Ex Parte MOFFITTDownload PDFPatent Trial and Appeal BoardJun 18, 201813796249 (P.T.A.B. Jun. 18, 2018) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE FIRST NAMED INVENTOR 13/796,249 03/12/2013 Theodore P. MOFFITT 44257 7590 06/20/2018 PATTERSON & SHERIDAN, LLP- -Applied Materials 24 Greenway Plaza, Suite 1600 HOUSTON, TX 77046 UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. 016928USA/FEP/RTP/PJT 1327 EXAMINER MAYE,AYUBA ART UNIT PAPER NUMBER 3742 NOTIFICATION DATE DELIVERY MODE 06/20/2018 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): Pair_Eofficeaction@pattersonsheridan.com psdocketing@pattersonsheridan.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte THEODORE P. MOFFITT Appeal2017-007250 Application 13/796,249 Technology Center 3700 Before EDWARD A. BROWN, GEORGE R. HOSKINS, and ARTHUR M. PESLAK, Administrative Patent Judges. PESLAK, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE Appellant1 appeals under 35 U.S.C. § 134(a) from the Examiner's decision rejecting claims 1-8. 2 We have jurisdiction under 35 U.S.C. § 6(b ). We REVERSE. 1 Applied Materials, Inc. is the Applicant and is identified as the real party in interest. Appeal Br. 3. 2 Claims 9-20 are cancelled. See Amendment 2 (filed August 9, 2016). Appeal2017-007250 Application 13/796,249 THE CLAIMED SUBJECT MATTER Appellant's invention is directed to "a pulse width controller incorporated in a laser thermal processing apparatus." Spec. ,r 2. Claim 1, reproduced below, is representative of the claimed subject matter. 1. An optical apparatus, comprising: a first rotatable wave plate having an optical axis; a polarizing beam splitter with a reflecting axis and a transmitting axis, wherein the transmitting axis is substantially parallel to the optical axis of the first rotatable wave plate; a first reflector positioned along the transmitting axis and propagating a first deflected electromagnetic radiation along a first deflection axis; and a second reflector positioned to receive electromagnetic radiation originating from the first reflector and propagate a return electromagnetic radiation to the polarizing beam splitter along the reflecting axis. REJECTION3 Claims 1-8 are rejected under 35 U.S.C. § I02(a) as anticipated by Fukumitsu (US 2012/0061356 Al, published Mar. 15, 2012). DISCUSSION The Examiner finds that Fukumitsu discloses all the limitations of claim 1 including a first rotatable wave plate 104, a polarizing beam splitter 106, a first reflector 108, and a second reflector 110 arranged as recited. Final Act. 3 (citing Fukumitsu ,r,r 59-63, Abstract, Figs. 9, 11, 12). Appellant contends that none of Fukumitsu's mirrors 108, 109, or 110 3 A rejection of claims 18-20 under 35 U.S.C. § 112, second paragraph is moot in light of Appellant's cancellation of claims 9-20. Final Act. 2; Amendment 2. 2 Appeal2017-007250 Application 13/796,249 shown in Figure 9 "are positioned to propagate a laser light to the polarization beam splitter 106." Appeal Br. 6. With respect to Figure 11 of Fukumistu, Appellant contends that "mirror 110 is not positioned to propagate a pulsed laser light to the polarization beam splitter 201." Id. at 7. With respect to Figure 12 of Fukumistu, Appellant contends that assuming arguendo the polarization beam splitter 107 is equivalent to the claimed polarizing beam splitter, the dichroic mirror 304 is equivalent to the claimed second reflector, and the dichroic mirror 303 is equivalent to the claimed first reflector, Figure 12 does not show a first reflector positioned along the transmitting axis of the polarizing beam splitter 107. Id. at 8. In the Answer, the Examiner states that in Figure 12 of Fukumitsu, "mirror (303) [is] positioned to propagate a laser light (LI) to polarization beam splitter (106)." Ans. 5. The Examiner then states that Figure 12 discloses "that first reflector (108) is positioned along the transmitting axis of the polarizing beam splitter (106), which ... is the same as element 128 of figure 1 which is between elements (106) and (108) of appellant's drawing." Id. at 6 (emphasis added). The Examiner continues that Figure 12 discloses "a second reflector (304 or 109) positioned to receive electromagnetic radiation (L2) originating from.first reflector (303) and propagate a return electromagnetic radiation to the polarizing beam splitter ( 106 or 107) along the reflecting axis." Id. at 7 ( emphasis added). In the Reply Brief, Appellant argues, with respect to Figure 12 of Fukumitsu, that the Examiner equates mirror 108 to the recited first reflector and mirror 109 to the recited second reflector, but mirror 109 is not positioned to propagate a return electromagnetic radiation to a polarizing 3 Appeal2017-007250 Application 13/796,249 beam splitter along the reflecting axis. Reply Br. at 3. Appellant next argues that the Examiner alternatively equates mirror 303 to the recited first reflector and the mirror 304 to the recited second reflector, but mirror 304 does not propagate a return electromagnetic radiation to a polarizing beam splitter along the reflecting axis. Id. at 4. For the following reasons, we do not sustain the rejection of claim 1. Appellant's Figure 1 illustrates an embodiment of the claimed optical apparatus. In the embodiment, energy pulses 124 are transmitted through first rotatable wave plate 102. Spec. ,r,r 16, 23, Fig. 1. First rotatable wave plate 102 is optically coupled to polarizing beam splitter 104. Id. ,r 16, Fig. 1. Polarizing beam splitter 104 reflects radiation along axis 126 and transmits radiation along axis 128. Id. Transmitted radiation 128 impinges on first reflector 108, which propagates radiation along first deflection axis 130 to second reflector 110. Id. ,r 17, Fig. 1. Second reflector 110 deflects the radiation propagated along deflection axis 130 such that the deflected radiation is delivered along the reflecting axis 126 to polarizing beam splitter 104. Id. In the Final Rejection, the Examiner identifies Fukumitsu's element 106 as corresponding to the recited polarizing beam splitter, element 108 as corresponding to the recited first reflector, and element 110 as corresponding to the recited second reflector. Final Act. 3. Figure 9 of Fukumitsu shows that polarizing beam splitter 106 reflects radiation received from waveplate 104 in an upward vertical direction. See Fukumitsu, Fig. 9. Element 110 of Fukumitsu reflects radiation in a downward vertical direction onto an object 1 to be processed. Id. ,r 3 8, Fig. 1. In Figure 11 of Fukumitsu, beam splitter 201 reflects radiation vertically downward with second reflector 110 also 4 Appeal2017-007250 Application 13/796,249 reflecting radiation vertically downward. However, in neither Figure 9 nor Figure 11, does second reflector 110 "propagate a return electromagnetic radiation to the polarizing beam splitter along the reflecting axis" of the beam splitter as required by claim 1. With respect to Figure 12 of Fukumitsu, beam splitters 106 and 107 reflect radiation along an axis that is vertically upward and vertically downward, respectively. See id. at Fig. 12. None of reflectors 109, 110, or 304 "propagate a return electromagnetic radiation to the polarizing beam splitter along the reflecting axis" of either of beam splitters 106 or 107 as required by claim 1. Consequently, the Examiner's finding that Fukumitsu anticipates claim 1 is not supported by the disclosure in Fukumitsu, as illustrated in Figures 9, 11, or 12, which are relied by the Examiner in support of the rejection. Therefore, we do not sustain the rejection of claim 1 as anticipated by Fukumitsu, nor do we sustain the rejection of claims 2-8 which depend from claim 1. DECISION The Examiner's decision rejecting claims 1-8 is reversed. REVERSED 5 Copy with citationCopy as parenthetical citation