Ex Parte He et alDownload PDFPatent Trial and Appeal BoardMar 29, 201713597890 (P.T.A.B. Mar. 29, 2017) Copy Citation United States Patent and Trademark Office UNITED STATES DEPARTMENT OF COMMERCE United States Patent and Trademark Office Address: COMMISSIONER FOR PATENTS P.O.Box 1450 Alexandria, Virginia 22313-1450 www.uspto.gov APPLICATION NO. FILING DATE FIRST NAMED INVENTOR ATTORNEY DOCKET NO. CONFIRMATION NO. 13/597,890 08/29/2012 Yuan He 10829-9066.US00 9641 46844 7590 03/31/2017 PFRKTNS TOTF TIP- Mirrnn EXAMINER PATENT-SEA POTTS, RYAN P PO BOX 1247 SEATTLE, WA 98111 -1247 ART UNIT PAPER NUMBER 2666 NOTIFICATION DATE DELIVERY MODE 03/31/2017 ELECTRONIC Please find below and/or attached an Office communication concerning this application or proceeding. The time period for reply, if any, is set in the attached communication. Notice of the Office communication was sent electronically on above-indicated "Notification Date" to the following e-mail address(es): patentprocurement @perkinscoie. com PTOL-90A (Rev. 04/07) UNITED STATES PATENT AND TRADEMARK OFFICE BEFORE THE PATENT TRIAL AND APPEAL BOARD Ex parte YUAN HE and HONG CHEN Appeal 2017-000587 Application 13/597,890 Technology Center 2600 Before JOSEPH L. DIXON, JAMES R. HUGHES, and ERIC S. FRAHM, Administrative Patent Judges. DIXON, Administrative Patent Judge. DECISION ON APPEAL Appeal 2017-000587 Application 13/597,890 STATEMENT OF THE CASE Appellants appeal under 35 U.S.C. § 134 from a rejection of claims 1— 30. We have jurisdiction under 35 U.S.C. § 6(b). We affirm. The invention relates to detecting defects in a microelectronic device, such as incompletely filled via holes (called “keyholes”), by analyzing an image of the microelectronic device using a fast marching method that takes image intensity as a speed function and converts it into arrival time information for identifying targeted features, such as a keyholes, where there is significant acceleration, i.e., a change in image intensity (see Spec, 24— 32). Claim 1, reproduced below, is illustrative of the claimed subject matter: 1. A method for analyzing an image of a microelectronic device, comprising: processing an image of a microelectronic device using a fast marching method to obtain arrival time information representative of features in the image of the microelectronic device; and analyzing the arrival time information using a targeted feature descriptor to identify targeted features, if any, in the image of the microelectronic device. REFERENCES The prior art relied upon by the Examiner in rejecting the claims on appeal is: Gleason US 6,456,899 B1 Sept. 24,2002 2 Appeal 2017-000587 Application 13/597,890 Roshan Dharshana Yapa & Koichi Harada, Breast Skin-Line Estimation and Breast Segmentation in Mammograms Using Fast-Marching Method, 1:5 Int’l Journal of Medical, Health, Pharmaceutical and Biomedical Engineering 217-25 (2007) (“Yapa”). Jiayong Yan, et al., Lymph Node Segmentation from CT Images Using Fast Marching Method, Computerized Medical Imaging and Graphics 28, 33-38 (2004) (“Yan”). REJECTIONS The Examiner made the following rejections: Claims 1—6 and 8—30 stand rejected under 35 U.S.C. § 103(a) as being unpatentable over Gleason and Yapa. Claim 7 stands rejected under 35 U.S.C. § 103(a) as being unpatentable over Gleason, Yapa, and Yan. ANALYSIS Claims 1—9 and 12—15 Regarding claim 1, Appellants contend one of ordinary skill in the art would not have been motivated to combine Yapa’s fast marching method with Gleason (see App. Br. 15—17). Appellants also contend combining Yapa’s fast marching method with Gleason would have changed the basic principle of operation of Gleason (see id. at 17—18). We disagree with Appellants. Yapa describes using a fast marching method to detect the breast skin line in a digital mammogram image when performing computer-aided diagnosis of breast cancer (see Yapa 217 (“I. Introduction”)). Yapa notes that “[f]ailure to detect breast skin-line accurately, would lead to overlook a lesion location near the skin line” (id.). Accordingly, Yapa describes 3 Appeal 2017-000587 Application 13/597,890 implementing the “fast marching method for boundary detection” in order to “extract the skin-line boundary of a given mammogram image” (Yapa 219 (“III. Fast Marching Method”)). Yapa’s fast marching method considers “the special case of a surface moving with speed F(x,y)>(F and lets “T(x,yj be the time at which the surface crosses a given point (x,y). The function T(x,y) then satisfies the equation: |V7]/*-l.” (Id.) For a given image with intensity values I(x,y), often this speed function F(x,y) is defined as a decreasing function based on the image local gradient \VI(x,y)\. . . . Thus the fast marching algorithm can be briefed as follows. A small front (typically a single seed point) is initialized inside the desired region, grows outwards and stops at the sharp boundary as the speed function A reduces to near zero. (Id.) Based on the above disclosure, the Examiner finds Yapa teaches “using a fast marching method to obtain arrival time information representative of features” and “analyzing the arrival time information using a targeted feature descriptor to identify targeted features,” as recited in claim 1 (Final Act. 8). Accordingly, the Examiner only needs to rely on Gleason for teaching an image of a microelectronic device as the subject of an image analysis. Gleason describes a method for detecting and classifying defects in an image of a semiconductor chip. Specifically, Gleason’s method “involves the mathematical manipulation of pixel data in the acquired reference and defect images 21, 22, and utilizes stored information in the knowledge database 23 to derive a useful classification of the type of defect contained in the defect image” (Gleason, col. 5,11. 36-40), where “the reference image 21 and defect image 22 can be generated, for example, by any of several in-line 4 Appeal 2017-000587 Application 13/597,890 defect inspection systems such as optical microscopes, scanning electron microscopes . . (Gleason, col. 2,11. 58—61). We agree with the following obviousness conclusion made by the Examiner: The mere fact that the specific content of the images used by Gleason and Yapa is different would not deter one of ordinary skill in the art from combining Yapa with Gleason. . . . Both Gleason and Yapa are concerned with image analysis algorithms that determine the boundaries of regions within images. One of ordinary skill in the art would look to inventions such as that disclosed by Yapa in order to improve another invention in the same field of image analysis, such as that disclosed by Gleason. (Ans. 8—9). In other words, one of ordinary skill in the art faced with the problem of detecting features in an image of a semiconductor device would have been motivated to look for an alternative image analysis technique such as Yapa’s fast marching method. Although Gleason and Yapa describe disparate image content, both references relate to the broad field of image analysis, and Yapa’s technique would have been applicable to Gleason’s image of a semiconductor device. Such “substitution of one element for another known in the field . . . must do more than yield a predictable result” to avoid being found obvious. KSR Int’l Co. v. Teleflex Inc., 550 U.S. 398, 416 (2007). Here, the result of the Examiner’s combination is predictable: it would allow one to use a fast marching method to detect boundaries, i.e., areas with a certain image intensity gradient, in an image of a semiconductor chip. Thus, we are not persuaded by Appellants’ argument that one would not have been motivated to combine Yapa with Gleason. 5 Appeal 2017-000587 Application 13/597,890 We are also not persuaded by Appellants’ argument that the Examiner’s combination would change the basic principle of operation of Gleason. The thrust of the Examiner’s obviousness conclusion is that one of ordinary skill in the art would have substituted one method of image analysis for another (see Ans. 8—9). Thus, Gleason’s method would indeed be altered by Yapa’s fast marching method, although it would be altered in a manner obvious to one of ordinary skill in the art that yielded only predictable results, as noted above. Further, we are not persuaded by Appellants’ Reply Brief arguments that the “Examiner’s proposed rationale relies on impermissible hindsight and is not a convincing line of reason for combining the applied references to arrive at the claimed invention,” “the Examiner improperly proposes modifying the Gleason technology to arrive at the claimed invention while ignoring the fact that Gleason’s sub-pixel registration and alignment is performed without determining defect boundaries,” and “[b]y segmenting the defects in the defect image, one of ordinary skill in the art would understand the Examiner’s modification could obviate Gleason’s segmentation process” (Reply Br. 2—3). Claim 1 does not include any limitations that specifically define how to implement a fast marching method with respect to a microelectronic device image in a way that is different than how to implement a fast marching method with respect to any other type of image. That is, aside from limiting the method to analysis of “an image of a microelectronic device,” there are no steps in claim 1 specifically tailored to the distinct features of a microelectronic device image. Accordingly, Appellants’ discussion of the details of integrating a fast marching method into Gleason’s particular defect detection and 6 Appeal 2017-000587 Application 13/597,890 classification method for an image of a semiconductor chip (see Reply Br. 2—3) is not commensurate with the broad scope of claim 1. Here, it suffices to show obviousness by concluding, as we do above, that one of ordinary skill in the art would have applied Yapa’s fast marching method to identify features of Gleason’s semiconductor chip image because this merely amounts to substituting a known method in the field of image analysis. We are, therefore, not persuaded the Examiner erred in rejecting claim 1, and claims 2—9 and 12—15 not specifically argued separately. Claims 10 and 11 Regarding claims 10 and 11, Appellants rely on the same arguments discussed above with respect to claim 1 (App. Br. 19), which are not persuasive. Additionally, Appellants contend “Gleason’s system is not designed to identify features in an arrival time image of a semiconductor device, much less identify targeted features for visual inspection” (id.). We are not persuaded by Appellants’ additional arguments. First, we note the Examiner relies on Yapa, not Gleason, for disclosing the use of an arrival time image to identify features (see Final Act. 8; Ans. 11). Second, the claim 10 limitation “for visual inspection” is merely an intended use limitation, and is thus, not given patentable weight. That is, claim 10 does not positively recite actually performing a visual inspection. We are, therefore, not persuaded the Examiner erred in rejecting claim 10, and claim 11 not specifically argued separately. 7 Appeal 2017-000587 Application 13/597,890 Claims 16—18 Regarding claims 16—18, Appellants rely on the same arguments discussed above with respect to claim 1 (App. Br. 20-21), which are not persuasive. Additionally, Appellants contend “Gleason fails to disclose fast marching methods and arrival time images. Ya[p]a also fails to disclose using arrival time images” {id. at 21). Further, Appellants contend Gleason “fails to disclose evaluating arrival time images using a targeted feature descriptor” and “Ya[p]a discloses using breast-line segmentation techniques to identify breast skin lines, not targeted features, in an input mammogram image” {id.). We are not persuaded by Appellants’ additional arguments. We note the Examiner relies on Yapa for disclosing the claim 16 limitation of “an arrival time image” {see Final Act. 8; Ans. 11), and Appellants have not specifically explained why the relied upon description in Yapa fails to meet this limitation. Further, we disagree with Appellants that detecting the breast skin-line in a digital mammogram image, as described in Yapa, fails to disclose identifying a targeted feature. Claim 16 does not recite a specific targeted feature that is identified, and thus, does not preclude Yapa’s detection of a boundary that corresponds to the breast skin line in a digital mammogram image {see Yapa 219 (“III. Fast Marching Method”)), from teaching the identification of a targeted feature. In other words, detecting boundaries where there is a certain image intensity gradient {see id.) meets the claim 16 limitation of “identifying targeted features.” Further, as discussed above regarding claim 1, it would have been obvious to use Yapa’s fast marching method to identify features in Gleason’s semiconductor chip image. 8 Appeal 2017-000587 Application 13/597,890 We are, therefore, not persuaded the Examiner erred in rejecting claim 16, and claims 17 and 18 not specifically argued separately. Claims 19—24 Regarding claims 19-24, Appellants rely on the same arguments discussed above with respect to claim 1 (App. Br. 21—22), which are not persuasive. Additionally, Appellants contend both Gleason and Yapa fail to disclose using an arrival time image and using a defect descriptor {id. at 22). We are not persuaded by Appellants’ additional arguments. We note the Examiner relies on Yapa for disclosing the claim 19 limitation of “an arrival time image” {see Final Act. 8; Ans. 11), and Appellants have not specifically explained why the relied upon description in Yapa fails to meet this limitation. Further, the Examiner relies on Gleason for disclosing the use of a “defect descriptor,” as recited in claim 19 (Final Act. 16; Ans. 12). We agree with the Examiner because Gleason discloses “utilizing] stored information in the knowledge database 23 to derive a useful classification of the type of defect contained in the defect image” {see Gleason, col. 5,11. 37-40). That is, in order for Gleason’s method to classify a defect, there must be some description of the defect, for example, in Gleason’s knowledge database. We are, therefore, not persuaded the Examiner erred in rejecting claim 19, and claims 20-24 not specifically argued separately. Claims 25—3 0 Regarding claims 25—30, Appellants rely on the same arguments discussed above with respect to claim 1 (App. Br. 22), which are not 9 Appeal 2017-000587 Application 13/597,890 persuasive. Additionally, Appellants contend Gleason and Yapa fail to disclose “the programmable processing device is configured to execute instructions from the memory to analyze the arrival time information using a targeted feature descriptor to identify targeted features, if any, in the image of the microelectronic device” (App. Br. 22—23). We disagree with Appellants’ additional argument. We agree with the Examiner’s interpretation of the claimed “programmable processing device” as a means under 35 U.S.C. § 112, sixth paragraph) (Final Act. 4—6). That is, “programmable processing device” does not denote “sufficiently definite structure” for performing the functions of claim 25. Williamson v. Citrix Online, LLC, 792 F.3d 1339, 1349 (Fed. Cir. 2015). As noted by the Examiner (Final Act. 5), we look to the Specification to determine what structures perform the recited functions in claim 25. See Personalized Media Comm ’ns, LLC v. Int 7 Trade Comm ’n, 161 F.3d 696, 703 (Fed. Cir. 1998) (“§ 112[(f)] operates to restrict claim limitations drafted in such functional language to those structures, materials, or acts disclosed in the specification (and their equivalents) that perform the claimed function.”). Here, the Specification discloses a processing unit for performing the inventive method that can be “one or more programmable processors, computers, central processing units, processing devices, microprocessors, digital signal processors (DSPs), and/or application- specific integrated circuits (ASICs)” (Spec. 1 61). Accordingly, Appellants’ “programmable processing device” can simply be a general purpose computer programmed to perform the claimed functions. We find Yapa discloses performing a computer-aided image analysis that involves using a fast marching method (see Yapa 217 (“I. 10 Appeal 2017-000587 Application 13/597,890 Introduction”)), and thus, meets the claim 25 limitation of a “programmable processing device.” Further, as discussed above with regard to claim 1, the combination of Gleason and Yapa discloses using arrival time information to identify targeted features in an image of a microelectronic device. We are, therefore, not persuaded the Examiner erred in rejecting claim 25, and claims 26—30 not specifically argued separately. CONCLUSION The Examiner did not err in rejecting claims 1—30 under 35 U.S.C. § 103(a). DECISION For the above reasons, the Examiner’s rejections of claims 1—30 are affirmed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(l)(iv). AFFIRMED 11 Copy with citationCopy as parenthetical citation