered phrase ‘inherently obvious’ and does not recall ever using this terminology” and states that “the method claims would necessarily be performed during the normal and usual operation of the obvious device.” Ans. 6. We are not apprised of error based on this argument. Regardless of the Examiner’s statements during the interview (or in the summary of that 10 Appeal 2016-000076 Application 12/950,798 interview), we understand the Examiner to take the position discussed above—i.e., that the recited “discontinuity” would be an inherent characteristic of the modified process. In other words, the Examiner’s reason for modifying the process to use the low flow rate orifice of Ohmi having a flow rating of up to 100 seem is to provide a higher flow rate accuracy than the prior art orifice with a flow rating of up to 200 seem. Final Act. 3. In so doing, a discontinuity would result. For the reasons discussed above regarding the fourth argument, Appellants have not shown that the modified process would not provide the recited “discontinuity.” Sixth, Appellants argue that, “[e]ven assuming arguendo that aprima facie showing of obviousness had been made, which is not the case, the unexpected advantages of the present invention [are] sufficient to rebut any such showing.” Appeal Br. 13. According to Appellants, an advantage provided by various embodiments, in accordance with the present invention, is that a discontinuous switching fluid flow rate control method is provided in which it is possible to switch between a low flow rate region (also referred to as a “first flow rate region” [)] and a high flow rate region (also referred to as a “second flow rate region”) without deteriorating the flow rate control accuracy for the first flow rate region, and thereby enable the method of the invention to be deployed using fewer parts than hitherto possible resulting in downsized fluid supply devices and reduction in manufacturing cost. Id. (citing Spec. 1, 22-24); see also Reply Br. 7 (“The two flow rate regions of the present invention result in ‘highly accurate flow rate control.’”) (citing Spec. ^ 40). Appellants argue that “the Examiner’s decision to ignore secondary considerations was improper.” Appeal Br. 14. We are not apprised of error here because Appellants have not identified record evidence supporting the assertion that the purported 11 Appeal 2016-000076 Application 12/950,798 advantages were unexpected results. See In re Geisler, 116 F.3d 1465, 1470 (Fed. Cir. 1997) (stating that unsupported attorney argument as to unexpected results is entitled to little weight); see also In re De Blauwe, 736 F.2d 699, 705 (Fed. Cir. 1984) (“It is well settled that unexpected results must be established by factual evidence. Mere argument or conclusory statements in the specification does not suffice.”). Unlike in In re Soni, 54 F.3d 746 (Fed. Cir. 1995), relied on by Appellants (Appeal Br. 14), here, Appellants’ Specification (including the paragraphs cited by Appellants) does not include data indicating substantially improved results, and does not include a statement that the results were unexpected. See Soni, 54 F.3d at 750-51. Neither have Appellants provided such a statement through other evidentiary methods, such as a declaration. See Geisler, 116 F.3d at 1471. Instead, only attorney argument identifies the purported advantages as unexpected results. See, e.g., Appeal Br. 13. Moreover, only if Appellants had provided such evidence (which they did not) could the Examiner have erred by failing to consider such evidence. See In re Huai-Hung Kao, 639 F.3d 1057, 1067 (Fed. Cir. 2011) (“[WJhen secondary considerations are present, though they are not always dispositive, it is error not to consider them.”) (emphasis added). For these reasons, we sustain the rejection of independent claim 1. Claims 3-11 fall with claim 1. 12 Appeal 2016-000076 Application 12/950,798 DECISION We affirm the decision to reject claims 1 and 3-11. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1). See 37 C.F.R. § 1.136(a)(l)(iv) AFFIRMED 13 Copy with citationCopy as parenthetical citation