Ex Parte Bethune et alDownload PDFPatent Trial and Appeal BoardJun 15, 201612727746 (P.T.A.B. Jun. 15, 2016) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE FIRST NAMED INVENTOR 121727,746 03/19/2010 Donald S. Bethune 108176 7590 06/15/2016 Heslin Rothenberg Farley & Mesiti/ GlobalFoundries 5 Columbia Circle Albany, NY 12203 UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. 5120.002/ARC920090085US1 3889 EXAMINER BERNSTEIN, ALLISON ART UNIT PAPER NUMBER 2824 MAILDATE DELIVERY MODE 06/15/2016 PAPER Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte DONALD S. BETHUNE, KAILASH GOP ALAKRISHNAN, ANDREW J. KELLOCK, and ROHIT S. SHENOY1 Appeal2014-009662 Application 12/727,746 Technology Center 2800 Before MICHAEL P. COLAIANNI, CHRISTOPHER C. KENNEDY, and JENNIFER R. GUPTA, Administrative Patent Judges. KENNEDY, Administrative Patent Judge. DECISION ON APPEAL This is an appeal under 35 U.S.C. § 134(a) from the Examiner's decision to reject claims 1-23. We have jurisdiction under 35 U.S.C. § 6(b). We AFFIRM-IN-PART. BACKGROUND The subject matter on appeal relates to back end of line (BEOL) compatible high current density access devices for high density arrays of electronic components. E.g., Spec. 1 :3---6; Claim 1. Claim 1 is reproduced 1 According to the Appellants, the Real Party in Interest is International Business Machines Corporation. App. Br. 1. Appeal2014-009662 Application 12/727,746 below from page 16 (Claims Appendix) of the Appeal Brief (some formatting added): 1. A device, comprising: a first conductive layer; a second conductive layer; and a MsXY 6 layer sandwiched in between said first conductive layer on top and said second conductive layer on bottom, wherein (i). M includes at least one element selected from the group consisting of Cu, Ag, Li, and Zn, (ii). X includes at least one Group XIV element, and (iii). Y includes at least one Group XVI element, wherein said first conductive layer, second conductive layer and MsXY 6 layer are in proximity to each other, thereby allowing current to pass through. REJECTIONS ON APPEAL 1. Claims 1--4, 8-11, 14, and 15 stand rejected under 35 U.S.C. § 102(b) as anticipated by Pinnow (US 2007/0029538 Al, published Feb. 8, 2007). 2. Claims 5-7, 12, 13, and 16-23 stand rejected under 35 U.S.C. § 103 (a) as unpatentable over Pinnow in view of Gopalakrishnan (US 7,382,647 Bl, issued June 3, 2008). ANALYSIS Rejection 1 The Appellants present separate arguments for independent claims 1 and 8. We limit our discussion to those claims. Claims 2--4 depend from 2 Appeal2014-009662 Application 12/727,746 claim 1 and will stand or fall with claim 1. Claims 9-11, 14, and 15 depend from claim 8 and will stand or fall with claim 8. After review of the cited evidence in the appeal record and the opposing positions of the Appellants and the Examiner, we determine that the Appellants have not identified reversible error in the Examiner's rejection. Accordingly, we affirm the rejection for reasons set forth below, in the Final Action, and in the Examiner's Answer. See generally Final Act. 2-13; Ans. 2--4. The Examiner finds that Pinnow anticipates claims 1 and 8. Concerning claim 1, the Examiner relies on Figure 3E of Pinnow, which discloses, inter alia, electrodes (i.e., conductive layers) 3 and 6, and modified solid electrolyte layer 40. Pinnow i-fi-161, 63, 64; Final Act. 2-3. Pinnow teaches that "[i]f the solid electrolyte element ... initially contains a chalcogenide, such as germanium-selenide (GeSe) or germanium-sulfide (GeS), and the precipitates ... contain a metal, e.g. silver, a ternary compound, such as AgsGeSe6 or AgsGeS6 respectively, is formed." Pinnow i151. Pinnow emphasizes the importance of "suppress[ing]" formation of compounds such as AgsGeSe6 or AgsGeS6, because formation of such compounds "render[ s] inoperable" the solid electrolyte element. E.g., id. i-fi-f 16, 51, 52, 59. However, Pinnow expressly teaches that "[w]ithout application of the inventive method to render the solid electrolyte crystalline before the BEOL part of the CMOS process is carried out, the metal in the precipitates ... would have formed a stable ternary compound [e.g., AgsGeSe6 or AgsGeS6] with the material of the solid electrolyte .... " Id. i-f 65. 3 Appeal2014-009662 Application 12/727,746 Focusing on Pinnow' s teaching that formation of compounds such as AgsGeSe6 or AgsGeS6 should be suppressed, the Appellants argue, "[g]iven that Pinnow discloses inhibition/suppression of ternary compounds such as AgsGeSe6 or AgsGeS6, it would be moot to argue that Pinnow discloses a device having a [sic] AgsGeSe6 or AgsGeS6 layer." App. Br. 6-10. The Appellants also focus on Pinnow's manufacturing process and argue that, by the point at which both conductive layers have been fabricated, the solid electrolyte layer has been "modified" to the crystalline phase, and formation of compounds such as AgsGeSe6 or AgsGeS6 has been suppressed. Id. Therefore, according to the Appellants, Pinnow does not teach a device in which an MsXY6 is sandwiched between two conductive layers. Id. We are not persuaded by the Appellants' arguments. The Examiner "acknowledge[ s] that Pinnow teaches away from using a stable ternary compound [e.g., AgsGeSe6 or AgsGeS6]." Ans. 2. However, the Examiner correctly explains that "[a] reference is no less anticipatory if, after disclosing the invention, the reference then disparages it. The question whether a reference 'teaches away' from the invention is inapplicable to an anticipation analysis." Ans. 2 (citing MPEP § 2131.05); see also Celeritas Tech. Ltd. v. Rockwell Int'! Corp., 150 F.3d 1354, 1361 (Fed. Cir. 1998); In re Malagari, 499 F.2d 1297, 1302 (CCPA 1974). We agree with the Examiner's analysis. Here, while Pinnow discourages the formation of compounds such as AgsGeSe6 or AgsGeS6 in its electrolyte layer, it also discloses an electrolyte layer of AgsGeSe6 or AgsGeS6, compounds that fall within the scope of claim 1 's MsXY 6 layer. E.g., Pinnow i-f 51. Although the Appellants insist that Pinnow does not disclose every limitation of claim 1, e.g., Reply Br. 2-7, Figures 3E and 3F 4 Appeal2014-009662 Application 12/727,746 clearly disclose an electrolyte layer sandwiched between conductive layers, and paragraph 65 expressly teaches that, if Pinnow's particular method is not used, "the metal in the precipitates ... would have formed a stable ternary compound with the material of the solid electrolyte," i.e., compounds such as AgsGeSe6 or AgsGeS6. Thus, while discouraging the formation of such a device, Pinnow discloses a device that meets every limitation of claim 1. We therefore affirm the Examiner's rejection of claim 1. Claim 8 is similar to claim 1 but recites "an MaXb Ye material ... wherein a is in the range of 48---60 atomic percent, b is in the range of 4--10 atomic percent, c is in the range of 30-45 atomic percent, and a + b + c is at least 90 atomic percent." The Examiner finds that AgsGeSe6 and AgsGeS6, disclosed by Pinnow, constitute such an MaXb Ye material. Final Act. 3--4. The Appellants do not directly dispute that AgsGeSe6 or AgsGeS6 constitute an MaXb Ye material as claimed, but instead argue that "the Examiner's rejection is silent with regards to any atomic percentages with regards to Ag, Ge or Se, as [Pinnow] is entirely silent with regards to such details." App. Br. 12-13. In the Answer, the Examiner provides calculations showing that the compounds of Pinnow fall within the atomic percentages of claim 8. Ans. 3. The Appellants file a Reply Brief but do not contest the Examiner's calculations. On this record, and in view of the arguments presented, we affirm the Examiner's rejection of claim 8. Rejection 2 The Appellants include a separate paragraph in the Appeal Brief arguing that the § 103 rejection should be reversed because the claims subject to that rejection "inherit the features of independent claims 1 or 8." 5 Appeal2014-009662 Application 12/727,746 App. Br. 14; see also Reply Br. 7 ("The above-mentioned arguments with regards to Applicants' independent claims 1 and 8 substantially apply to [the claims rejected under § 10 3]. "). In the Answer, as explained above, the Examiner acknowledges that Pinnow teaches away from the claimed invention but properly maintains the rejection of claims 1 and 8 on the basis that "[t]he question whether a reference 'teaches away' from the invention is inapplicable to an anticipation analysis." Ans. 2. Teaching away, however, is applicable to an obviousness analysis under§ 103, and the Examiner provides no explanation as to how or why the obviousness rejection can be maintained in view of the Examiner's finding that Pinnow teaches away from the claimed invention. On this record, we are constrained to reverse the Examiner's obviousness rejection of claims 5-7, 12, 13, and 16-23. CONCLUSION We AFFIRM the Examiner's§ 102 rejection of claims 1--4, 8-11, 14, and 15. We REVERSE the Examiner's§ 103 rejection of claims 5-7, 12, 13, and 16-23. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a). AFFIRMED-IN-PART 6 Copy with citationCopy as parenthetical citation