Ex Parte EDWARDS et alDownload PDFPatent Trial and Appeal BoardOct 16, 201812201679 (P.T.A.B. Oct. 16, 2018) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE 12/201,679 08/29/2008 23494 7590 10/18/2018 TEXAS INSTRUMENTS IN CORPORA TED PO BOX 655474, MIS 3999 DALLAS, TX 75265 UNITED ST A TES OF AMERICA FIRST NAMED INVENTOR HENRY LITZMANN EDWARDS UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. TI-65205 9877 EXAMINER DAM, DUSTIN Q ART UNIT PAPER NUMBER 1721 NOTIFICATION DATE DELIVERY MODE 10/18/2018 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): uspto@ti.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte HENRY LITZMANN EDWARDS and TATHAGATA CHATTERJEE Appeal2017-011456 Application 12/201,679 Technology Center 1700 Before DONNA M. PRAISS, WESLEY B. DERRICK, and CHRISTOPHER C. KENNEDY, Administrative Patent Judges. PRAISS, Administrative Patent Judge. DECISION ON APPEAL 1 STATEMENT OF THE CASE Appellants2 appeal under 35 U.S.C. § 134(a) from the Examiner's decision to reject claims 19, 22-25, and 28. We have jurisdiction under 35 U.S.C. § 6(b). We AFFIRM. 1 In this Opinion, we refer to the Specification filed August 29, 2008 ("Spec."), the Final Office Action dated April 20, 2016 ("Final Act."), the Appeal Brief filed March 20, 2017 ("Appeal Br."), the Examiner's Answer dated July 13, 2017 ("Ans."), the Reply Brief filed September 13, 2017 ("Reply Br."), and the Declaration of Henry Litzmann Edwards, Ph.D., dated March 7, 2014 ("Edwards Deel."). 2 The real party in interest is identified as Texas Instruments Incorporated. Appeal Br. 2. Appeal 2017-011456 Application 12/201,679 The invention relates to thermoelectric devices in integrated circuits. Spec. ,r 1. According to the Specification, integrated circuits frequently generate heat during operation, which raises the temperatures of internal components. Id. ,r 2. The Specification further states that thermoelectric coolers mounted on IC packages consume too much power to be useful and often fail to provide sufficient cooling. Id. Claim 19 is illustrative ( disputed limitations italicized): 19. A process of forming a nanoscale thermoelectric device in an integrated circuit, comprising the steps of: forming a thermoelectric device in a substrate comprising silicon, including forming a p-well; forming an n-well proximate to said p-well; forming a first p-type active area in said p-well; forming a first n-type active area in said n-well; forming a first vertical metal connection on said first p- type active area; forming a second vertical metal connection on said first n-type active area[;] forming a central metal terminal on said first vertical metal connection and on said second vertical metal connection, such that said central metal terminal is electrically connected to said first p-type active area and to said first n-type active area; forming a second p-type active area in said p-well; forming a second n-type active area in said n-well; forming a third vertical metal connection on said second p-type active area; forming a fourth vertical metal connection on said second n-type active area[;] forming a first electrode on said third vertical metal connection, such that said first electrode is electrically connected to said second p-type active area; and 2 Appeal 2017-011456 Application 12/201,679 forming a second electrode on said fourth vertical metal connection, such that said second electrode is electrically connected to said second n-type active area, wherein said first and second p-type active areas, and said first and second n-type active areas are less than 300 nanometers wide. Appeal Br. 14 (Claims Appendix). Claims 22-25 and 28 each depend from claim 19. Id. at 14--16 (Claims Appendix). The Examiner maintains (Ans. 2-19) the following rejections under 35 U.S.C. § 103 (Final Act. 3-20): 1. Claims 19, 25, and 28 over Inbe3 in view of Strnad. 4 2. Claims 22 and 23 over Inbe in view of Strnad, DeSteese, 5 and Bass. 6 3. Claims 19 and 24 over Inbe in view of Strnad and Tang. 7 OPINION The Examiner determines that claims 19, 22-25, and 28 would have been obvious to one of ordinary skill in the art at the time of the invention for the reasons stated on pages 3-20 of the Final Office Action. Appellants argue the patentability of independent claim 19 and rely on those same arguments for the dependent claims. Appeal Br. 5-13. Therefore, we select claim 19 as representative; claims 22-25 and 28 will stand or fall with claim 19 based upon the lack of arguments directed to the individual claims and the subsidiary rejections. 37 C.F.R. § 4I.37(c)(l)(iv). 3 Inbe, US 6,774,450 B2, issued Aug. 10, 2004. 4 Strnad, US 6,476,508 Bl, issued Nov. 5, 2002. 5 DeSteese et al., US 2008/0173537 Al, pub. July 24, 2008. 6 Bass et al., US 6,207,887 Bl, issued Mar. 27, 2001. 7 Tang et al., US 2009/0014807 Al, pub. Jan. 15, 2009. 3 Appeal 2017-011456 Application 12/201,679 Appellants do not dispute the Examiner's findings and analysis regarding the cited prior art. Appeal Br. 5. The sole issue in this appeal is whether the Edwards Declaration provides sufficient evidence of unexpected results to overcome the obviousness rejections. Id. at 5, 7. According to Appellants, the Edwards Declaration shows "'an unexpected behavior occurs when the dimensions of the [Thermoelectric Generator] fall below 300 nm' (i.e., the claimed Nanoscale Feature)." Appeal Br. 5 (quoting Edwards Deel. ,r 19). Appellants direct us to paragraphs 18-20 of the Edwards Declaration which refer to Figure 7 of the Edwards Paper8 as showing "the generated power ... approximately triples as the thermopile width is reduced from 240nm to 80nm." Id. at 8-9 (quoting Edwards Deel. ,r 20) (emphasis omitted). Based on this evidence, Appellants make three arguments: (1) the evidence is commensurate with the scope of the claimed range of "less than 300nm" because that is what the Edwards Declaration states and the Edwards Paper is merely an illustrative example, (2) the evidence is commensurate with the scope of the claimed "substrate comprising silicon" because both the Edwards Declaration and the Edwards Paper are not inconsistent with the description of the substrate in the Specification as "typically single crystal silicon, but possibly with regions of silicon- germanium," and (3) the explanation for the behavior in the Edwards Declaration does not "detract from the evidence presented by the Edwards 8 Hal Edwards, Jeff Debord, Toan Tran, Dave Freeman, and Ken Maggio, Performance Metrics for Thermoelectric Energy Harvesting Studied Using a Novel Planar 65 nm Silicon CMOS-Based Thermopile, Proceedings of the IEEE Sensors Conference (Nov. 3---6, 2013). 4 Appeal 2017-011456 Application 12/201,679 Declaration" that unexpected behavior occurs when the dimensions of the TE fall below 300nm. Id. at 9--12. The Examiner responds that ( 1) the evidence relied upon provides a range of 80 to 240 nm that is not commensurate in scope with "less than 300 nanometers" recited in claim 19, (2) claim 19 is not limited to silicon material because it is an open ended claim reciting "comprising silicon," and (3) the results provided in the Edwards paper are not unexpected because they appear to be based on the known phenomena of phonon sidewall scattering or phonon Brillouin zone folding. Ans. 21-23. In the Reply Brief, Appellants contend that the Edwards Declaration does not simply state that unexpected behavior occurs when the dimensions of the TE fall below 300 nm, but presents evidence that unexpected behavior occurs commensurate with claim 19. Reply Br. 4. Regarding the silicon substrate, Appellants contend that the Edwards Declaration is consistent with the Specification. Id. at 4--5. As to whether the results are unexpected if they are explained by known phenomena such as phonon sidewall scattering or phonon Brillouin zone folding, Appellants quote paragraphs 19 and 21 of the Edwards Declaration and assert that the explanation does not detract from the evidence provided. Id. at 5---6. After reviewing the positions and evidence presented by both Appellants and the Examiner, we affirm the stated rejections. Appellants characterize Figure 7 of the Edwards Paper as "merely an example illustrating [the statement in the Edwards Declaration] that 'unexpected behavior occurs when the dimensions of the TE fall below 300nm."' Appeal Br. 10. However, the Edwards Declaration provides no explanation or support for concluding that Figure 7 in the Edwards Paper describes the portions of the range between O and 300 nm outside of 80 to 5 Appeal 2017-011456 Application 12/201,679 240 nm, i.e., the full scope of the claimed range of "less than 300 nanometers wide." The x-axis of Figure 7 starts at 80nm and ends at 240nm, therefore, Figure 7 itself provides no information about the ranges between 0-80nm and 240-300nm nor the criticality of 300nm that Appellants claim. Aside from the conclusory statement in the Edwards Declaration, Appellants do not direct us to any evidence in this record to show that the Edwards Declaration "is not limited to a nanoscale range of 80-240nm used in the example described in the Edwards Paper." Id. Therefore, we are not persuaded that the Examiner erred in determining that Appellants' objective evidence of non-obviousness does not support the full scope of the range for the width of the first and second p-type active areas and first and second n- type active areas as recited in claim 19. In assessing the probative value of declaratory evidence, one must consider the nature of the matter sought to be established as well as the strength of the opposing evidence. In re Oelrich, 579 F.2d 86, 91 (CCPA 1978). Although opinion testimony must be considered and generally is entitled to some weight, a lack of objective support for expert opinion "may render the testimony of little probative value in a validity determination." Ashland Oil, Inc. v. Delta Resins & Refractories, Inc., 776 F.2d 281,294 (Fed. Cir. 1985). This holds true in patentability determinations as well. See In re Altenpohl, 500 F.2d 1151, 1158 (CCPA 1974) (lack of factual support rendered an affidavit of little probative value in overcoming obviousness rejection). The Examiner correctly finds that Figure 7 in the Edwards Paper provides a range of 80-240nm, the Examiner correctly finds that 80-240nm is not commensurate with the claimed range of less than 300nm, and the Examiner correctly finds that the Edwards Paper reports that the results in 6 Appeal 2017-011456 Application 12/201,679 Figure 7 are due to "increased sidewall scattering, reducing its thermal conductivity as was studied in Si nanowires." Ans. 21. Dr. Edwards's qualifications (Edwards Deel. ,r 2) do not entitle conclusory testimony to such probative weight that it would overshadow the weight of the other evidence; there is no requirement that a fact finder credit unexplained testimony of an expert. Rohm and Haas Co. v. Bro tech Corp., 127 F.3d 1089, 1092 (Fed. Cir. 1997). Paragraph 19 of the Edwards Declaration allegedly shows "an unexpected behavior occurs when the dimensions of the TE fall below 300nm" (Reply Br. 3, 4, 5, all quoting Edwards Deel. ,r 19), but, when compared to Figure 7 and the description of Figure 7 in the Edwards Paper, neither the full range of 0-300nm nor the behavior as unexpected is supported as pointed out by the Examiner. Whether an invention has produced unexpected results is a question of fact. In re Mayne, 104 F.3d 1339, 1343 (Fed. Cir. 1997). "[T]here is no hard-and-fast rule for determining whether evidence of unexpected results is sufficient to rebut a primafacie case of obviousness." Kao Corp. v. Unilever US., Inc., 441 F.3d 963, 970 (Fed. Cir. 2006); see also In re Dillon, 919 F.2d 688, 692-93 (Fed. Cir.1990) ("[e]ach situation must be considered on its own facts."). However, a party asserting unexpected results as evidence of nonobviousness has the burden of proving that the results are unexpected. In re Geisler, 116 F.3d 1465, 1469-70 (Fed. Cir. 1997). "[I]t is not enough to show that results are obtained which differ from those obtained in the prior art: that difference must be shown to be an unexpected difference." In re Klosak, 455 F.2d 1077, 1080 (CCPA 1972). Appellants argue that even though the Edwards Declaration provides an explanation for the asserted unexpected behavior, that does not detract from the evidence presented in the Edwards Declaration that the claimed 7 Appeal 2017-011456 Application 12/201,679 active areas are less than 300 nanometers wide is unexpected behavior. Appeal Br. 11-12 (citing Edwards Deel. ,r,r 21-24). The difficulty with Appellants' argument is that the Edwards Paper itself explains that the behavior shown in the Figure ("the generated power improves with thinner thermopile width despite having more perimeter") is due to the "thermopile itself is improved by the increased sidewall scattering, reducing its thermal conductivity as was studied in Si nanowires." Edwards Paper (description under Figure 7); Ans. 21. Appellants fail to establish that this behavior in Si nano wires was not known at the time of invention. See generally Appeal Br.; Reply Br.; Edwards Deel. To the extent that Appellants seek to argue in the Reply Brief that the behavior is expected in the field of nanotechnology, but not expected in the field of thermopile design, by quoting paragraph 21 of the Edwards Declaration with emphasis that the explanation comes from nanotechnology (Reply Br. 6), this argument is not persuasive because neither Appellants nor the Edwards Declaration explains why one skilled in the art of thermopile design would not look to nanotechnology, particularly when dimensions in the range of 0-300 nm are involved. Similarly, Appellants' argument (Appeal Br. 10) that the Examiner erred in concluding that the evidence presented is not commensurate with the scope of claim 19 because it is limited to silicon substrates is also unpersuasive of error because it fails to explain the gap between the range of substrate materials claimed and the substrate material described in the Edwards Paper. According to Appellants, neither the Edwards Declaration nor the Edwards Paper are "inconsistent with the description in the Specification that the claimed 'substrate' can be 'typically single crystal silicon, but possibly with regions of silicon-germanium (Si-Ge) in a top region of the substrate."' Id. at 11 ( citing Spec. ,r 18). Appellants' position 8 Appeal 2017-011456 Application 12/201,679 regarding consistency with the Specification does not address this gap, but merely acknowledges that "substrate comprising silicon" is inclusive of the material used in the Edwards Paper. In sum, after weighing all of the evidence cited in this Appeal, including Appellants' objective evidence, we find the preponderance of the evidence supports the Examiner's rejection of claim 19 under 35 U.S.C. § 103. CONCLUSION We affirm all of the Examiner's rejections of claims 19, 22-25, and 28. DECISION The Examiner's decision is affirmed. No time period for taking any subsequent action in connection with this appeal maybe extended under 37 C.F.R. § 1.136(a)(l). AFFIRMED 9 Copy with citationCopy as parenthetical citation