Ex Parte Kapusta et alDownload PDFPatent Trial and Appeal BoardJul 26, 201613327333 (P.T.A.B. Jul. 26, 2016) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE FIRST NAMED INVENTOR 13/327,333 12/15/2011 Christopher James Kapusta 62204 7590 07/28/2016 GENERAL ELECTRIC COMPANY (LICENSING) ATTN: Brandon, 59W - 105U 1 RIVER ROAD SCHENECTADY, NY 12345 UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. 235401-3 (GEL8083.137) 7047 EXAMINER HALL, VICTORIA KATHLEEN ART UNIT PAPER NUMBER 2897 NOTIFICATION DATE DELIVERY MODE 07/28/2016 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address( es): vivian.brandon@ge.com rlt@zpspatents.com docket@fyiplaw.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte CHRISTOPHER JAMES KAPUST A, GLENN FORMAN and JAMES SABATINI Appeal2015-001931 Application 13/327,333 Technology Center 2800 Before TERRY J. OWENS, GEORGE C. BEST and BRIAND. RANGE, Administrative Patent Judges. OWENS, Administrative Patent Judge. DECISION ON APPEAL STATEMENT OF THE CASE The Appellants appeal under 35 U.S.C. § 134(a) from the Examiner's rejection of claims 21, 23-29, 31-35 and 37--42. We have jurisdiction under 35 U.S.C. § 6(b). The Invention The Appellants claim a method for fabricating an integrated circuit or a multi-chip package. Claim 21 is illustrative: 21. A method for fabricating an integrated circuit (IC) package comprising: providing an uncured first dielectric layer having a non-conductive flexible liner coupled thereto, the uncured first dielectric layer having a thickness defined between a first Appeal2015-001931 Application 13/327,333 contact side and a second contact side, the first contact side having a contact portion and a noncontact portion, the second contact side coupled to the non-conductive flexible liner; attaching an active surface of a component to the contact portion of the first contact side of the uncured first dielectric layer using an adhesive property of the uncured first dielectric layer, the adhesive property substantially uniform throughout the thickness of the uncured first dielectric layer; curing the uncured first dielectric layer to form a cured first dielectric layer; forming a first via through the thickness of the cured first dielectric layer, the first via extending from the second contact side of the cured first dielectric layer to the active surface of the component; forming a metallization layer on the second contact side of the cured first dielectric layer, the metallization layer comprising at least one metallized path extending from the second contact side of the cured first dielectric layer through the via to the active surface of the component; and removing the non-conductive flexible liner of the cured first dielectric layer to expose the second contact side of the cured first dielectric layer prior to forming the first via. Fillion Haji Ono Davison Hsu Kurita Foong The References us 5,353,498 US 6,350,664 Bl US 2004/0115868 Al US 2005/0116387 Al US 2006/0049530 Al US 2008/0079164 Al US 2009/0001599 Al The Rejections Oct. 11, 1994 Feb.26,2002 June 17, 2004 June 2, 2005 Mar. 9, 2006 Apr. 3, 2008 Jan. 1, 2009 The claims stand rejected under 35 U.S.C. § 103 as follows: claims 21 and 26-28 over Hsu in view of Ono and Haji, claim 23 over Hsu in view of Ono, Haji, Fillion and Kurita, claim 24 over Hsu in view of Ono, Haji and 2 Appeal2015-001931 Application 13/327,333 Davidson, claim 25 over Hsu in view of Ono, Haji and Foong, claims 29, 31, 32, 41 and 42 over Haji in view of Ono, claim 33 over Haji in view of Ono, Fillion and Kurita, claim 34 over Haji in view of Ono and Fillion, claims 35 and 38--40 over Haji in view of Chen, Ono and Fillion, and claim 37 over Haji in view of Chen, Ono, Fillion and Kurita. 1 OPINION We affirm the rejections. The Appellants argue the claims in the following groups: 1) claims 21 and 23-28, 2) claims 29, 31, 32 and 34, 3) claims 33 and 37, and 4) claims 35 and 38--42 (App. Br. 4--30). We therefore limit our discussion to one claim in each group, i.e., claims 21, 29, 33 and 35. The other claims in each group stand or fall with the claim we address. See 37 C.F.R. § 41.37(c)(l)(iv) (2012). Claim 21 Hsu embeds a semiconductor chip ( 41) in an opening ( 420) in a support plate ( 42) by mounting the semiconductor chip ( 41 )' s active surface on a glass fiber-reinforced prepreg dielectric layer ( 40) having on its opposite side an isolation layer ( 44) such as a film, and pressing the semiconductor chip ( 41) into the opening ( 420) such that the dielectric layer ( 40) fills the gap ( 421) between the semiconductor chip ( 41) and the opening (420), and then removes the isolation layer (44) (i-fi-f 32-36; Figs. 4A--4D). In another embodiment Hsu forms dielectric layer (30) openings (300) which expose electrode pads (311) on a semiconductor chip (31) embedded in a support plate (32), and then forms a conductive 1 A rejection of claim 42 under 35 U.S.C. § 112, first paragraph, written description requirement is withdrawn in the Examiner's Answer (Ans. 4). 3 Appeal2015-001931 Application 13/327,333 layer (51) on the dielectric layer (30)'s surface and in the openings (300) (i-fi-f 40-41; Figs. 5A-5B). Ono presses against a silicon wafer (10) having sprout-shaped bumps (16) thereon an adhesive resin sheet (18) comprising a moderate gel-state thermoplastic or thermosetting resin-sealing layer (22) on a supporting film (20) such that the sprout-shaped bumps (16) penetrate into the adhesive resin sheet (18) (iTiT 51-55; Figs. 2A-2D). "After the resin- sealing layer 22 of the laminated adhesive resin sheet 18 is sufficiently solidified, the film-like support element 20 is peeled and removed from the resin-sealing layer 22 such that the resin-sealing layer 22 is left on the surface of the silicon wafer 10 on which the sprout-shaped metal bumps 16 are arranged" (iT 58; Fig. 2E). Haji forms electrodes (2) on a semiconductor wafer (1 ), applies over the electrodes (2) a resin layer (3) which can be a B-stage epoxy resin sheet, forms blind holes (4) through the resin layer (3) to expose the electrodes (2), fills the blind holes (4) with solder paste (5), and mounts solder balls (6) on the solder paste (5) (col. 2, 11. 57-59; col. 3, 11. 18-26; col. 4, 11. 15-19, 25- 28; Figs. l(a}-(c), 2(a}-(c)). The Appellants acknowledge that Hsu and Haji attach a dielectric layer to a semiconductor wafer, curing the dielectric, forming vias in the dielectric layer, and form a metal layer on the dielectric layer and through the vias (App. Br. 9). The Appellants argue that the applied references would not have suggested removing Hsu's isolation layer (44) (which corresponds to the Appellants' non-conductive flexible liner) after the dielectric layer ( 40) has been cured but before applying a metallization layer 4 Appeal2015-001931 Application 13/327,333 because Ono's sprout-shaped bumps (16) are present before the resin-sealing layer (22) is cured (App. Br. 10-14). Ono does not indicate that the metal bumps (16) affect the curing of the resin-sealing layer (22) (i-f 58). Hsu's isolation layer (44) must be removed either before or after the dielectric layer ( 40) is cured. In view of Ono's disclosures that the resin-sealing layer (22) broadly can be a thermoplastic or thermosetting resin and that the film-like support element (20) is removable after the resin-sealing layer (22) has been cured (i-f 58), one of ordinary skill in the art, through no more than ordinary creativity, would have removed Hsu's isolation layer (44) after the dielectric layer (40) has been cured. See KSR Int'! Co. v. Teleflex Inc., 550 U.S. 398, 418 (2007) (in making an obviousness determination one "can take account of the inferences and creative steps that a person of ordinary skill in the art would employ"). See also In re O'Farrell, 853 F.2d 894, 903---04 (Fed. Cir. 1988) ("Obviousness does not require absolute predictability of success .... For obviousness under§ 103, all that is required is a reasonable expectation of success."). Claim 29 The Appellants argue that one of ordinary skill in the art would not have used Ono's film-like support element (20) in Haji's method because Haji "expressly teaches that such use of such sheets increases the probability of damage to the semiconductor package and cause[s] waste treatment problems. Haji, col. 4, 11. 52-60)" (App. Br. 18). That portion of Haji discloses: The process to remove the protective sheets after the [semiconductor wafer] thinning process required in the conventional methods is no longer necessary, therefore, the 5 Appeal2015-001931 Application 13/327,333 semiconductor wafer 1 is free of damage caused by the external force placed upon [it] during the removal of the protective sheet as well as during cutting. Therefore, a semiconductor device with superior reliability can be achieved. Further, since the consumable protective sheets are not used, problems of waste treatment caused by disposal of protective sheets after use do not exist. The protective sheet referred to by Haji is used to strengthen a semiconductor wafer while it is thinned (col. 1, 11. 24--42), not to support a dielectric layer. Ono's disclosure of supporting a dielectric layer (resin-sealing layer 22) by a film-like support element (20) until after the dielectric layer has been cured (i-f 58) would have led one of ordinary skill in the art, through no more than ordinary creativity, to likewise achieve the benefit of supporting Haji's dielectric layer (resin layer 3) with a film-like layer until after the dielectric layer has been cured. Claim 33 Claim 33, \vhich depends from claim 29, requires "encapsulating the first die in an embedding compound; and curing the embedding compound." Fillion discloses a chip (14) in a cured substrate molding material (24) (col. 6, 11. 43-51; col. 8, 11. 25-30; Fig. l(d)). Kurita discloses integrated circuit chips (32, 36) covered with an encapsulating resin (52) (i-f 71; Fig. 1). The Appellants assert that in view of Haji's background of the invention disclosure that "[ s ]pecial focus has been put on the effort to make semiconductor elements as thin as possible" (col. 1, 11. 19-21 ), one of ordinary skill in the art would not have made Haji's semiconductor device thicker by encapsulating the semiconductor wafer ( 1) in an embedding compound (App. Br. 29). 6 Appeal2015-001931 Application 13/327,333 That disclosure by Haji applies to semiconductor elements generally. Thus, if the Appellants' assertion were correct, one of ordinary skill in the art never would encapsulate a die in an embedding compound. However, as acknowledged by the Appellants, "[ c ]hip scale packages or integrated circuit (IC) packages are typically fabricated having a number of dies or chips encapsulated within an embedding compound" (Spec. i-f 3). One of ordinary skill in the art, therefore, through no more than ordinary creativity, would have encapsulated Haji's semiconductor die (1) to obtain the benefits of the encapsulation which is typical in the art. The Appellants assert that encapsulating Haji's semiconductor wafer ( 1) in an embedding compound is unnecessary because the semiconductor wafer (1 ), while being thinned, is adequately reinforced by the resin layer (3) (App. Br. 29). One of ordinary skill in the art would have encapsulated Haji's semiconductor die (1) as is typical in the art (Spec. i-f 3) not to reinforce the semiconductor wafer (1) while it is being thinned but, rather, to obtain the known benefits of that typical encapsulation. Claim 35 Chen discloses release films (1, 3) on both sides of a heat conducting functional resin (2) (i-f 17; Fig. 2). The Appellants assert that one of ordinary skill in the art would not have considered Ono's single step of penetrating pre-adhered metal bumps through an uncured dielectric layer and then curing the dielectric layer to be interchangeable with Haji's and Pillion's two-step process of forming vias in a cured dielectric layer and subsequently filling the vias with a metallization layer (App. Br. 24--25). 7 Appeal2015-001931 Application 13/327,333 That argument is not well taken because the rejection is not based upon those methods being interchangeable (Final Act. 31-36). The Appellants assert that "one skilled in the art would not have been motivated to combine Haji with a reference such as Ono or Chen that teaches a manufacturing technique that includes removal of any type of consumable protective liner layer based on the express disclosure of Haji that teaches away from the use of 'consumable protective sheets.' See Haji, col. 4, 11. 52-60)" (App. Br. 25). That argument is not convincing for the reason given above regarding the rejection of claim 29. For the above reasons we are not persuaded of reversible error in the rejections. DECISION/ORDER The rejections under 35 U.S.C. § 103 of claims 21 and 26-28 over Hsu in view of Ono and Haji, claim 23 over Hsu in view of Ono, Haji, Fillion and Kurita, claim 24 over Hsu in view of Ono, Haji and Davison, claim 25 over Hsu in view of Ono, Haji and Foong, claims 29, 31, 32, 41 and 42 over Haji in view of Ono, claim 33 over Haji in view of Ono, Fillion and Kurita, claim 34 over Haji in view of Ono and Fillion, claims 35 and 38--40 over Haji in view of Chen, Ono and Fillion, and claim 37 over Haji in view of Chen, Ono, Fillion and Kurita are affirmed. It is ordered that the Examiner's decision is affirmed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). AFFIRMED 8 Copy with citationCopy as parenthetical citation