Ex Parte Rohatgi et alDownload PDFPatent Trial and Appeal BoardAug 5, 201612758571 (P.T.A.B. Aug. 5, 2016) Copy Citation UNITED STA TES p A TENT AND TRADEMARK OFFICE APPLICATION NO. FILING DATE 121758,571 04/12/2010 23859 7590 08/09/2016 Ballard Spahr LLP SUITE 1000 999 PEACHTREE STREET ATLANTA, GA 30309-3915 FIRST NAMED INVENTOR Ajeet Rohatgi UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O. Box 1450 Alexandria, Virginia 22313-1450 www .uspto.gov ATTORNEY DOCKET NO. CONFIRMATION NO. 19439.0014U3 5228 EXAMINER BARTON, JEFFREY THOMAS ART UNIT PAPER NUMBER 1757 NOTIFICATION DATE DELIVERY MODE 08/09/2016 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address( es): USpatentmail@ballardspahr.com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Exparte AJEET ROHATGI, JI-WEON JEONG, KENTA NAKAYASHIKI, VIJA Y YELUNDUR, DONG SEOP KIM, and MOHAMED HILALI1 Appeal2015-000965 Application 12/758,571 Technology Center 1700 Before ADRIENE LEPIANE HANLON, WESLEY B. DERRICK, and CHRISTOPHER C. KENNEDY, Administrative Patent Judges. DERRICK, Administrative Patent Judge. DECISION ON APPEAL Appellants appeal under 35 U.S.C. § 134 from the Examiner's maintained rejections under 35 U.S.C. § 103(a) of claims 41-60 and 62-81. We have jurisdiction pursuant to 35 U.S.C. § 6. We AFFIRM. CLAIMED SUBJECT MATTER Appellants' claimed invention is directed to fabrication methods to provide a solar cell. Claims 41 and 60 are the sole independent claims. 1 Georgia Tech Research Corporation is identified as the real party in interest. Appeal Br. 2. Appeal2015-000965 Application 12/758,571 Independent claim 41 is illustrative: 41. A method for fabricating a solar cell comprising: providing a substrate doped to have a first conductivity; forming an emitter layer doped to have a second conductivity at a first side of the substrate, wherein the first conductivity is opposite the second conductivity; forming an antireflection layer comprising hydrogen on the emitter layer; screen-printing one or more contacts on the antireflection layer; screen-printing a contact layer on a second side of the substrate opposite the first; and enhancing a bulk minority carrier lifetime of the substrate, compnsmg: subjecting the substrate to a rapid belt co-firing process in a belt furnace in accord with a predetermined temperature profile to: electrically connect the one or more contacts to the emitter layer through the antireflection layer; form a uniform back surface field layer between the contact layer and the substrate; release hydrogen from the antireflection layer; and enhance the transfer of the released hydrogen to defects in the substrate to passivate the defects; wherein the predetermined temperature profile compnses: a temperature ramp-up stage, wherein, during the temperature ramp-up stage, the temperature of the substrate is increased at a rate ranging from about 50 °C/s to about 100 °C/s; a temperature holding stage of about five seconds or less; and a temperature ramp-down stage, wherein, during the temperature ramp-down stage, the temperature of the substrate is decreased at a rate ranging from about 50 °C/s to about 100 °C/s. Appeal Br. (Claims Appendix) 14-15. 2 Appeal2015-000965 Application 12/758,571 REJECTIONS The Examiner maintains rejections under 35 U.S.C. § 103(a) of: Claims 41--44, 46, 49-53, 56-60, 62-64, 66, 69-73, and 76-81 over Jeong 2001,2 Jeong 2002,3 and Biro;4 Claims 45, 54, 55, 74, and 75 over Jeong 2001, Jeong 2002, and Biro, further in view ofNagahara; 5 Claims 47 and 67 over Jeong 2001, Jeong 2002, and Biro, further in view of Salami;6 Claims 48 and 68 over Jeong 2001, Jeong 2002, and Biro, further in view of Rand; 7 and Claim 65 over Jeong 2001, Jeong 2002, and Biro, further in view of Watabe. 8 DISCUSSION Appellants proffer argument as to independent claim 41, and also set forth the same argument as to independent claim 61. Compare Appeal Br. 5-9 to Appeal Br. 9-13. Appellants rely on the dependency from these claims for the patentability of all other claims. Appeal Br. 9, 12-13. We 2 Jeong et al., Enhanced Silicon Solar Cell Performance by Rapid Thermal Firing of Screen-Printed Metals, 48(12) IEEE Trans. Electron. Devices, 2836--41 (Dec. 2001). 3 Jeong et al., RAPID THERMAL PROCESSING TO ENHANCE PECVD SIN- lNDUCED HYDROGENATION IN HIGH-EFFICIENCY EFG SILICON SOLAR CELLS, IEEE, 250-53 (2002). 4 Biro et al. (US 2003/0183491 Al, published October 2, 2003). 5 Nagahara et al. (US 4,737,197, issued April 12, 1988). 6 Salami et al. (US 5,928,438, issued July 27, 1999). 7 Rand et al. (US 5,266,125, issued November 30, 1993). 8 Watabe et al. (US 2004/0065362 Al, published April 8, 2004). 3 Appeal2015-000965 Application 12/758,571 find claim 41 to be representative and will decide the appeal as to all claims as a group. 37 C.F.R. § 41.37(c)(l)(iv). "[T]he Examiner bears the initial burden, on review of the prior art or on any other ground, of presenting a prim a facie case of unpatentability." In re Oetiker, 977 F.2d 1443, 1445 (Fed. Cir. 1992). To prevail in an appeal to this Board, Appellant must adequately explain or identify reversible error in the Examiner's rejection. See 37 C.F.R. § 41.37(c)(l)(iv) (2012); see also In re Jung, 637 F.3d 1356, 1365-66 (Fed. Cir. 2011) (explaining that even if the Examiner had failed to make a prima facie case, it has long been the Board's practice to require an Appellant to identify the alleged error in the Examiner's rejection). Upon consideration of the evidence and opposing contentions of the Appellants and the Examiner, we are unpersuaded of harmful error in the Examiner's decision. 9 We add the following. Appellants contend that the Examiner has failed to establish that it would have been obvious to one of ordinary skill in the art at the time of invention to enhance a bulk minority carrier lifetime of the substrate by subjecting the substrate to a rapid belt co-firing process in a belt furnace to a predetermined temperature profile comprising a ramp-up stage with temperature increasing at about 50 °C/s to about 100 °C/s, a temperature holding stage of five seconds or less, and a temperature ramp-down stage with temperature decreasing at about 50 °C/s to about 100 °C/s. See, generally, Appeal Br. 9 We refer to the Non-Final Office Action filed August 22, 2013, the Appeal Brief filed April 21, 2014, and supplemented May 29, 2014, and the Examiner's Answer mailed August 14, 2014. 4 Appeal2015-000965 Application 12/758,571 The Examiner relies on Jeong 2001 for its teaching of a method of making a solar cell by co-firing a substrate, including, inter alia, a temperature ramp-up in which the substrate temperature is increased between 10 °C/s and 100 °C/s and temperature holding for one second. Ans. 3, 12 (citing Jeong 2001 2837 iii! 2-3; 2838 iJ 1, Section B). The Examiner reasonably determines the substrate is then cooled, although Jeong 2001 is silent as to particulars of the temperature ramp-down stage. Ans. 3, 12-13. The Examiner also finds Jeong teaches belt furnaces provide high throughput to reduce costs. Ans. 12 (citing Jeong 20012837,iJ3). The Examiner relies on Jeong 2002 for its teaching that a faster temperature ramp-down increases hydrogen retention and, therefore, defect passivation compared to slower temperature ramp-down passivation. Ans. 3--4, 13 (citing Jeong 2002 251 iJ 4). The Examiner determines that Jeong 2002 establishes the temperature ramp-down stage is a result effective variable. Ans. 3--4, 13. The Examiner relies on Biro for its disclosure of a belt furnace for fabrication of solar cells that is capable of rapid temperature processing. Ans. 4, 13 (citing Biro iii! 1, 17, 45, Fig. 1). The Examiner further determines de facto that providing a belt furnace capable of rapid thermal processing including both increasing and decreasing temperatures would have been within the ambit of the skilled artisan at the time of invention. Ans. 16. The Examiner concludes it would have been obvious at the time of the invention to use a belt-line furnace capable of RTP to co-fire solar cells using fast temperature ramp-up, temperature hold, and fast temperature ramp-down profiles as set forth in the claims for the benefit of high 5 Appeal2015-000965 Application 12/758,571 throughput to produce solar cells with increased hydrogen passivation. Ans. 13. The Examiner concludes the recited temperature ramp-up is prima facie obvious because the rate of temperature increase is encompassed by the range of rates disclosed by Jeong 2001. Ans. 3, 12. The Examiner concludes the recited temperature ramp-down is prima facie obvious because it is a result effective variable for improving passivation and no more than routine experimentation would be required to arrive at the claimed parameters. Ans. 4, 13. Appellants contend that the specific parameters of the temperature profile, in combination, enhance the retention of hydrogen at defects and thereby improve the bulk minority carrier lifetime of the substrate. Appeal Br. 6 (citing Spec. 14, 1. 16 to 15, 1. 5, by reference to US 2010/0233840, iii! 86-89). Appellants' position, however, is not a cogent argument that the Examiner erred reversibly, particularly where Jeong 2001 discloses similar improvements in fill factors and back surface recombination (Ans. 13-14, citing Jeong 2840) and it is not contested that Jeong 2002 teaches that a fast cooling rate in R TP enhances the retention of hydrogen at the defects (see, e.g., Appeal Br. 7). Appellants proffer arguments as to each of Jeong 2001, Jeong 2002, and Biro, but fail to squarely address the relied on combination as set forth by the Examiner. Because the rejection is based on what the combination of teachings would have suggested to one of ordinary skill in the art at the time of the invention, Appellants' arguments are unpersuasive of reversible error. In re Keller, 642 F.2d 413, 425 (CCPA 1981) ("[T]he test is what the combined teachings of the references would have suggested to those of ordinary skill in the art."). It is axiomatic that "one cannot show non- 6 Appeal2015-000965 Application 12/758,571 obviousness by attacking references individually where ... the rejections are based on combinations of references." Id. at 426. In regard to Jeong 2001, Appellants' arguments emphasize that the disclosed co-firing scheme that includes a ramp-up rate of about 50 °C/s to about 100 °C/s is not conducted in a beltline furnace and there is no particulars as to the ramp-down stage. Appeal Br. 6-7. Appellants then further contend that the disclosed improvements in Voe and Al-BSF saturate when the ramp-up rate exceeds 10 °C/s and that one of ordinary skill in the art would not have been motivated to increase the ramp-up rate to that claimed. Appeal Br. 7. We do not find these arguments persuasive of reversible error where Jeong 2001 discloses a range of ramp-up rates-between 10 °C/s and 100 °C/s-that encompass the claimed rate and, while not necessary to provide the particularly disclosed benefits, it is evident that the ramp-up rates exceeding 10 °C/s also provide the disclosed improvements Voe and Al-BSF. A reference is good for all that it teaches to a person of ordinary skill in the art. See, e.g., Merck & Co., Inc. v. Biocraft Labs, Inc., 874 F.2d 804, 807 (Fed. Cir. 1989). In regard to Jeong 2002, Appellants' arguments emphasize that despite "teach[ing] that 'a fast cooling rate in RTP enhances the retention of hydrogen at the defects' and that 'fast ramp-up during RTP firing is believed to improve Al-BSF and contacts,"' Jeong 2002 does not teach these with a beltline furnace and does not disclose the actual cooling rates used. Appeal Br. 7. Appellants contend that identifying the claimed ramp-down rate is more than a matter of routine experimentation, arguing the claimed ramp-up rate, holding period, and ramp-down rate are critical to achieve the enhanced 7 Appeal2015-000965 Application 12/758,571 bulk minority carrier lifetime of the substrate. Appeal Br. 7 (citing Spec. 14, 1. 16 to 15, 1. 5, by reference to US 2010/0233840, iii! 86-89)). Appellants further contend that there is no motivation to arrive at the claimed ramp- down rate or to believe such a ramp-down would be successful, arguing there are many risks and potential consequences that can occur under some conditions. Appeal Br. 7-8. We do not find these arguments persuasive of reversible error where the Examiner relies on the cited disclosure to show that the temperature ramp-down rate is a result effective variable-not for the specific cooling rates used-and Appellants provide no persuasive evidence that arriving at a working or optimal value would require more than routine experimentation. In re Pearson, 494 F.2d 1399, 1405 (CCPA 1974) ("Attorney's argument ... cannot take the place of evidence"). Similarly, absent evidence, we find Appellants' reliance on possible difficulties or problems that may occur under some conditions insufficient to establish one of ordinary skill in the art would not have been motivated to optimize conditions, including the temperature ramp-down rate, or that they would lack a reasonable expectation of success. "Obviousness does not require [an] absolute predictability of success ... all that is required is a reasonable expectation of success." In re 0 'Farrell, 853 F.2d 894, 903-04 (Fed. Cir. 1988). Further, Appellants' arguments fail to properly "take account of the inferences and creative steps that a person of ordinary skill in the art would employ" in overcoming difficulties in combining the teachings of the cited references. KSR Int'! Co. v. Teleflex Inc., 550 U.S. 398, 418 (2007). 8 Appeal2015-000965 Application 12/758,571 In regard to Biro, Appellants argue that the cited disclosure of a transport system to transport to-be-processed elements through a high- temperature zone fails to teach, suggest, or otherwise disclose using the transport system to achieve a temperature ramp-down rate as recited in the claims. Appeal Br. 8 (citing Biro iii! 1, 41 ). We do not find Appellants' argument as to Biro persuasive of reversible error because-focusing narrowly on the explicit disclosure of Biro-it both fails to address what the combined references would have suggested to those of ordinary skill in the art (Keller, 642 F.2d at 425), and to properly "take account of the inferences and creative steps that a person of ordinary skill in the art would employ" in overcoming difficulties in combining the teachings of the cited references (KSR, 550 U.S. at 418). Further, it is well established that in evaluating references, "it is proper to take into account not only the specific teachings of the references but also the inferences which one skilled in the art would reasonably be expected to draw therefrom" (In re Preda, 401F.2d825, 826 (CCPA 1968)), and one such reasonable inference is that a disclosed apparatus for RTP is capable of increasing and decreasing temperatures absent evidence otherwise (Ans. 16). Appellants fail to direct us to any evidence that there would be any difficulty in providing a rapid temperature processing belt furnace capable of achieving temperature ramp-down rates as recited in the claims. See, generally, Appeal Br. For the reasons above, it follows that we are not persuaded that the Examiner's determination is unsupported by the applied prior art and/or is otherwise based on teachings that are insufficient to support the conclusion of obviousness. 9 Appeal2015-000965 Application 12/758,571 It further follows that we do not find Appellants' further argument that the Examiner relied on impermissible hindsight persuasive of reversible error. Appeal Br. 8-9. If the Examiner has articulated a reason having rational underpinnings for making a proposed modification or combination of prior art teachings, then that articulated reasoning demonstrates the combination is not based on hindsight. See In re Kahn, 441 F.3d 977, 988 (Fed. Cir. 2006) (requiring "some articulated reasoning with some rational underpinning to support the legal conclusion of obviousness") (cited with approval inKSR, 550 U.S. at 418). On this record, accordingly, we are not persuaded the Examiner has erred reversibly in determining that one of skill in the art, at the time of the invention, armed with the cited prior art, would have been led to the claimed invention. It follows we affirm the Examiner's decision rejecting claims 41-60 and 62-81. CONCLUSION The Examiner's rejections of the claims under 35 U.S.C. § 103(a) are AFFIRMED. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § l.136(a)(l). AFFIRMED 10 Copy with citationCopy as parenthetical citation