Ex Parte KolesnychenkoDownload PDFPatent Trial and Appeal BoardMar 30, 201711189010 (P.T.A.B. Mar. 30, 2017) Copy Citation United States Patent and Trademark Office UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O.Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 11/189,010 07/26/2005 Aleksey Yurievich Kolesnychenko 081468-0316986 8192 909 7590 04/03/2017 Pillsbury Winthrop Shaw Pittman, LLP PO Box 10500 McLean, VA 22102 EXAMINER KHARE, ATUL P ART UNIT PAPER NUMBER 1742 NOTIFICATION DATE DELIVERY MODE 04/03/2017 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): docket_ip@pillsburylaw.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte ALEKSEY YURIEVICH KOLESNYCHENKO Appeal 2016-002101 Application 11/189,010 Technology Center 1700 Before BEVERLY A. FRANKLIN, WESLEY B. DERRICK, and LILAN REN, Administrative Patent Judges. FRANKLIN, Administrative Patent Judge. DECISION ON APPEAL Appellant request our review under 35 U.S.C. § 134 of the Examiner’ decision rejecting claims 1, 2, 4, 5, 7, 9, 11, 13, 15, 16, 32, 33, 35, 36, 38, and 39. We have jurisdiction over the appeal under 35 U.S.C. § 6(b). Appeal 2016-002101 Application 11/189,010 STATEMENT OF THE CASE Claim 1 is illustrative of Appellant’s subject matter on appeal and is set forth below (with text in bold for emphasis): 1. A lithographic apparatus comprising an imprint template, a substrate table configured to hold a substrate, and an outlet to supply infrared, visible, or ultraviolet radiation, the imprint template having: a body transparent to the infrared, visible, or ultraviolet radiation, a patterned surface in or on the exterior of the body of the imprint template, the patterned surface comprising a protrusion and a recess, and a layer of heat absorbing material overlying all of the exterior of the patterned surface to absorb heat due to the infrared, visible, or ultraviolet radiation entering the imprint template through a surface other than the patterned surface, the layer of heat absorbing material being opaque to the infrared, visible, or ultraviolet radiation, wherein (i) the recess with the layer of heat absorbing material therein has an opening width or depth of less than or equal to 100 nm, or (ii) the protrusion with the layer of heat absorbing material thereover has a width or depth of less than or equal to 100 nm, or (iii) both (i) and (ii). The Examiner relies on the following prior art references as evidence of unpatentability: Debe et al. US 6,521,324 B1 Feb. 18,2003 (hereafter “Debe”) Nishida et al. US 2004/0142273 Al July 22, 2004 (hereafter “Nishida”) Funada et al. US 2005/0057789 Mar. 17, 2005 (hereafter “Funada”) Choi et al. US 2006/0062867 Al Mar. 23, 2006 (hereafter “Choi”) Ino (as translated) JP 06119661 Apr. 28, 1994 2 Appeal 2016-002101 Application 11/189,010 THE REJECTIONS 1. Claims 1, 2, 4, 5, 7, 9, 11, 13, 15, 16, 32, 33, 35, 36, 38, and 39 are rejected under 35 U.S.C. §112(a) or 35 U.S.C. §112 (pre-AIA), first paragraph, as failing to comply with the written description requirement.1 2. Claims 1, 2, 4, 7, 9, 11, 13, 15, 32, 35, 36, 38, and 39 are rejected under 35 U.S.C. § 103(a) are rejected as being unpatentable over Ino in view of Choi. 3. Claim 33 is rejected under 35 U.S.C. § 103(a) is rejected as being unpatentable over Ino in view of Choi and further in view of Debe. 4. Claims 1, 2, 4, 5, 7, 9, 11, 13, 15, 16, 32, 35, 36, 38, and 39 are rejected under pre-AIA 35 U.S.C. § 103(a) as being unpatentable over Nishida in view of Choi. 5. Claim 33 is rejected under pre-AIA 35 U.S.C. § 103(a) is rejected as being unpatentable over Nishida in view of Choi, as applied to claims 1, 2, 4, 7, 9, 11, 13, 15, 32, 35, 36, 38, and 39 above, and further in view of Debe. 1 On page 4 of the Answer, the Examiner notes that the rejection of claims 35 and 39 under 35 U.S.C. §112, first paragraph, has been withdrawn for what these claims particularly recite, but notes that these claims remain rejected as depending from rejected claims 1 and 11. 3 Appeal 2016-002101 Application 11/189,010 ANALYSIS To the extent that Appellant has presented substantive arguments for the separate patentability of any individual claims on appeal, we address them separately consistent with 37 C.F.R. § 41.37(c)(l)(vii). Rejection 1 Appellant argues that the Specification provides support for the recitation found in claims 1 and 11 of a heat absorbing material being “opaque” by (a) disclosing that the heat absorbing layer absorbs light, (b) not depicting radiation to pass through the heat absorbing layer in Figure 4b, (c) originally claiming that the heat absorbing layer is not transparent, and (d) disclosing a benefit of the heat absorbing layer with respect to prior art where light energy is directly transferred to an imprintable medium. Appeal Br. 5-6. In reply, the Examiner states that the term “opaque” does not appear in the Specification, and the Specification lacks any implicit support for this feature for the reasons expressed on pages 5—6 of the Answer (which we do not repeat herein). We first note that there is no requirement in US practice for ip sis verbis support of claims. “Adequate description under the first paragraph of 35 U.S.C. §112 does not require literal [emphasis in original] support for the claimed invention.” Ex parte Parks, 30USPQ2d 1234, 1236 (BPAI 1993). Appellant’s Specification discloses that the heat absorbing material is a layer of metal 35, for example, nickel or chromium. Spec. para. [0044], As Appellant points out (Appeal Br. 5), it is further disclosed that metal 4 Appeal 2016-002101 Application 11/189,010 layer 35 “absorbs the beam of light 37” (shown in Figure 4b), and rapidly becomes hot. Spec. para. [0046]. The fact that it is disclosed that metal layer 35 absorbs the beam of light 37—indicating the whole beam is absorbed—is adequate support that metal layer 35 is opaque. We are thus persuaded by Appellant’s position in the record. With regard to the limitation of “an opening width or depth of less than or equal to lOOnm,” Appellant argues that the Specification provides support for this claim phrase in paragraphs [0004] and [0005]. Appeal Br. 6. Reply Br. 4—6.2 Appellant’s argument is grounded on a contention as to what a person of ordinary skill in the art would understand the disclosure to convey. Appeal Br. 6. Reply Br. 5. But Appellant presents no persuasive evidence in support of the contention. In re Pearson, 494 F.2d 1399, 1405 (CCPA 1974) (“Attorney’s argument. . . cannot take the place of evidence.”). The Examiner’s response is found on pages 6—7 of the Answer (which we do not repeat herein). Provided with no persuasive evidence to support Appellant’s position, we agree with the Examiner’s stated position in the record. Appellant has not adequately explained how paragraphs [0004] and [0005] of the Specification provides sufficient written description of “an opening width or depth of less than or equal to lOOnm” as now claimed. The term “features” is disclosed, but not whether the features are lateral features, a depth features, or both. We thus are unpersuaded by Appellant’s position in this regard. In view of the above, we affirm Rejection I. 2 The Reply Brief lacks pagination; we refer to page numbers sequentially. 5 Appeal 2016-002101 Application 11/189,010 Rejection 2 Rejection 2 involves the rejection of claims 1, 2, 4, 7, 9, 11, 13, 15, 32, 35, 36, 38 and 39 under 35 U.S.C. § 103(a) as being unpatentable over Ino in view of Choi. It is disputed as to whether Ino suggests a layer of heat absorbing material being opaque to infrared, visible, or ultraviolet radiation. Appellants argue, inter alia, that the Examiner identifies film 11 of Ino as the recited layer of heat absorbing material (Final Act. 6). Appeal Br. 9. Appellant argues that the cited portions of Ino indicate that film 11 on stamper 12 is transparent in order to be used in a 2P method of forming optical memory substrates. Ino, para. [0011], [0012], FIG. 3. Appeal Br. 9— 10. Reply Br. 6. Appellant further states that Ino describes how film 11 transmits radiation to a resin 14. Appeal Br. 10. Reply Br. 6. Appellant submits therefore that Ino does not teach the recited layer of heat absorbing material opaque to infrared, visible, or ultraviolet radiation as recited in claim 1. Id. Appellant further argues that the function of Ino’s metal film 11 is to allow radiation to pass through the film 11 to the resin. Ino, para. [0002], Appellant submits that if Ino’s film were opaque, the radiation provided to stamper 12 would not reach the resin to harden it. Appellant also refers to paragraphs [0007], [0010] — [0012], and [0014] of Ino in this regard. Appeal Br. 10. We are persuaded by these arguments that Ino’s film 11 is not opaque to infrared, visible, or ultraviolet radiation as required by claim 1. The Examiner states that film 11 has a thickness falling within or overlapping with the thickness of Appellant’s heat absorbing layer. Final 6 Appeal 2016-002101 Application 11/189,010 Act. 4, 6, 7. Appellant replies by stating that claim 1 does not refer to a particular thickness, so it is not apparent what Ino’s disclosure regarding its film material or thickness has to do with claim 1. Appeal Br. 10. Appellant further submits that when comparing Appellant’s Specification with the specification of Ino, it is noted that Ino refers to a film of 100 Angstroms or less, which, in terms of nanometers, means 10 nanometers or less. In contrast, Appellant points out that the Specification refers to, for example, “the metal layer 35 [being] between a few tens and a few hundreds of nanometers thick. Spec. para. [0044], Appeal Br. 10-11. We are thus persuaded of error regarding the Examiner’s position that Ino’s film 11 has a thickness falling within or overlapping with the thickness of Appellant’s heat absorbing layer. In view of the above, in addition to Appellant’s stated position in the record, we reverse Rejection 2. It is noted that the Examiner does not rely upon the secondary reference of Choi to cure the aforementioned deficiencies of Ino. Rejection 3 Rejection 3 involves the rejection of claim 33 under 35 U.S.C. § 103(a) as being unpatentable over Ino in view of Choi and further in view of Debe. Because the Examiner does not rely upon Debe to cure the stated deficiencies of the combination of Ino in view of Choi, we also reverse Rejection 3 for the same reasons that we reverse Rejection 2. 7 Appeal 2016-002101 Application 11/189,010 Rejection 4 Rejection 4 involves the rejection of claims 1,2, 4, 5,7, 9, 11, 13, 15, 16, 32, 35, 36, 38, and 39 under 35 U.S.C. § 103(a) as being unpatentable over Nishida in view of Choi. The dispositive issue in this rejection is whether Nishida discloses an “imprint template” as required in the claims. The Examiner argues that the terms “mold” and “template” are commonly used interchangeably in the molding arts. Ans. 12. The Examiner submits that Nishida's mold meets each structural element of “template” (with exception only of the claimed width or depth dimensions that are instead met by Choi), and that Nishida's mold is in fact explicitly disclosed as being used to imprint a material to transfer a pattern thereto. Nishida, para. [0168]. Ans. 12—13. The Examiner submits that protrusions 54 of Nishida's Figure 3 mold 52 are utilized for Appellant’s exact same intended use (i.e., to imprint material 46 so as to form the Figure 2 pattern). Ans. 13. Appellant disputes that portions 54 and layer 56 of Figure 3 of Nishida imprint into any material. Appellant submits that protruding portions 54 and layer 56 of Nishida merely sit upon support 32, which then transfers the heat from layer 56 to the layer 34 underneath support 32. The heat causes the layer 34 to soften and then stick to the workpiece 36. Appeal Br. 15—16. Reply Br. 9-11. Appellant discusses paragraph [00168] of Nishida, which is reproduced below: At the upper mold 52, protruding portions 54 are formed at a face thereof that faces the transfer film 30. These protruding portions 54 8 Appeal 2016-002101 Application 11/189,010 are formed in accordance with the pattern of the organic electroluminescent light-emitting layer 46 that is to be formed at the workpiece 36. In other words, in the present embodiment, the protruding portions 54 are provided at the upper mold 52 such that, when the transfer film 30 and the workpiece 36 are positioned and sandwiched between the upper mold 52 and the lower mold 14, the protruding portions 54 correspond to the pattern of the organic electroluminescent light-emitting layer 46 to be formed at the workpiece 36. Nishida, para. [00168]. Appellant submits that there is no mention in paragraph [00168] that portions 54 of Figure 3 of Nishida imprint into any material. Appellant submits that the aforementioned paragraph merely states that the portions are formed with a particular pattern, namely the pattern of the organic electroluminescent light-emitting layer 46. We agree with Appellant’s stated interpretation of this disclosure of Nishida. Hence, we agree that the claimed element of “an imprint template” is not met by Nishida in view of Choi for the reasons stated in the record by Appellant, and as emphasized herein. In view of the above, we reverse Rejection 4 (the Examiner does not rely upon Choi to cure the aforementioned deficiencies of Nishida). Rejection 5 Rejection 5 involves the rejection of claim 33 under 35 U.S.C. § 103(a) as being unpatentable over Nishida in view of Choi, and further in view of Debe. Because the Examiner does not rely upon Debe to cure the stated deficiencies of the combination of Nishida in view of Choi, we also reverse Rejection 5 for the same reasons that we reverse Rejection 4. 9 Appeal 2016-002101 Application 11/189,010 DECISION Rejection 1 is affirmed. Rejections 2—5 are reversed. TIME PERIOD FOR RESPONSE No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). ORDER AFFIRMED 10 Copy with citationCopy as parenthetical citation